WGR/WTR Readings

05/18/2025 19:24:07

3/1/4030/0/0/0

_1st Flr: City Water Pressure

83.9

PSI

40

90

OK

05/18/2025 19:29:09

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

8.4

7.5

9

OK

05/18/2025 19:27:35

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

OK

05/18/2025 19:31:00

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.595

InH2O

0

1.5

OK

05/18/2025 19:31:00

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.233

InH2O

0

1

OK

05/18/2025 19:29:24

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.094

InH2O

0

2

OK

05/18/2025 19:29:39

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.235

InH2O

0

2

OK

05/18/2025 19:28:59

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

99.1

0

100

OK

05/18/2025 19:29:16

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

0.0

On/Off

0

2

OK

05/18/2025 19:22:45

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2

0.0

On/Off

0

2

OK

05/18/2025 19:18:49

4/1/5034/0/0/0

_2nd Flr: Rm 237 Haskris Chiller

0.0

On/Off

0

2

OK

05/18/2025 19:17:00

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

05/18/2025 19:19:01

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

1.29

PSI

1

1.75

OK

05/18/2025 19:26:07

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

281.6

PSI

275

800

OK

05/18/2025 19:15:49

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

330.1

0

800

OK

05/18/2025 19:25:36

3/1/4101/0/0/0

_CDA Pressure

110.2

PSI

90

140

OK

05/18/2025 19:20:20

0/1/1201/0/0/0

_Cleanroom: Equip RH

38% / 70.5

F

38 / 65

42 / 75

OK

05/18/2025 19:22:27

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

1.0

On/Off

0

2

OK

05/18/2025 19:22:27

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

05/18/2025 19:19:12

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2591

PSI

400

3000

OK

05/18/2025 19:21:37

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

420

PSI

400

3000

OK

05/18/2025 19:22:36

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

05/18/2025 19:18:51

3/1/4032/0/0/0

_DI-RO: Flow

0.42

GPM

0

100

OK

05/18/2025 19:31:23

3/1/4031/0/0/0

_DI-RO: Light Sensor

0.0

On/Off

0

2

OK

05/18/2025 19:30:52

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

17.6

Ohm-cm

14

100

OK

05/18/2025 19:22:40

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

6.13

PSI

4

10

OK

05/18/2025 19:23:53

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

8.12

PSI

4

10

OK

05/18/2025 19:25:41

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

126.0

PSI

0

400

OK

05/18/2025 19:30:48

3/1/4015/0/0/0

_House Vacuum

-25.23

inHg

-30

-23

OK

05/18/2025 19:27:29

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

66.1

DEG F

0

85

OK

05/18/2025 19:18:32

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

216.7

InH2O

0

300

OK

05/18/2025 19:27:51

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

237.8

InH2O

0

300

OK

05/18/2025 19:19:10

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

110.4

InH2O

0

300

OK

05/18/2025 19:22:43

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

125.1

PSI

0

300

OK

05/18/2025 19:28:28

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

59.6

PSI

0

300

OK

05/18/2025 19:25:20

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

152.2

PSI

0

300

OK

05/18/2025 19:17:25

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

100.0

PSI

0

110

OK

05/18/2025 19:28:57

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

51.3

DEG F

0

57

OK

05/18/2025 19:30:55

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

92.2

PSI

67

94

Error-27

05/18/2025 19:30:37

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

57.3

F

0

160

OK

05/18/2025 19:16:55

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

117.1

PSI

0

135

OK

05/18/2025 19:26:07

0/1/1062/0/0/0

_Tank 47 GPN2

126.24

PSI

90

400

OK

05/18/2025 19:31:22

0/1/1064/0/0/0

_Tank 47 UHPN2

117.0

PSI

90

400

OK

05/18/2025 19:12:04

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

112.636

PSI

0

125

OK

05/18/2025 19:31:17

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2724

PSI

200

2800

OK

05/18/2025 19:18:56

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1164

PSI

200

2800

OK

05/18/2025 19:31:08

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

2001

PSI

300

2800

OK

05/18/2025 19:24:45

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

304

PSI

300

1000

OK

05/18/2025 19:22:29

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

787

PSI

400

3000

OK

05/18/2025 19:22:55

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

600

PSI

400

3000

OK

05/18/2025 19:24:18

0/1/1021/0/0/0

C_DDC_133_CO2_105376

812

PSI

350

2800

OK

05/18/2025 19:25:01

0/1/1022/0/0/0

C_DDC_133_O2_105375

2004

PSI

300

2800

OK

05/18/2025 19:31:24

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

418

PSI

300

2800

OK

05/18/2025 19:26:35

0/1/1003/0/0/0

C_EX3_121_He_

585

PSI

200

2800

OK

05/18/2025 19:17:38

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

2635

PSI

200

2800

OK

05/18/2025 19:09:46

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

928

PSI

300

2600

OK

05/18/2025 19:17:04

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1701

PSI

300

3000

OK

05/18/2025 19:19:33

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

2131

PSI

200

2800

OK

05/18/2025 19:27:57

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

1020

PSI

200

2800

Error-28

05/18/2025 19:27:26

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

1003

PSI

200

2800

OK

05/18/2025 19:18:36

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2081

PSI

200

2800

OK

05/18/2025 19:30:25

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

649

PSI

200

2800

OK

05/18/2025 19:22:15

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

2599

PSI

200

2800

OK

05/18/2025 19:22:08

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1615

PSI

200

2800

OK

05/18/2025 19:22:56

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

812

PSI

200

2800

OK

05/18/2025 19:22:55

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

303

PSI

140

350

OK

05/18/2025 19:30:02

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1705

PSI

200

2800

OK

05/18/2025 19:29:57

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

299

PSI

200

3000

OK

05/18/2025 19:30:22

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

17

PSI

5

25

OK

05/18/2025 19:30:09

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

2193

PSI

350

4000

OK

05/18/2025 19:18:23

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1600

PSI

200

4000

OK

05/18/2025 19:27:26

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

721

PSI

500

3000

OK

05/18/2025 19:18:09

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

959

PSI

200

2800

OK

05/18/2025 19:20:25

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1346

PSI

200

4000

OK

05/18/2025 19:17:37

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

7

PSI

5

300

OK

05/18/2025 19:20:34

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

513

PSI

200

4000

OK

05/18/2025 19:17:31

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

350

PSI

200

3000

OK

05/18/2025 19:29:32

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

634

PSI

150

1500

OK

05/18/2025 19:16:25

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

987

PSI

500

3000

OK

05/18/2025 19:25:43

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

1946

PSI

500

3000

OK

05/18/2025 19:23:44

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

OK

05/18/2025 19:27:31

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

20.1

LBS

5

300

OK

05/18/2025 19:27:31

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

13.6

LBS

6

300

OK

05/18/2025 19:26:36

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

32.9

LBS

6

300

OK

05/18/2025 19:26:36

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

40.4

LBS

6

300

OK

05/18/2025 19:31:09

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

05/18/2025 19:31:09

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

20.9

LBS

3

300

OK

05/18/2025 19:05:47

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

05/18/2025 19:09:41

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

22.2

LBS

6

300

OK

05/18/2025 19:09:41

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.1

LBS

0

300

OK

05/18/2025 19:05:47

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

7.9

LBS

0

300

OK

05/18/2025 19:17:57

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

5.6

LBS

5

300

OK

04/11/2025 07:22:43

0/1/1045/0/0/0

C_Weigh_Scale_138_Cl_Not In Use

8.7

LBS

0

300

Inactive

05/18/2025 19:25:58

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

10.6

LBS

5

300

OK

05/18/2025 19:25:58

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

05/18/2025 19:17:57

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

14.2

LBS

5

300

OK

04/11/2025 07:22:43

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

0.0

LBS

0

300

Inactive

05/18/2025 19:28:45

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

18.2

LBS

0

300

OK

05/18/2025 19:28:45

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

24.5

LBS

3

300

OK

05/18/2025 19:30:45

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

36.3

LBS

0

300

OK

05/18/2025 19:30:47

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

17.6

LBS

5

300

OK

05/18/2025 19:30:47

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

21.8

LBS

6

300

OK

05/18/2025 19:27:55

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

21.1

LBS

5

300

OK

05/18/2025 19:29:20

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

20.3

LBS

5

300

OK

05/18/2025 19:29:20

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

28.3

LBS

5

300

OK

05/18/2025 19:30:45

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

05/18/2025 19:29:06

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

7.9

LBS

3

300

OK

05/18/2025 19:23:49

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

9.0

LBS

5

300

OK

05/18/2025 19:23:44

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

18.1

LBS

5

300

OK

05/18/2025 19:27:55

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

34.8

LBS

3

300

OK

05/18/2025 19:23:49

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

05/18/2025 19:29:06

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

05/18/2025 19:16:57

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

38.1

mAMPS

0

100

OK

05/18/2025 19:16:57

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

72.0

mAMPS

0

200

OK

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data