WGR/WTR Readings

09/22/2026 11:19:04

3/1/4030/0/0/0

_1st Flr: City Water Pressure

69.2

PSI

40

90

OK

09/22/2026 11:18:16

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

9.3

7.5

9

Upper Ctl Limit

09/22/2026 11:14:20

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

OK

09/22/2026 08:49:46

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.555

InH2O

0

1.5

Inactive

09/22/2026 11:29:29

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.122

InH2O

0

1

OK

09/22/2026 11:25:58

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.064

InH2O

0

2

OK

09/22/2026 11:21:46

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.280

InH2O

0

2

OK

08/14/2026 09:43:29

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

0.1

0

100

Inactive

09/22/2026 11:15:40

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

0.0

On/Off

0

2

OK

08/31/2026 15:10:16

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2

1.0

On/Off

0

2

Inactive

09/22/2026 11:20:54

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

09/22/2026 11:07:50

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

1.51

PSI

0.8

1.75

OK

09/22/2026 11:30:15

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

301.1

PSI

275

800

OK

09/22/2026 11:19:00

4/1/5034/0/0/0

_ASML: Proc Gas Fault Alarm

1.0

On/Off

0.5

1.2

OK

09/22/2026 11:30:18

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

51.1

0

800

OK

09/22/2026 11:16:36

3/1/4101/0/0/0

_CDA Pressure

123.7

PSI

90

140

OK

09/22/2026 11:21:48

0/1/1201/0/0/0

_Cleanroom: Equip RH

42% / 70.5

F

38 / 65

42 / 75

OK

09/22/2026 11:29:50

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

1.0

On/Off

0

2

OK

09/22/2026 11:29:50

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

09/22/2026 11:27:11

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2591

PSI

200

3000

OK

09/22/2026 10:27:07

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

368

PSI

200

3000

Inactive

09/22/2026 11:06:32

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

09/22/2026 11:25:59

3/1/4031/0/0/0

_DI-RO: Light Sensor

1.0

On/Off

0

2

OK

09/22/2026 11:30:12

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

14.2

Ohm-cm

14

100

OK

09/22/2026 11:04:08

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

5.84

PSI

4

10

Inactive

09/22/2026 11:18:56

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

7.87

PSI

4

10

OK

09/22/2026 11:22:14

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

134.2

PSI

0

400

OK

09/22/2026 11:23:26

3/1/4015/0/0/0

_House Vacuum

-25.73

inHg

-30

-23

OK

09/22/2026 11:22:03

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

71.6

DEG F

0

85

OK

09/22/2026 11:22:27

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

186.7

InH2O

0

300

OK

09/22/2026 11:17:27

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

208.0

InH2O

0

300

OK

09/22/2026 11:28:28

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

99.4

InH2O

0

300

OK

09/22/2026 11:23:19

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

151.5

PSI

118

300

OK

09/22/2026 11:23:53

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

57.8

PSI

0

300

OK

09/22/2026 11:17:26

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

151.6

PSI

118

300

OK

09/22/2026 11:25:48

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

100.0

PSI

0

110

OK

09/22/2026 11:25:59

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

53.4

DEG F

0

52

Upper Ctl Limit

09/22/2026 11:22:29

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

83.3

PSI

67

94

OK

09/22/2026 11:16:09

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

57.0

F

0

160

OK

09/22/2026 11:29:46

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

122.2

PSI

0

135

OK

09/22/2026 11:17:03

3/1/4032/0/0/0

_RO: Flow to 236

1.04

GPM

0

100

OK

09/22/2026 11:30:22

0/1/1062/0/0/0

_Tank 47 GPN2

136.21

PSI

90

400

OK

09/22/2026 11:17:28

0/1/1064/0/0/0

_Tank 47 UHPN2

120.0

PSI

90

400

OK

09/22/2026 11:19:25

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

113.216

PSI

0

125

OK

09/22/2026 11:21:48

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2669

PSI

200

2800

OK

09/22/2026 11:17:37

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1010

PSI

200

2800

OK

09/22/2026 11:17:01

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

1975

PSI

300

2800

OK

09/22/2026 11:25:00

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

686

PSI

150

1000

OK

09/22/2026 11:16:26

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

545

PSI

200

3000

OK

09/22/2026 11:18:33

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

604

PSI

400

3000

OK

09/22/2026 11:16:17

0/1/1021/0/0/0

C_DDC_133_CO2_105376

820

PSI

350

2800

OK

09/22/2026 11:16:26

0/1/1022/0/0/0

C_DDC_133_O2_105375

2004

PSI

300

2800

OK

09/22/2026 11:28:27

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

2006

PSI

300

2800

OK

09/22/2026 11:18:29

0/1/1003/0/0/0

C_EX3_121_He_

447

PSI

200

2800

OK

09/22/2026 11:26:34

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

2064

PSI

200

2800

OK

09/22/2026 11:19:42

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

205

PSI

300

2600

Lower Ctl Limit

09/22/2026 11:24:14

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1227

PSI

300

3000

OK

09/22/2026 11:30:07

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

1899

PSI

200

2800

OK

09/22/2026 11:30:14

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

1744

PSI

200

2800

OK

09/22/2026 11:27:35

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

1003

PSI

200

2800

OK

09/22/2026 11:16:37

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2090

PSI

200

2800

OK

09/22/2026 11:17:36

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

571

PSI

200

2800

OK

09/22/2026 11:20:13

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

1845

PSI

200

2800

OK

09/22/2026 11:21:14

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1664

PSI

200

2800

OK

09/22/2026 11:28:05

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

711

PSI

200

2800

OK

09/22/2026 11:23:12

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

294

PSI

140

350

OK

09/22/2026 11:30:27

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1618

PSI

200

2800

OK

09/22/2026 11:28:59

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

774

PSI

200

3000

OK

09/22/2026 11:27:20

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

16

PSI

5

25

OK

09/22/2026 11:18:19

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

1831

PSI

350

4000

OK

09/22/2026 11:24:48

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1632

PSI

200

4000

OK

09/22/2026 11:17:14

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

1717

PSI

500

3000

OK

09/22/2026 11:19:33

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

881

PSI

200

2800

OK

09/22/2026 11:16:57

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1287

PSI

200

4000

OK

09/22/2026 11:25:43

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

35

PSI

5

300

OK

09/22/2026 11:17:41

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

473

PSI

200

4000

OK

09/22/2026 11:28:56

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

219

PSI

200

3000

OK

09/22/2026 11:30:35

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

635

PSI

150

1500

OK

09/22/2026 11:20:31

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

985

PSI

500

3000

OK

09/22/2026 11:30:44

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

1957

PSI

500

3000

OK

09/22/2026 11:18:28

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

OK

09/22/2026 11:26:49

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

18.0

LBS

5

300

OK

09/22/2026 11:26:49

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

10.7

LBS

3

300

OK

09/22/2026 11:28:24

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

22.3

LBS

3

300

OK

09/22/2026 11:28:24

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

33.0

LBS

3

300

OK

09/22/2026 11:28:34

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

09/22/2026 11:28:34

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

11.51

LBS

3

300

OK

09/22/2026 11:15:57

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

09/22/2026 11:23:18

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

20.9

LBS

3

300

OK

09/22/2026 11:23:18

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.1

LBS

0

300

OK

09/22/2026 11:15:57

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

4.47

LBS

3

300

OK

09/22/2026 11:26:28

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

30.5

LBS

3

300

OK

09/22/2026 11:17:33

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

9.4

LBS

5

300

OK

09/22/2026 11:18:15

0/1/1045/0/0/0

C_Weigh_Scale_138_HBr

14.1

LBS

2

20

OK

09/22/2026 11:17:33

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

09/22/2026 11:26:28

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

2.40

LBS

3

300

Lower Ctl Limit

09/22/2026 11:18:15

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

0.0

LBS

0

300

OK

09/22/2026 11:10:21

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

8.8

LBS

3

300

OK

09/22/2026 11:10:21

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

27.8

LBS

3

300

OK

09/22/2026 11:27:11

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

93.9

LBS

3

300

OK

09/22/2026 11:11:35

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

13.5

LBS

3

300

OK

09/22/2026 11:11:35

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

14.3

LBS

3

300

OK

09/22/2026 11:28:04

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

18.1

LBS

3

300

OK

09/22/2026 11:23:00

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

16.5

LBS

3

300

OK

09/22/2026 11:23:00

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

26.8

LBS

3

300

OK

09/22/2026 11:27:11

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

09/22/2026 11:17:00

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

4.67

LBS

3

300

OK

09/22/2026 11:19:03

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

15.08

LBS

5

300

OK

09/22/2026 11:18:28

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

16.08

LBS

3

300

OK

09/22/2026 11:28:04

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

11.76

LBS

3

300

OK

09/22/2026 11:17:00

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

09/22/2026 11:19:03

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

mAMPS

No Data

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

mAMPS

No Data

0/1/6001/0/0/0

Test_Temperature_Sensor

VOLTS

No Data

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data