WGR/WTR Readings

08/24/2026 01:37:37

3/1/4030/0/0/0

_1st Flr: City Water Pressure

69.4

PSI

40

90

OK

08/14/2026 14:04:19

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

0.1

7.5

9

Inactive

08/24/2026 01:39:46

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

OK

08/24/2026 01:14:02

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.490

InH2O

0

1.5

OK

08/24/2026 01:11:23

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.133

InH2O

0

1

OK

08/24/2026 01:40:41

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.074

InH2O

0

2

OK

08/15/2026 23:03:19

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.315

InH2O

0

2

Inactive

08/14/2026 09:43:29

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

0.1

0

100

Inactive

08/24/2026 01:40:53

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

0.0

On/Off

0

2

OK

08/03/2026 12:30:51

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2

1.0

On/Off

0

2

Inactive

08/24/2026 01:39:19

4/1/5034/0/0/0

_2nd Flr: Rm 237 Haskris Chiller

0.0

On/Off

-0.9

2

OK

08/24/2026 01:36:28

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

08/24/2026 01:32:55

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

1.55

PSI

0.8

1.75

OK

08/24/2026 01:37:35

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

11.0

PSI

275

800

Lower Ctl Limit

08/24/2026 01:39:19

4/1/5034/0/0/1

_ASML_TEST: Proc Gas Fault Alarm

5.2

VOLTS

1

6

Inactive

08/24/2026 01:17:33

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

101.8

0

800

Inactive

08/24/2026 01:22:03

3/1/4101/0/0/0

_CDA Pressure

124.5

PSI

90

140

Inactive

08/24/2026 01:33:59

0/1/1201/0/0/0

_Cleanroom: Equip RH

43% / 70.3

F

38 / 65

42 / 75

Upper Ctl Limit

08/24/2026 01:40:58

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

0.0

On/Off

0

2

OK

08/24/2026 01:40:58

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

08/24/2026 01:30:06

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2577

PSI

200

3000

OK

08/24/2026 01:14:33

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

374

PSI

200

3000

OK

08/24/2026 01:41:38

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

08/24/2026 01:41:07

3/1/4031/0/0/0

_DI-RO: Light Sensor

0.0

On/Off

0

2

OK

08/24/2026 01:40:22

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

16.7

Ohm-cm

14

100

OK

08/24/2026 01:37:25

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

6.44

PSI

4

10

OK

08/24/2026 01:34:38

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

7.87

PSI

4

10

OK

08/24/2026 01:38:13

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

130.5

PSI

0

400

OK

08/24/2026 01:38:28

3/1/4015/0/0/0

_House Vacuum

-24.40

inHg

-30

-23

OK

08/24/2026 01:34:13

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

66.9

DEG F

0

85

OK

08/19/2026 06:32:20

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

209.6

InH2O

0

300

Inactive

08/24/2026 01:31:48

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

235.8

InH2O

0

300

OK

08/24/2026 01:30:01

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

85.8

InH2O

0

300

OK

08/24/2026 01:40:50

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

127.9

PSI

0

300

OK

08/24/2026 01:39:15

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

57.8

PSI

0

300

OK

08/24/2026 01:28:12

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

151.6

PSI

0

300

OK

08/24/2026 01:39:33

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

100.0

PSI

0

110

OK

08/24/2026 01:33:47

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

70.8

DEG F

0

52

Upper Ctl Limit

08/24/2026 01:40:00

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

30.8

PSI

67

94

Lower Ctl Limit

08/24/2026 01:38:20

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

0.0

F

0

160

Error-27

08/24/2026 01:32:58

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

123.1

PSI

0

135

OK

08/24/2026 01:40:06

3/1/4032/0/0/0

_RO: Flow to 236

1.07

GPM

0

100

OK

08/24/2026 01:35:01

0/1/1062/0/0/0

_Tank 47 GPN2

136.80

PSI

90

400

Error-28

08/24/2026 01:41:26

0/1/1064/0/0/0

_Tank 47 UHPN2

120.3

PSI

90

400

OK

08/24/2026 01:27:19

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

117.543

PSI

0

125

OK

08/24/2026 01:36:25

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2672

PSI

200

2800

OK

08/24/2026 01:35:31

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1013

PSI

200

2800

OK

08/24/2026 01:34:10

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

2001

PSI

300

2800

OK

08/24/2026 01:41:56

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

700

PSI

150

1000

OK

08/24/2026 01:33:24

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

552

PSI

200

3000

OK

08/24/2026 01:30:44

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

604

PSI

400

3000

OK

08/24/2026 01:34:11

0/1/1021/0/0/0

C_DDC_133_CO2_105376

820

PSI

350

2800

OK

08/24/2026 01:33:25

0/1/1022/0/0/0

C_DDC_133_O2_105375

2004

PSI

300

2800

OK

08/24/2026 01:42:08

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

2001

PSI

300

2800

OK

08/24/2026 01:30:45

0/1/1003/0/0/0

C_EX3_121_He_

453

PSI

200

2800

OK

08/24/2026 01:28:09

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

1457

PSI

200

2800

OK

08/24/2026 01:35:47

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

265

PSI

300

2600

Lower Ctl Limit

08/24/2026 01:38:10

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1564

PSI

300

3000

OK

08/24/2026 01:42:02

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

1899

PSI

200

2800

OK

08/24/2026 01:30:54

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

1817

PSI

200

2800

OK

08/24/2026 01:29:47

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

1003

PSI

200

2800

OK

08/24/2026 01:36:08

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2095

PSI

200

2800

OK

08/24/2026 01:35:34

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

580

PSI

200

2800

OK

08/24/2026 01:22:51

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

2149

PSI

200

2800

OK

08/24/2026 01:38:41

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1664

PSI

200

2800

OK

08/24/2026 01:31:20

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

722

PSI

200

2800

OK

08/24/2026 01:38:23

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

294

PSI

140

350

OK

08/24/2026 01:33:13

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1658

PSI

200

2800

OK

08/24/2026 01:41:49

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

774

PSI

200

3000

OK

08/24/2026 01:36:27

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

19

PSI

5

25

OK

08/24/2026 01:37:52

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

1825

PSI

350

4000

OK

08/24/2026 01:38:07

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1600

PSI

200

4000

OK

08/24/2026 01:35:16

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

1717

PSI

500

3000

OK

08/24/2026 01:35:05

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

881

PSI

200

2800

OK

08/24/2026 01:33:11

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1290

PSI

200

4000

OK

08/24/2026 01:29:29

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

15

PSI

5

300

OK

08/24/2026 01:32:51

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

473

PSI

200

4000

OK

08/21/2026 05:29:42

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

335

PSI

200

3000

Inactive

08/24/2026 01:32:58

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

634

PSI

150

1500

OK

08/24/2026 01:31:04

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

974

PSI

500

3000

OK

08/24/2026 01:28:13

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

2081

PSI

500

3000

OK

08/24/2026 01:28:51

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

OK

08/24/2026 01:23:57

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

100.3

LBS

5

300

OK

08/24/2026 01:23:57

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

0.4

LBS

3

300

Lower Ctl Limit

08/24/2026 01:33:36

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

97.0

LBS

3

300

OK

08/24/2026 01:33:36

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

101.3

LBS

3

300

OK

08/24/2026 01:34:32

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

08/24/2026 01:34:32

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

86.5

LBS

3

300

OK

08/24/2026 01:39:13

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

08/24/2026 01:40:13

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

67.9

LBS

3

300

OK

08/24/2026 01:40:13

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.1

LBS

0

300

OK

08/24/2026 01:39:13

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

50.0

LBS

3

300

OK

08/24/2026 01:38:16

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

91.3

LBS

3

300

OK

08/24/2026 01:34:42

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

11.9

LBS

5

300

OK

08/24/2026 01:28:42

0/1/1045/0/0/0

C_Weigh_Scale_138_HBr

26.8

LBS

2

20

Upper Ctl Limit

08/24/2026 01:34:42

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

08/24/2026 01:38:16

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

82.9

LBS

3

300

OK

08/24/2026 01:28:42

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

0.0

LBS

0

300

OK

08/24/2026 01:27:57

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

0.6

LBS

3

300

Lower Ctl Limit

08/24/2026 01:27:57

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

79.7

LBS

3

300

OK

08/24/2026 01:41:46

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

93.3

LBS

3

300

OK

08/24/2026 01:41:17

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

81.0

LBS

3

300

OK

08/24/2026 01:41:17

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

10.3

LBS

3

300

OK

08/24/2026 01:36:56

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

87.4

LBS

3

300

OK

08/24/2026 01:34:36

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

23.9

LBS

3

300

OK

08/24/2026 01:34:36

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

18.4

LBS

3

300

OK

08/24/2026 01:41:46

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

08/24/2026 01:28:12

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

60.3

LBS

3

300

OK

08/24/2026 01:33:53

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

71.4

LBS

5

300

OK

08/24/2026 01:28:51

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

173.9

LBS

3

300

OK

08/24/2026 01:36:56

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

95.2

LBS

3

300

OK

08/24/2026 01:28:12

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

08/24/2026 01:33:53

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

mAMPS

No Data

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

mAMPS

No Data

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data