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WGR Readings: 118 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
09/16/2026 09:55:403/1/4030/0/0/0_1st Flr: City Water Pressure68.9PSI4090OK
09/16/2026 10:08:374/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.3 7.59OK
09/16/2026 10:03:214/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
09/16/2026 07:49:474/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.575InH2O01.5Inactive
09/16/2026 09:59:144/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.122InH2O01OK
09/16/2026 10:01:054/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.064InH2O02OK
09/16/2026 09:58:184/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.305InH2O02OK
08/14/2026 09:43:294/1/5030/0/0/0_2nd Flr: Cool Fogger WDR0.1 0100Inactive
09/16/2026 10:01:124/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
08/31/2026 15:10:164/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 21.0On/Off02Inactive
09/16/2026 10:00:154/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
09/16/2026 09:57:154/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.51PSI0.81.75OK
09/16/2026 09:08:164/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow341.1PSI275800Inactive
09/16/2026 10:07:224/1/5034/0/0/0_ASML: Proc Gas Fault Alarm1.0On/Off11OK
09/16/2026 10:04:413/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad51.1 0800OK
09/16/2026 10:06:433/1/4101/0/0/0_CDA Pressure123.7PSI90140OK
09/16/2026 09:58:230/1/1201/0/0/0_Cleanroom: Equip RH41% / 70.5F38 / 6542 / 75OK
09/16/2026 09:58:190/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
09/16/2026 09:58:190/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
09/16/2026 10:03:514/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112591PSI2003000OK
09/16/2026 09:48:114/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010365PSI2003000OK
09/16/2026 10:03:120/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
09/16/2026 09:55:593/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
09/16/2026 10:07:163/1/4017/0/0/0_DI-RO: Resistivity Gauge #1814.4Ohm-cm14100OK
09/16/2026 09:55:253/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)5.80PSI410OK
09/16/2026 10:09:413/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.87PSI410OK
09/16/2026 09:58:150/1/1065/0/0/0_GPN2 Pressure Gauge After Filters124.3PSI0400OK
09/16/2026 09:58:293/1/4015/0/0/0_House Vacuum-25.67inHg-30-23OK
09/16/2026 09:59:353/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp68.0DEG F085OK
09/16/2026 09:58:043/1/4002/0/0/0_LN2_Tanks_LI-1-1174.7InH2O0300OK
09/16/2026 10:07:463/1/4004/0/0/0_LN2_Tanks_LI-1-2224.7InH2O0300OK
09/16/2026 10:03:343/1/4006/0/0/0_LN2_Tanks_LI-1-3104.7InH2O0300OK
09/16/2026 09:58:013/1/4001/0/0/0_LN2_Tanks_PI-1-1122.4PSI118300OK
09/16/2026 09:58:433/1/4003/0/0/0_LN2_Tanks_PI-1-258.3PSI0300OK
09/16/2026 10:07:313/1/4005/0/0/0_LN2_Tanks_PI-1-3151.6PSI118300OK
09/16/2026 09:48:530/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
09/16/2026 10:01:333/1/4020/0/0/0_PCW: Lower Temp Gauge53.4DEG F052Upper Ctl Limit
09/16/2026 09:43:163/1/4009/0/0/0_PCW: Middle Pressure Gauge82.3PSI6794OK
09/16/2026 10:08:283/1/4008/0/0/0_PCW: Upper Temp Gauge57.3F0160OK
09/16/2026 10:05:300/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall103.8PSI0135OK
09/16/2026 10:09:193/1/4032/0/0/0_RO: Flow to 2361.09GPM0100OK
09/16/2026 10:08:130/1/1062/0/0/0_Tank 47 GPN2118.66PSI90400OK
09/16/2026 10:09:180/1/1064/0/0/0_Tank 47 UHPN2117.6PSI90400OK
09/16/2026 09:41:240/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters108.882PSI0125OK
09/16/2026 09:42:160/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882689PSI2002800OK
09/16/2026 10:09:000/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491007PSI2002800OK
09/16/2026 10:07:070/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052501975PSI3002800OK
09/16/2026 10:00:300/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089684PSI1501000OK
09/16/2026 10:07:110/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089545PSI2003000OK
09/16/2026 09:55:450/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090596PSI4003000OK
09/16/2026 10:08:050/1/1021/0/0/0C_DDC_133_CO2_105376825PSI3502800OK
09/16/2026 10:06:190/1/1022/0/0/0C_DDC_133_O2_1053751999PSI3002800OK
09/16/2026 10:07:480/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_2001PSI3002800OK
09/16/2026 09:56:410/1/1003/0/0/0C_EX3_121_He_451PSI2002800OK
09/16/2026 10:02:050/1/1002/0/0/0C_EX6_102_He_NoPVS2070PSI2002800OK
09/16/2026 09:55:340/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS202PSI3002600Lower Ctl Limit
09/16/2026 09:59:100/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541227PSI3003000OK
09/16/2026 09:51:120/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081899PSI2002800OK
09/16/2026 10:06:050/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091758PSI2002800OK
09/16/2026 10:03:480/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
09/16/2026 10:07:250/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822071PSI2002800OK
09/16/2026 10:09:210/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284571PSI2002800OK
09/16/2026 09:55:300/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052531872PSI2002800OK
09/16/2026 09:57:470/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691664PSI2002800OK
09/16/2026 10:04:340/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270711PSI2002800OK
09/16/2026 10:02:490/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271291PSI140350OK
09/16/2026 10:07:210/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721618PSI2002800OK
09/16/2026 09:52:100/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O791PSI2003000OK
09/16/2026 10:05:210/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O17PSI525OK
09/16/2026 09:40:330/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601831PSI3504000OK
09/16/2026 10:03:370/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
09/16/2026 10:08:240/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1717PSI5003000OK
09/16/2026 09:58:390/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243877PSI2002800OK
09/16/2026 10:08:190/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661290PSI2004000OK
09/16/2026 10:03:420/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261318PSI5300OK
09/16/2026 10:08:390/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265473PSI2004000OK
09/16/2026 10:05:400/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS219PSI2003000OK
09/16/2026 10:06:120/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3636PSI1501500OK
09/16/2026 09:57:010/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092982PSI5003000Error-27
09/16/2026 10:08:140/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931979PSI5003000OK
09/16/2026 09:57:550/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
09/16/2026 10:03:140/1/1041/0/0/1C_Weigh_Scale_125_CCL2F218.0LBS5300OK
09/16/2026 10:03:140/1/1041/0/0/0C_Weigh_Scale_125_CF410.8LBS3300OK
09/16/2026 10:00:340/1/1040/0/0/0C_Weigh_Scale_125_CHF322.5LBS3300OK
09/16/2026 10:00:340/1/1040/0/0/1C_Weigh_Scale_125_SF633.4LBS3300OK
09/16/2026 10:05:380/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
09/16/2026 10:05:380/1/1051/0/0/0C_Weigh_Scale_126_SF611.41LBS3300OK
09/16/2026 09:55:340/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
09/16/2026 10:08:450/1/1050/0/0/0C_Weigh_Scale_130_CF420.8LBS3300OK
09/16/2026 10:08:450/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.2LBS0300OK
09/16/2026 09:55:340/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher5.90LBS3300OK
09/16/2026 10:00:200/1/1046/0/0/0C_Weigh_Scale_138_C4F830.7LBS3300OK
09/16/2026 09:59:480/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane9.5LBS5300OK
09/16/2026 09:59:030/1/1045/0/0/0C_Weigh_Scale_138_HBr15.2LBS220OK
09/16/2026 09:59:480/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
09/16/2026 10:00:200/1/1046/0/0/1C_Weigh_Scale_138_SF62.35LBS3300Lower Ctl Limit
09/16/2026 09:59:030/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected0.0LBS0300OK
09/16/2026 10:09:570/1/1053/0/0/1C_Weigh_Scale_143A_C4F89.1LBS3300OK
09/16/2026 10:09:570/1/1053/0/0/0C_Weigh_Scale_143A_SF628.3LBS3300OK
09/16/2026 10:09:230/1/1052/0/0/0C_Weigh_Scale_152_Far C4F895.1LBS3300OK
09/16/2026 09:56:200/1/1047/0/0/1C_Weigh_Scale_152_Far_CF416.7LBS3300OK
09/16/2026 09:56:200/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF316.0LBS3300OK
09/16/2026 09:48:210/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F817.9LBS3300OK
09/16/2026 10:05:450/1/1043/0/0/1C_Weigh_Scale_152_Near_CF418.4LBS3300OK
09/16/2026 10:05:450/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF329.0LBS3300OK
09/16/2026 10:09:230/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
09/16/2026 09:57:570/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL34.54LBS3300OK
09/16/2026 10:08:480/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine14.44LBS5300OK
09/16/2026 09:57:550/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF416.41LBS3300OK
09/16/2026 09:48:210/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF612.46LBS3300OK
09/16/2026 09:57:570/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
09/16/2026 10:08:480/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data