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WGR Readings: 118 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
11/30/2025 03:30:443/1/4030/0/0/0_1st Flr: City Water Pressure68.6PSI4090OK
10/10/2025 22:36:034/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.7 7.59Inactive
11/30/2025 03:34:264/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
11/29/2025 23:12:484/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.790InH2O01.5Inactive
11/30/2025 03:27:354/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.367InH2O01OK
11/30/2025 03:29:254/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.143InH2O02OK
11/30/2025 03:27:534/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.240InH2O02OK
11/30/2025 03:12:114/1/5030/0/0/0_2nd Flr: Cool Fogger WDR9.1 0100OK
11/30/2025 03:38:054/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
11/30/2025 03:20:564/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 21.0On/Off02OK
11/30/2025 03:33:394/1/5034/0/0/0_2nd Flr: Rm 237 Haskris Chiller0.0On/Off02OK
11/30/2025 03:31:124/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
11/30/2025 03:09:294/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.50PSI0.81.75OK
11/30/2025 03:29:214/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow301.3PSI275800OK
09/21/2025 08:18:313/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad402.3 0800Inactive
11/30/2025 03:37:033/1/4101/0/0/0_CDA Pressure123.1PSI90140OK
11/30/2025 03:27:390/1/1201/0/0/0_Cleanroom: Equip RH31% / 70.3F38 / 6542 / 75Lower Ctl Limit
11/30/2025 03:28:060/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
11/30/2025 03:28:060/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
11/30/2025 03:14:314/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112594PSI4003000OK
11/30/2025 02:58:304/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010400PSI4003000OK
11/30/2025 03:30:010/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
11/30/2025 03:24:573/1/4032/0/0/0_DI-RO: Flow1.28GPM0100OK
11/30/2025 03:38:493/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
11/30/2025 03:33:023/1/4017/0/0/0_DI-RO: Resistivity Gauge #1817.9Ohm-cm14100OK
11/30/2025 03:27:173/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)6.20PSI410OK
11/30/2025 03:25:393/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.99PSI410OK
11/30/2025 03:27:520/1/1065/0/0/0_GPN2 Pressure Gauge After Filters127.1PSI0400OK
11/30/2025 03:26:523/1/4015/0/0/0_House Vacuum-26.13inHg-30-23OK
11/30/2025 03:37:313/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp60.0DEG F085OK
11/30/2025 03:38:403/1/4002/0/0/0_LN2_Tanks_LI-1-1197.6InH2O0300OK
11/30/2025 03:34:533/1/4004/0/0/0_LN2_Tanks_LI-1-2207.3InH2O0300OK
11/30/2025 03:24:463/1/4006/0/0/0_LN2_Tanks_LI-1-3107.0InH2O0300OK
11/30/2025 03:36:093/1/4001/0/0/0_LN2_Tanks_PI-1-1129.3PSI0300OK
11/30/2025 03:36:053/1/4003/0/0/0_LN2_Tanks_PI-1-259.6PSI0300OK
11/30/2025 03:29:573/1/4005/0/0/0_LN2_Tanks_PI-1-3152.0PSI0300OK
11/30/2025 03:35:230/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
11/30/2025 03:25:173/1/4020/0/0/0_PCW: Lower Temp Gauge49.4DEG F057OK
11/30/2025 03:28:373/1/4009/0/0/0_PCW: Middle Pressure Gauge86.2PSI6794OK
11/30/2025 03:35:403/1/4008/0/0/0_PCW: Upper Temp Gauge57.0F0160OK
11/30/2025 03:36:490/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall117.7PSI0135OK
11/30/2025 03:14:450/1/1062/0/0/0_Tank 47 GPN2126.24PSI90400OK
11/30/2025 03:23:590/1/1064/0/0/0_Tank 47 UHPN2117.6PSI90400OK
11/30/2025 03:29:160/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters112.056PSI0125OK
11/30/2025 03:37:390/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882715PSI2002800OK
11/30/2025 03:39:000/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491108PSI2002800OK
11/30/2025 03:30:320/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052502001PSI3002800OK
11/30/2025 03:32:540/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089716PSI1501000OK
11/30/2025 03:34:100/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089633PSI2003000OK
11/30/2025 03:32:180/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090613PSI4003000OK
11/30/2025 03:31:390/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
11/30/2025 03:36:590/1/1022/0/0/0C_DDC_133_O2_1053752004PSI3002800OK
11/30/2025 03:35:270/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_301PSI3002800OK
11/30/2025 03:38:030/1/1003/0/0/0C_EX3_121_He_545PSI2002800OK
11/30/2025 03:25:090/1/1002/0/0/0C_EX6_102_He_NoPVS2424PSI2002800OK
11/30/2025 03:33:210/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS669PSI3002600OK
11/30/2025 03:35:190/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541689PSI3003000OK
11/30/2025 03:28:520/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050082041PSI2002800OK
11/30/2025 03:32:380/1/1008/0/0/0C_General Use ICP Etchers_126_He_105009580PSI2002800OK
11/30/2025 03:36:580/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
11/30/2025 03:34:140/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822075PSI2002800OK
11/30/2025 03:28:310/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284649PSI2002800OK
11/30/2025 03:35:120/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052532575PSI2002800OK
11/30/2025 03:36:000/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691620PSI2002800OK
11/30/2025 03:31:240/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270774PSI2002800OK
11/30/2025 03:25:310/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271288PSI140350OK
11/30/2025 03:32:030/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721676PSI2002800OK
11/30/2025 03:27:230/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O774PSI2003000OK
11/30/2025 03:25:590/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O19PSI525OK
11/30/2025 03:35:420/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601905PSI3504000OK
11/30/2025 03:34:220/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
11/30/2025 03:27:020/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1853PSI5003000OK
11/30/2025 03:30:230/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243925PSI2002800OK
11/30/2025 03:29:350/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661328PSI2004000OK
11/30/2025 03:35:560/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261320PSI5300OK
11/30/2025 03:31:010/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265490PSI2004000OK
11/30/2025 03:29:370/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS367PSI2003000OK
11/30/2025 03:34:220/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3611PSI1501500OK
11/30/2025 03:27:360/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092980PSI5003000OK
11/30/2025 03:25:060/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931911PSI5003000OK
11/30/2025 03:27:400/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
11/30/2025 03:25:100/1/1041/0/0/1C_Weigh_Scale_125_CCL2F217.7LBS5300OK
11/30/2025 03:25:100/1/1041/0/0/0C_Weigh_Scale_125_CF412.2LBS3300OK
11/30/2025 03:31:410/1/1040/0/0/0C_Weigh_Scale_125_CHF333.7LBS3300OK
11/30/2025 03:31:410/1/1040/0/0/1C_Weigh_Scale_125_SF640.1LBS3300OK
11/30/2025 03:32:480/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
11/30/2025 03:32:480/1/1051/0/0/0C_Weigh_Scale_126_SF615.4LBS3300OK
11/30/2025 03:29:550/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
11/30/2025 03:35:390/1/1050/0/0/0C_Weigh_Scale_130_CF421.5LBS3300OK
11/30/2025 03:35:390/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
11/30/2025 03:29:550/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher23.8LBS3300OK
11/30/2025 03:35:170/1/1046/0/0/0C_Weigh_Scale_138_C4F831.1LBS3300OK
11/30/2025 03:19:110/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane9.5LBS5300OK
 0/1/1045/0/0/0C_Weigh_Scale_138_HBr LBS  No Data
11/30/2025 03:19:110/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
11/30/2025 03:35:170/1/1046/0/0/1C_Weigh_Scale_138_SF622.0LBS3300OK
 0/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected LBS  No Data
11/30/2025 03:26:070/1/1053/0/0/1C_Weigh_Scale_143A_C4F815.6LBS3300OK
11/30/2025 03:26:070/1/1053/0/0/0C_Weigh_Scale_143A_SF617.5LBS3300OK
11/30/2025 03:29:100/1/1052/0/0/0C_Weigh_Scale_152_Far C4F80.2LBS3300Lower Ctl Limit
11/30/2025 03:19:360/1/1047/0/0/1C_Weigh_Scale_152_Far_CF413.7LBS3300OK
11/30/2025 03:19:360/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF316.1LBS3300OK
11/30/2025 03:35:320/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F83.5LBS3300OK
11/30/2025 03:24:300/1/1043/0/0/1C_Weigh_Scale_152_Near_CF418.6LBS3300OK
11/30/2025 03:24:300/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF327.9LBS3300OK
11/30/2025 03:29:100/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
11/30/2025 03:35:050/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL38.1LBS3300OK
11/30/2025 03:24:270/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine20.3LBS5300OK
11/30/2025 03:27:400/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF418.3LBS3300OK
11/30/2025 03:35:320/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF623.5LBS3300OK
11/30/2025 03:24:270/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
11/30/2025 03:35:050/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
11/30/2025 03:31:040/1/1202/0/0/0High Precision Humidity Sensor_Not Installed-25.0mAMPS0100Lower Ctl Limit
11/30/2025 03:31:040/1/1202/0/0/1High Precision Temperature Sensor_Not Installed71.2mAMPS0200OK
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data