WGR/WTR Readings

09/28/2026 17:27:48

3/1/4030/0/0/0

_1st Flr: City Water Pressure

55.4

PSI

40

90

OK

09/28/2026 16:06:00

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

9.3

7.5

9

Inactive

09/28/2026 17:10:24

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

OK

09/28/2026 16:44:50

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.645

InH2O

0

1.5

OK

09/28/2026 17:38:20

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.122

InH2O

0

1

OK

09/28/2026 17:06:21

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.064

InH2O

0

2

OK

09/28/2026 17:31:59

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.295

InH2O

0

2

OK

08/14/2026 09:43:29

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

0.1

0

100

Inactive

09/28/2026 17:31:45

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

0.0

On/Off

0

2

OK

09/24/2026 13:08:19

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2_RH_TEST_%

43.6

30

60

Inactive

09/28/2026 17:26:57

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

09/28/2026 17:33:02

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

1.54

PSI

0.8

1.75

OK

09/28/2026 14:22:34

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

303.3

PSI

275

800

Inactive

09/28/2026 17:29:42

4/1/5034/0/0/0

_ASML: Proc Gas Fault Alarm

1.0

On/Off

0.5

1.2

OK

09/24/2026 01:36:56

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

1.7

0

800

Inactive

09/28/2026 17:25:45

3/1/4101/0/0/0

_CDA Pressure

120.5

PSI

90

140

OK

09/28/2026 17:28:59

0/1/1201/0/0/0

_Cleanroom: Equip RH

41% / 70.2

F

38 / 65

42 / 75

OK

09/28/2026 17:32:37

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

1.0

On/Off

0

2

OK

09/28/2026 17:32:37

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

09/28/2026 16:51:18

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2588

PSI

200

3000

OK

09/28/2026 17:22:00

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

365

PSI

200

3000

OK

09/28/2026 17:27:18

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

09/24/2026 13:08:19

4/1/5033/0/0/1

_Cleanroom: Rm Test RH (Percentage)

0.000

(BLANK)

0

50

Inactive

09/28/2026 17:19:17

3/1/4031/0/0/0

_DI-RO: Light Sensor

0.0

On/Off

0

2

OK

09/28/2026 17:37:11

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

14.0

Ohm-cm

14

100

OK

09/28/2026 17:27:08

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

5.80

PSI

4

10

OK

09/28/2026 17:13:07

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

7.87

PSI

4

10

Inactive

09/28/2026 17:31:39

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

116.0

PSI

0

400

OK

09/28/2026 17:33:16

3/1/4015/0/0/0

_House Vacuum

-25.67

inHg

-30

-23

OK

09/28/2026 17:38:34

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

68.7

DEG F

0

85

OK

09/28/2026 17:32:01

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

177.1

InH2O

0

300

OK

09/28/2026 17:26:24

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

190.7

InH2O

0

300

OK

09/28/2026 17:23:53

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

93.9

InH2O

0

300

OK

09/28/2026 17:32:55

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

126.8

PSI

118

300

OK

09/28/2026 17:33:21

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

58.3

PSI

0

300

OK

09/28/2026 17:27:21

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

152.2

PSI

118

300

OK

09/28/2026 17:33:22

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

100.0

PSI

0

110

OK

09/28/2026 17:24:01

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

46.5

DEG F

0

52

OK

09/28/2026 17:32:11

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

82.0

PSI

67

94

OK

09/28/2026 17:24:22

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

59.5

F

0

160

OK

09/28/2026 17:23:57

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

109.3

PSI

0

135

OK

09/28/2026 17:27:56

3/1/4032/0/0/0

_RO: Flow to 236

1.16

GPM

0

100

OK

09/28/2026 17:23:59

0/1/1062/0/0/0

_Tank 47 GPN2

120.15

PSI

90

400

Error-28

09/28/2026 17:09:13

0/1/1064/0/0/0

_Tank 47 UHPN2

120.3

PSI

90

400

OK

09/28/2026 17:27:45

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

113.216

PSI

0

125

OK

09/28/2026 17:31:40

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2669

PSI

200

2800

OK

09/28/2026 17:26:42

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1010

PSI

200

2800

OK

09/28/2026 17:25:06

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

1975

PSI

300

2800

OK

09/28/2026 17:34:00

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

708

PSI

150

1000

OK

09/28/2026 17:26:00

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

554

PSI

200

3000

OK

09/28/2026 17:26:26

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

624

PSI

400

3000

OK

09/28/2026 17:25:49

0/1/1021/0/0/0

C_DDC_133_CO2_105376

825

PSI

350

2800

OK

09/28/2026 17:24:55

0/1/1022/0/0/0

C_DDC_133_O2_105375

2004

PSI

300

2800

OK

09/28/2026 17:38:43

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

2001

PSI

300

2800

OK

09/28/2026 17:25:45

0/1/1003/0/0/0

C_EX3_121_He_

449

PSI

200

2800

OK

09/28/2026 17:36:17

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

2055

PSI

200

2800

OK

09/28/2026 17:29:16

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

172

PSI

300

2600

Lower Ctl Limit

09/28/2026 17:33:42

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1120

PSI

300

3000

OK

09/28/2026 17:35:40

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

1899

PSI

200

2800

OK

09/28/2026 17:24:24

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

1773

PSI

200

2800

OK

09/28/2026 17:22:43

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

1003

PSI

200

2800

OK

09/28/2026 17:25:39

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2095

PSI

200

2800

OK

09/28/2026 17:26:36

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

571

PSI

200

2800

OK

09/28/2026 17:28:38

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

1670

PSI

200

2800

OK

09/28/2026 17:30:10

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1664

PSI

200

2800

OK

09/28/2026 17:38:07

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

711

PSI

200

2800

OK

09/28/2026 17:14:07

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

282

PSI

140

350

OK

09/28/2026 17:24:45

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1618

PSI

200

2800

OK

09/28/2026 17:36:29

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

785

PSI

200

3000

OK

09/28/2026 17:34:10

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

18

PSI

5

25

OK

09/28/2026 17:24:52

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

1825

PSI

350

4000

OK

09/28/2026 17:15:37

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1600

PSI

200

4000

OK

09/28/2026 17:26:42

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

1709

PSI

500

3000

OK

09/28/2026 17:25:26

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

881

PSI

200

2800

OK

09/28/2026 17:26:19

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1284

PSI

200

4000

OK

09/28/2026 17:32:51

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

18

PSI

5

300

OK

09/28/2026 17:27:52

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

473

PSI

200

4000

OK

09/28/2026 17:38:10

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

219

PSI

200

3000

OK

09/28/2026 17:25:06

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

639

PSI

150

1500

OK

09/28/2026 17:28:26

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

980

PSI

500

3000

OK

09/28/2026 17:38:16

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

1986

PSI

500

3000

OK

09/28/2026 17:25:34

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

OK

09/28/2026 17:35:28

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

18.0

LBS

5

300

OK

09/28/2026 17:35:28

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

10.7

LBS

3

300

OK

09/28/2026 17:35:20

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

23.0

LBS

3

300

OK

09/28/2026 17:35:20

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

33.4

LBS

3

300

OK

09/28/2026 17:37:45

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

09/28/2026 17:37:45

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

11.87

LBS

3

300

OK

09/28/2026 17:22:50

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

09/28/2026 17:38:25

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

21.0

LBS

3

300

OK

09/28/2026 17:38:25

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.1

LBS

0

300

OK

09/28/2026 17:22:50

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

6.10

LBS

3

300

OK

09/28/2026 17:37:40

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

30.3

LBS

3

300

OK

09/28/2026 17:35:50

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

8.9

LBS

5

300

OK

09/28/2026 17:38:27

0/1/1045/0/0/0

C_Weigh_Scale_138_HBr

15.9

LBS

2

20

OK

09/28/2026 17:35:50

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

09/28/2026 17:37:40

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

2.42

LBS

3

300

Lower Ctl Limit

09/28/2026 17:38:27

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

0.0

LBS

0

300

OK

09/28/2026 17:26:53

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

8.6

LBS

3

300

OK

09/28/2026 17:26:53

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

27.1

LBS

3

300

OK

09/28/2026 17:32:12

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

93.1

LBS

3

300

OK

09/28/2026 17:32:27

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

15.9

LBS

3

300

OK

09/28/2026 17:32:27

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

15.3

LBS

3

300

OK

09/28/2026 17:26:53

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

17.9

LBS

3

300

OK

09/28/2026 17:35:11

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

17.6

LBS

3

300

OK

09/28/2026 17:35:11

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

28.4

LBS

3

300

OK

09/28/2026 17:32:12

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

09/28/2026 17:35:38

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

4.81

LBS

3

300

OK

09/28/2026 17:30:05

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

15.43

LBS

5

300

OK

09/28/2026 17:25:34

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

16.50

LBS

3

300

OK

09/28/2026 17:26:53

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

11.83

LBS

3

300

OK

09/28/2026 17:30:05

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

09/28/2026 17:35:38

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

mAMPS

No Data

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

mAMPS

No Data

09/24/2026 13:09:29

0/1/6001/0/0/0

Test_Temperature_Sensor

0.0

(BLANK)

10

90

Inactive

0/1/6006/0/1/1

WDR 6006

No Data

0/1/6007/0/1/1

WDR 6007

No Data

0/1/6008/0/1/1

WDR 6008

No Data

0/1/6009/0/1/1

WGR 6009

No Data

0/1/6011/0/1/1

WGR 6011

No Data

0/1/6012/0/1/1

WSTM 6012

No Data

0/1/6013/0/1/1

WTR 6013

No Data

0/1/6014/0/1/1

WTR 6014

No Data

0/1/6015/0/1/1

WTR 6015

No Data

0/1/6016/0/1/1

WTR 6016

No Data

0/1/6017/0/1/1

WTR 6017

No Data

0/1/6018/0/1/1

WTR 6018

No Data

0/1/6019/0/1/1

WTR 6019

No Data

0/1/6021/0/1/1

WTR 6021

No Data

0/1/6022/0/1/1

WTR 6022

No Data

0/1/6023/0/1/1

WTR 6023

No Data

0/1/6024/0/1/1

WTR 6024

No Data

0/1/6025/0/1/1

WTR 6025

No Data

0/1/6026/0/1/1

WTR 6026

No Data

0/1/6027/0/1/1

WTR 6027

No Data

0/1/6028/0/1/1

WTR 6028

No Data

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data