WGR/WTR Readings

08/29/2026 01:44:54

3/1/4030/0/0/0

_1st Flr: City Water Pressure

68.9

PSI

40

90

OK

08/29/2026 01:46:32

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

0.2

7.5

9

Lower Ctl Limit

08/29/2026 01:36:21

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

OK

08/29/2026 01:23:31

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.540

InH2O

0

1.5

OK

08/29/2026 01:37:35

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.111

InH2O

0

1

OK

08/29/2026 01:33:22

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.064

InH2O

0

2

OK

08/29/2026 01:43:38

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.320

InH2O

0

2

OK

08/14/2026 09:43:29

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

0.1

0

100

Inactive

08/29/2026 01:44:32

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

1.0

On/Off

0

2

OK

08/03/2026 12:30:51

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2

1.0

On/Off

0

2

Inactive

08/29/2026 01:44:58

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

08/29/2026 00:10:46

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

1.52

PSI

0.8

1.75

Inactive

08/29/2026 01:39:17

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

341.1

PSI

275

800

OK

08/28/2026 12:50:45

4/1/5034/0/0/0

_ASML: Proc Gas Fault Alarm

1.6

ON/OFF

0

5

Inactive

08/29/2026 01:42:16

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

1.3

0

800

OK

08/29/2026 01:46:59

3/1/4101/0/0/0

_CDA Pressure

116.3

PSI

90

140

OK

08/29/2026 01:27:26

0/1/1201/0/0/0

_Cleanroom: Equip RH

42% / 70.3

F

38 / 65

42 / 75

Inactive

08/29/2026 01:39:22

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

1.0

On/Off

0

2

OK

08/29/2026 01:39:22

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

08/29/2026 01:37:22

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2583

PSI

200

3000

OK

08/29/2026 01:36:32

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

368

PSI

200

3000

OK

08/29/2026 01:34:42

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

08/29/2026 01:46:24

3/1/4031/0/0/0

_DI-RO: Light Sensor

0.0

On/Off

0

2

OK

08/29/2026 01:46:57

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

15.0

Ohm-cm

14

100

OK

08/29/2026 01:27:22

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

6.20

PSI

4

10

Inactive

08/29/2026 01:42:01

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

8.37

PSI

4

10

OK

08/29/2026 01:45:30

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

124.0

PSI

0

400

OK

08/29/2026 01:46:42

3/1/4015/0/0/0

_House Vacuum

-25.87

inHg

-30

-23

OK

08/29/2026 01:39:33

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

66.9

DEG F

0

85

OK

08/29/2026 01:37:41

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

212.2

InH2O

0

300

OK

08/29/2026 01:40:14

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

223.6

InH2O

0

300

OK

08/29/2026 01:36:17

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

117.3

InH2O

0

300

OK

08/29/2026 01:47:48

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

130.6

PSI

0

300

OK

08/29/2026 01:46:46

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

57.8

PSI

0

300

OK

08/29/2026 01:36:40

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

151.3

PSI

0

300

OK

08/29/2026 01:45:54

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

100.0

PSI

0

110

OK

08/29/2026 01:34:44

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

52.7

DEG F

0

52

Upper Ctl Limit

08/29/2026 01:44:30

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

82.4

PSI

67

94

OK

08/29/2026 01:44:19

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

55.8

F

0

160

OK

08/29/2026 01:39:26

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

113.7

PSI

0

135

OK

08/29/2026 01:44:18

3/1/4032/0/0/0

_RO: Flow to 236

1.20

GPM

0

100

OK

08/29/2026 01:41:14

0/1/1062/0/0/0

_Tank 47 GPN2

122.08

PSI

90

400

Error-28

08/29/2026 01:17:22

0/1/1064/0/0/0

_Tank 47 UHPN2

120.3

PSI

90

400

OK

08/29/2026 01:34:03

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

114.656

PSI

0

125

OK

08/29/2026 01:43:05

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2689

PSI

200

2800

OK

08/29/2026 01:43:14

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1010

PSI

200

2800

OK

08/29/2026 01:41:02

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

2004

PSI

300

2800

OK

08/29/2026 01:47:28

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

718

PSI

150

1000

OK

08/29/2026 01:41:24

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

552

PSI

200

3000

OK

08/29/2026 01:35:15

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

640

PSI

400

3000

OK

08/29/2026 01:41:41

0/1/1021/0/0/0

C_DDC_133_CO2_105376

829

PSI

350

2800

OK

08/29/2026 01:40:52

0/1/1022/0/0/0

C_DDC_133_O2_105375

1984

PSI

300

2800

OK

08/29/2026 01:44:59

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

2001

PSI

300

2800

OK

08/29/2026 01:35:30

0/1/1003/0/0/0

C_EX3_121_He_

455

PSI

200

2800

OK

08/29/2026 01:34:55

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

2091

PSI

200

2800

OK

08/29/2026 01:43:40

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

253

PSI

300

2600

Lower Ctl Limit

08/29/2026 01:46:45

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1561

PSI

300

3000

OK

08/29/2026 01:46:38

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

1899

PSI

200

2800

Error-27

08/29/2026 01:38:42

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

1764

PSI

200

2800

OK

08/29/2026 01:36:59

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

991

PSI

200

2800

OK

08/29/2026 01:41:26

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2071

PSI

200

2800

OK

08/29/2026 01:42:33

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

571

PSI

200

2800

OK

08/29/2026 01:46:08

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

2140

PSI

200

2800

OK

08/29/2026 01:44:46

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1664

PSI

200

2800

OK

08/29/2026 01:37:36

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

711

PSI

200

2800

OK

08/29/2026 01:44:02

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

288

PSI

140

350

OK

08/29/2026 01:40:17

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1618

PSI

200

2800

OK

08/29/2026 01:47:38

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

774

PSI

200

3000

OK

08/29/2026 01:42:17

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

18

PSI

5

25

OK

08/29/2026 01:45:43

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

1831

PSI

350

4000

OK

08/29/2026 01:43:25

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1600

PSI

200

4000

OK

08/29/2026 01:41:49

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

1717

PSI

500

3000

OK

08/29/2026 01:40:45

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

881

PSI

200

2800

OK

08/29/2026 01:40:29

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1290

PSI

200

4000

OK

08/29/2026 01:43:53

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

15

PSI

5

300

OK

08/29/2026 01:41:12

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

467

PSI

200

4000

OK

08/21/2026 05:29:42

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

335

PSI

200

3000

Inactive

08/29/2026 01:24:58

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

640

PSI

150

1500

OK

08/29/2026 01:33:18

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

976

PSI

500

3000

OK

08/29/2026 01:47:31

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

2097

PSI

500

3000

OK

08/29/2026 01:35:26

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

OK

08/29/2026 01:42:27

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

17.8

LBS

5

300

OK

08/29/2026 01:42:27

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

11.2

LBS

3

300

OK

08/29/2026 01:34:00

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

31.1

LBS

3

300

OK

08/29/2026 01:34:00

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

40.1

LBS

3

300

OK

08/29/2026 01:46:06

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

08/29/2026 01:46:06

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

11.64

LBS

3

300

OK

08/29/2026 01:46:03

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

08/29/2026 01:18:07

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

20.8

LBS

3

300

OK

08/29/2026 01:18:07

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.1

LBS

0

300

OK

08/29/2026 01:46:03

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

18.2

LBS

3

300

OK

08/29/2026 01:43:24

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

27.1

LBS

3

300

OK

08/29/2026 01:44:56

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

11.8

LBS

5

300

OK

08/29/2026 01:37:51

0/1/1045/0/0/0

C_Weigh_Scale_138_HBr

36.0

LBS

2

20

Upper Ctl Limit

08/29/2026 01:44:56

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

08/29/2026 01:43:24

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

37.6

LBS

3

300

OK

08/29/2026 01:37:51

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

0.0

LBS

0

300

OK

08/29/2026 01:34:16

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

9.7

LBS

3

300

OK

08/29/2026 01:34:16

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

31.1

LBS

3

300

OK

08/29/2026 01:36:05

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

37.7

LBS

3

300

OK

08/29/2026 01:44:11

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

23.7

LBS

3

300

OK

08/29/2026 01:44:11

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

36.9

LBS

3

300

OK

08/29/2026 01:40:06

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

28.6

LBS

3

300

OK

08/29/2026 01:44:16

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

45.4

LBS

3

300

OK

08/29/2026 01:44:16

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

46.4

LBS

3

300

OK

08/29/2026 01:36:05

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

08/29/2026 01:37:18

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

14.9

LBS

3

300

OK

08/29/2026 01:47:08

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

65.6

LBS

5

300

OK

08/29/2026 01:35:26

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

118.5

LBS

3

300

OK

08/29/2026 01:40:06

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

52.3

LBS

3

300

OK

08/29/2026 01:37:18

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

08/29/2026 01:47:08

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

mAMPS

No Data

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

mAMPS

No Data

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data