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WGR Readings: 118 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
08/04/2026 13:40:093/1/4030/0/0/0_1st Flr: City Water Pressure68.9PSI4090OK
08/04/2026 13:39:234/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.7 7.59OK
08/04/2026 13:36:344/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
08/04/2026 13:04:434/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.605InH2O01.5OK
08/04/2026 13:46:304/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.122InH2O01OK
08/04/2026 13:35:064/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.069InH2O02OK
08/04/2026 13:37:534/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.315InH2O02OK
08/04/2026 10:55:304/1/5030/0/0/0_2nd Flr: Cool Fogger WDR0.7 0100Inactive
08/04/2026 13:42:094/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
08/03/2026 12:30:514/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 21.0On/Off02Inactive
08/04/2026 13:38:054/1/5034/0/0/0_2nd Flr: Rm 237 Haskris Chiller0.0On/Off02OK
08/04/2026 13:31:184/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
08/04/2026 13:46:094/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic0.94PSI0.81.75OK
08/04/2026 13:48:244/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow287.2PSI275800OK
08/04/2026 13:48:123/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad101.1 0800OK
08/04/2026 13:42:473/1/4101/0/0/0_CDA Pressure128.0PSI90140OK
08/04/2026 13:46:530/1/1201/0/0/0_Cleanroom: Equip RH42% / 70.3F38 / 6542 / 75OK
08/04/2026 13:37:430/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
08/04/2026 13:37:430/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
08/04/2026 13:37:074/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112585PSI2003000OK
08/04/2026 13:44:094/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010380PSI2003000OK
08/04/2026 13:46:510/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
08/04/2026 13:48:003/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
08/04/2026 13:29:493/1/4017/0/0/0_DI-RO: Resistivity Gauge #1817.9Ohm-cm14100OK
08/04/2026 13:45:023/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)6.41PSI410OK
08/04/2026 13:44:463/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.87PSI410OK
08/04/2026 13:34:220/1/1065/0/0/0_GPN2 Pressure Gauge After Filters124.3PSI0400OK
08/04/2026 13:48:353/1/4015/0/0/0_House Vacuum-26.13inHg-30-23OK
08/04/2026 13:45:393/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp71.3DEG F085OK
08/04/2026 13:41:083/1/4002/0/0/0_LN2_Tanks_LI-1-1191.6InH2O0300OK
08/04/2026 13:41:383/1/4004/0/0/0_LN2_Tanks_LI-1-2212.0InH2O0300OK
08/04/2026 13:46:433/1/4006/0/0/0_LN2_Tanks_LI-1-3103.7InH2O0300OK
08/04/2026 13:42:103/1/4001/0/0/0_LN2_Tanks_PI-1-1130.4PSI0300OK
08/04/2026 13:48:103/1/4003/0/0/0_LN2_Tanks_PI-1-257.8PSI0300OK
08/04/2026 13:45:523/1/4005/0/0/0_LN2_Tanks_PI-1-3151.6PSI0300OK
08/04/2026 13:40:270/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
08/04/2026 13:35:463/1/4020/0/0/0_PCW: Lower Temp Gauge50.1DEG F052OK
08/04/2026 13:38:313/1/4009/0/0/0_PCW: Middle Pressure Gauge82.8PSI6794OK
08/04/2026 13:36:183/1/4008/0/0/0_PCW: Upper Temp Gauge57.3F0160OK
08/04/2026 13:44:340/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall96.2PSI0135OK
08/04/2026 13:45:253/1/4032/0/0/0_RO: Flow to 2361.00GPM0100OK
08/04/2026 13:42:430/1/1062/0/0/0_Tank 47 GPN2122.97PSI90400OK
08/04/2026 13:37:370/1/1064/0/0/0_Tank 47 UHPN2120.9PSI90400OK
08/04/2026 13:37:240/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters114.656PSI0125OK
08/04/2026 13:41:360/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882689PSI2002800OK
08/04/2026 13:45:310/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491013PSI2002800OK
08/04/2026 13:40:190/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052502004PSI3002800OK
08/04/2026 13:43:350/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089729PSI1501000OK
08/04/2026 13:28:220/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089549PSI2003000OK
08/04/2026 13:45:220/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090627PSI4003000OK
08/04/2026 13:48:500/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
08/04/2026 13:43:010/1/1022/0/0/0C_DDC_133_O2_1053752004PSI3002800OK
08/04/2026 13:44:250/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_1997PSI3002800Error-28
08/04/2026 13:48:160/1/1003/0/0/0C_EX3_121_He_462PSI2002800OK
08/04/2026 13:37:130/1/1002/0/0/0C_EX6_102_He_NoPVS2100PSI2002800OK
08/04/2026 13:40:530/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS288PSI3002600Lower Ctl Limit
08/04/2026 13:34:190/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541748PSI3003000OK
08/04/2026 13:36:360/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081929PSI2002800OK
08/04/2026 13:47:580/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091832PSI2002800OK
08/04/2026 13:47:050/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551006PSI2002800OK
08/04/2026 13:43:570/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822095PSI2002800OK
08/04/2026 13:47:560/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284564PSI2002800OK
08/04/2026 13:41:150/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052532377PSI2002800OK
08/04/2026 13:48:040/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691685PSI2002800OK
08/04/2026 13:40:160/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270711PSI2002800OK
08/04/2026 13:45:000/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271291PSI140350OK
08/04/2026 13:34:540/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721618PSI2002800OK
08/04/2026 13:37:390/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O774PSI2003000OK
08/04/2026 13:39:190/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O18PSI525OK
08/04/2026 13:41:550/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601819PSI3504000OK
08/04/2026 13:39:260/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
08/04/2026 13:38:100/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1722PSI5003000OK
08/04/2026 13:46:190/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243890PSI2002800OK
08/04/2026 13:42:560/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661290PSI2004000OK
08/04/2026 13:28:060/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261326PSI5300OK
08/04/2026 13:42:530/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265473PSI2004000OK
08/04/2026 13:42:360/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS323PSI2003000OK
08/04/2026 13:34:560/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3636PSI1501500OK
08/04/2026 13:39:080/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092980PSI5003000OK
08/04/2026 13:38:010/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931988PSI5003000OK
02/21/2026 07:36:290/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300Inactive
08/04/2026 13:40:060/1/1041/0/0/1C_Weigh_Scale_125_CCL2F218.1LBS5300OK
08/04/2026 13:40:060/1/1041/0/0/0C_Weigh_Scale_125_CF411.3LBS3300OK
08/04/2026 13:40:010/1/1040/0/0/0C_Weigh_Scale_125_CHF322.3LBS3300OK
08/04/2026 13:40:010/1/1040/0/0/1C_Weigh_Scale_125_SF60.0LBS3300Lower Ctl Limit
08/04/2026 08:50:560/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300Inactive
08/04/2026 08:50:560/1/1051/0/0/0C_Weigh_Scale_126_SF611.2LBS3300Inactive
08/04/2026 13:38:370/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
08/04/2026 13:40:020/1/1050/0/0/0C_Weigh_Scale_130_CF40.2LBS3300Lower Ctl Limit
08/04/2026 13:40:020/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
08/04/2026 13:38:370/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher3.6LBS3300OK
08/04/2026 13:46:330/1/1046/0/0/0C_Weigh_Scale_138_C4F827.1LBS3300OK
08/04/2026 13:36:480/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane4.1LBS5300Lower Ctl Limit
 0/1/1045/0/0/0C_Weigh_Scale_138_HBr LBS  No Data
08/04/2026 13:36:480/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
08/04/2026 13:46:330/1/1046/0/0/1C_Weigh_Scale_138_SF619.5LBS3300OK
 0/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected LBS  No Data
08/04/2026 13:48:200/1/1053/0/0/1C_Weigh_Scale_143A_C4F80.4LBS3300Lower Ctl Limit
08/04/2026 13:48:200/1/1053/0/0/0C_Weigh_Scale_143A_SF631.4LBS3300OK
08/04/2026 08:47:010/1/1052/0/0/0C_Weigh_Scale_152_Far C4F80.1LBS3300Inactive
08/04/2026 08:41:400/1/1047/0/0/1C_Weigh_Scale_152_Far_CF413.7LBS3300Inactive
08/04/2026 08:41:400/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF315.0LBS3300Inactive
08/04/2026 08:36:060/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F830.8LBS3300Inactive
08/04/2026 08:24:090/1/1043/0/0/1C_Weigh_Scale_152_Near_CF419.6LBS3300Inactive
08/04/2026 08:24:090/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF327.6LBS3300Inactive
08/04/2026 08:47:010/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300Inactive
08/04/2026 13:36:160/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL34.0LBS3300OK
08/04/2026 13:47:240/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine14.1LBS5300OK
02/21/2026 07:36:290/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF417.8LBS3300Inactive
08/04/2026 08:36:060/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF690.8LBS3300Inactive
08/04/2026 13:36:160/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
08/04/2026 13:47:240/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data