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WGR Readings: 152 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
10/07/2026 19:56:323/1/4030/0/0/0_1st Flr: City Water Pressure68.9PSI4090OK
10/01/2026 18:57:154/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.3 7.59Inactive
10/07/2026 20:04:024/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
10/07/2026 19:27:294/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.520InH2O01.5OK
10/07/2026 20:08:224/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.122InH2O01OK
10/07/2026 19:04:304/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.064InH2O02Inactive
10/07/2026 20:01:354/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.310InH2O02OK
08/14/2026 09:43:294/1/5030/0/0/0_2nd Flr: Cool Fogger WDR0.1 0100Inactive
09/30/2026 02:39:314/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02Inactive
10/07/2026 20:01:144/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
10/07/2026 20:01:234/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.53PSI0.81.75OK
10/07/2026 19:49:524/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow327.6PSI275800OK
10/07/2026 19:36:303/1/4017/0/0/0_ASML: ArXeNe Gas2,506.5PSI2002800OK
10/07/2026 19:59:164/1/5034/0/0/0_ASML: Proc Gas Fault Alarm1.0On/Off0.51.2OK
10/07/2026 20:01:233/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad1.5 0800OK
09/28/2026 23:41:013/1/4101/0/0/0_CDA Pressure130.0PSI90140Inactive
10/07/2026 20:08:390/1/1201/0/0/0_Cleanroom: Equip RH41% / 70.3F38 / 6542 / 75OK
10/07/2026 19:56:110/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
10/07/2026 19:56:110/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
10/07/2026 19:19:064/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112591PSI2003000OK
10/07/2026 17:19:594/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010362PSI2003000Inactive
10/07/2026 20:00:290/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
10/06/2026 15:09:340/1/6002/0/0/1_Cleanroom: Rm XXX RH (%)42.9(BLANK)3060Inactive
10/07/2026 20:04:240/1/6001/0/0/1_Cleanroom: Rm XXX RH (%)41.9(BLANK)3060OK
10/07/2026 13:06:230/1/6023/0/0/1_Cleanroom: Rm XXX RH (%) Test5.205(BLANK)3060Inactive
10/06/2026 15:09:340/1/6002/0/0/0_Cleanroom: Rm XXX Temperature (F)73.1(BLANK)5580Inactive
10/07/2026 13:06:230/1/6023/0/0/0_Cleanroom: Rm XXX Temperature (F)2.709(BLANK)5580Inactive
10/07/2026 20:04:240/1/6001/0/0/0_Cleanroom: Rm XXX Temperature (F)75.5(BLANK)5580OK
10/07/2026 20:08:533/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
10/07/2026 19:41:293/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)5.81PSI410Inactive
10/07/2026 19:56:323/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.59PSI410OK
10/07/2026 20:00:560/1/1065/0/0/0_GPN2 Pressure Gauge After Filters113.8PSI0400OK
10/07/2026 20:00:443/1/4015/0/0/0_House Vacuum-25.80inHg-30-23OK
10/07/2026 20:02:323/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp69.0DEG F085OK
10/07/2026 20:06:413/1/4002/0/0/0_LN2_Tanks_LI-1-1176.4InH2O0300OK
10/07/2026 19:56:543/1/4004/0/0/0_LN2_Tanks_LI-1-2245.6InH2O0300OK
10/07/2026 20:09:023/1/4006/0/0/0_LN2_Tanks_LI-1-386.1InH2O0300OK
10/07/2026 19:46:243/1/4001/0/0/0_LN2_Tanks_PI-1-1122.2PSI118300OK
10/07/2026 20:01:513/1/4003/0/0/0_LN2_Tanks_PI-1-257.6PSI0300OK
10/07/2026 19:55:083/1/4005/0/0/0_LN2_Tanks_PI-1-3151.8PSI118300OK
10/07/2026 19:57:230/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
10/07/2026 20:07:073/1/4020/0/0/0_PCW: Lower Temp Gauge49.4DEG F052OK
10/07/2026 20:01:453/1/4009/0/0/0_PCW: Middle Pressure Gauge83.1PSI6794OK
10/07/2026 20:07:463/1/4008/0/0/0_PCW: Upper Temp Gauge57.3F0160OK
10/07/2026 20:06:340/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall105.3PSI0135OK
10/07/2026 20:00:063/1/4032/0/0/0_RO: Flow to 2361.19GPM0100OK
10/07/2026 20:07:110/1/1062/0/0/0_Tank 47 GPN2120.60PSI90400Error-28
10/07/2026 20:05:090/1/1064/0/0/0_Tank 47 UHPN2117.6PSI90400OK
10/07/2026 20:08:300/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters111.189PSI0125OK
10/07/2026 19:59:210/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882689PSI2002800OK
10/07/2026 19:56:010/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491004PSI2002800OK
10/07/2026 20:07:530/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052501975PSI3002800OK
10/07/2026 20:01:340/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089722PSI1501000OK
10/07/2026 19:54:540/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089556PSI2003000OK
10/07/2026 20:06:470/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090651PSI4003000OK
10/07/2026 19:54:450/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
10/07/2026 20:09:190/1/1022/0/0/0C_DDC_133_O2_1053751984PSI3002800OK
10/07/2026 20:06:280/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_1997PSI3002800OK
10/07/2026 20:05:170/1/1003/0/0/0C_EX3_121_He_449PSI2002800OK
10/07/2026 20:04:210/1/1002/0/0/0C_EX6_102_He_NoPVS2055PSI2002800OK
10/07/2026 19:57:510/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS161PSI3002600Lower Ctl Limit
10/07/2026 20:02:210/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_105254465PSI3003000OK
10/07/2026 19:58:540/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081899PSI2002800Error-27
10/07/2026 20:08:250/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091752PSI2002800OK
10/07/2026 20:06:220/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551006PSI2002800OK
10/07/2026 19:54:490/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822090PSI2002800OK
10/07/2026 20:09:210/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284571PSI2002800OK
10/07/2026 19:56:380/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_105253581PSI2002800OK
10/07/2026 19:56:460/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691664PSI2002800OK
10/07/2026 20:06:560/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270711PSI2002800OK
10/07/2026 20:08:570/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271294PSI140350OK
10/07/2026 19:54:440/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721618PSI2002800OK
10/07/2026 20:03:020/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O815PSI2003000OK
10/07/2026 20:00:140/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O17PSI525OK
10/07/2026 20:08:150/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601825PSI3504000OK
10/07/2026 19:55:340/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
10/07/2026 19:55:150/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1702PSI5003000OK
10/07/2026 20:05:020/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243877PSI2002800OK
10/07/2026 19:39:380/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661287PSI2004000OK
10/07/2026 19:57:300/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261311PSI5300OK
10/07/2026 19:56:090/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265473PSI2004000OK
10/07/2026 20:05:010/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS231PSI2003000OK
10/07/2026 20:08:420/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3639PSI1501500OK
10/07/2026 19:40:160/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092980PSI5003000OK
10/07/2026 20:03:050/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020932103PSI5003000OK
10/07/2026 19:59:590/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
10/07/2026 20:04:290/1/1041/0/0/1C_Weigh_Scale_125_CCL2F217.9LBS5300OK
10/07/2026 20:04:290/1/1041/0/0/0C_Weigh_Scale_125_CF410.7LBS3300OK
10/07/2026 19:57:270/1/1040/0/0/0C_Weigh_Scale_125_CHF322.5LBS3300OK
10/07/2026 19:57:270/1/1040/0/0/1C_Weigh_Scale_125_SF633.5LBS3300OK
10/07/2026 19:55:580/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
10/07/2026 19:55:580/1/1051/0/0/0C_Weigh_Scale_126_SF611.17LBS3300OK
10/07/2026 20:08:340/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
10/07/2026 19:59:590/1/1050/0/0/0C_Weigh_Scale_130_CF421.3LBS3300OK
10/07/2026 19:59:590/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
10/07/2026 20:08:340/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher5.91LBS3300OK
10/07/2026 20:03:530/1/1046/0/0/0C_Weigh_Scale_138_C4F830.4LBS3300OK
10/07/2026 19:59:480/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane8.9LBS5300OK
10/07/2026 20:04:380/1/1045/0/0/0C_Weigh_Scale_138_HBr17.2LBS220OK
10/07/2026 19:59:480/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
10/07/2026 20:03:530/1/1046/0/0/1C_Weigh_Scale_138_SF62.27LBS3300Lower Ctl Limit
10/07/2026 20:04:380/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected0.0LBS0300OK
10/07/2026 20:02:370/1/1053/0/0/1C_Weigh_Scale_143A_C4F87.9LBS3300OK
10/07/2026 20:02:370/1/1053/0/0/0C_Weigh_Scale_143A_SF624.9LBS3300OK
10/07/2026 19:57:580/1/1052/0/0/0C_Weigh_Scale_152_Far C4F894.1LBS3300OK
10/07/2026 19:56:040/1/1047/0/0/1C_Weigh_Scale_152_Far_CF415.7LBS3300OK
10/07/2026 19:56:040/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF315.1LBS3300OK
10/07/2026 20:00:280/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F817.3LBS3300OK
10/07/2026 19:55:410/1/1043/0/0/1C_Weigh_Scale_152_Near_CF417.4LBS3300OK
10/07/2026 19:55:410/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF328.1LBS3300OK
10/07/2026 19:57:580/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
10/07/2026 19:56:120/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL34.47LBS3300OK
10/07/2026 19:52:350/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine14.44LBS5300OK
10/07/2026 19:59:590/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF416.10LBS3300OK
10/07/2026 20:00:280/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF611.76LBS3300OK
10/07/2026 19:52:350/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
10/07/2026 19:56:120/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
10/07/2026 19:59:050/1/6003/0/0/0ID:6003 ATO Temp & ATO Humidity73.8(BLANK)5580OK
10/07/2026 19:59:050/1/6003/0/0/1ID:6003 ATO Temp & ATO Humidity CH243.9(BLANK)3060OK
10/05/2026 13:39:500/1/6004/0/0/0ID:6004 ATO Temp & ATO Humidity-40.0VOLTS5580Inactive
10/05/2026 13:39:500/1/6004/0/0/1ID:6004 ATO Temp & ATO Humidity CH20.0VOLTS3060Inactive
10/06/2026 15:18:080/1/6005/0/0/0ID:6005 ATO Temp & ATO Humidity-40.0(BLANK)5580Inactive
10/06/2026 15:18:080/1/6005/0/0/1ID:6005 ATO Temp & ATO Humidity CH20.0(BLANK)3060Inactive
 0/1/6006/0/0/0WDR 6006    No Data
 0/1/6007/0/0/0WDR 6007    No Data
 0/1/6008/0/0/0WDR 6008    No Data
 0/1/6009/0/0/0WGR 6009    No Data
 0/1/6011/0/0/0WGR 6011    No Data
 0/1/6013/0/0/0WTR 6013 V  No Data
 0/1/6013/0/0/1WTR 6013 CH2 V  No Data
 0/1/6014/0/0/0WTR 6014 V  No Data
 0/1/6014/0/0/1WTR 6014 CH2 V  No Data
 0/1/6015/0/0/0WTR 6015 V  No Data
 0/1/6015/0/0/1WTR 6015 CH2 V  No Data
 0/1/6016/0/0/0WTR 6016 V  No Data
 0/1/6016/0/0/1WTR 6016 CH2 V  No Data
10/07/2026 20:06:100/1/6017/0/0/0WTR 60170.00(BLANK)011OK
10/07/2026 20:06:100/1/6017/0/0/1WTR 6017 CH20.00(BLANK)011OK
 0/1/6018/0/0/0WTR 6018 V  No Data
 0/1/6018/0/0/1WTR 6018 CH2 V  No Data
 0/1/6019/0/0/0WTR 6019 V  No Data
 0/1/6019/0/0/1WTR 6019 CH2 V  No Data
 0/1/6021/0/0/0WTR 6021 V  No Data
 0/1/6021/0/0/1WTR 6021 CH2 V  No Data
10/05/2026 14:34:510/1/6022/0/0/0WTR 6022 (4-20mA)411.6(BLANK)5580Inactive
10/05/2026 14:34:510/1/6022/0/0/1WTR 6022 CH2 (4-20mA)168.3(BLANK)3060Inactive
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data