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WGR Readings: 155 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
11/02/2026 05:18:393/1/4030/0/0/0_1st Flr: City Water Pressure68.6PSI4090OK
11/02/2026 04:22:094/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.3 7.59Inactive
11/02/2026 05:17:004/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
11/01/2026 14:59:464/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.490InH2O01.5Inactive
11/02/2026 05:17:344/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.178InH2O01OK
11/02/2026 05:18:484/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.059InH2O02OK
11/02/2026 05:26:384/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.235InH2O02OK
08/14/2026 09:43:294/1/5030/0/0/0_2nd Flr: Cool Fogger WDR0.1 0100Inactive
09/30/2026 02:39:314/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02Inactive
11/02/2026 05:24:304/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
11/02/2026 05:16:424/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.51PSI0.81.75OK
11/01/2026 15:42:514/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow371.0PSI275800Inactive
11/02/2026 05:14:263/1/4017/0/0/0_ASML: ArXeNe Gas2,430.4PSI2002800OK
11/02/2026 05:24:364/1/5034/0/0/0_ASML: Proc Gas Fault Alarm1.0On/Off0.51.2OK
11/02/2026 05:23:373/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad1.3 0800OK
09/28/2026 23:41:013/1/4101/0/0/0_CDA Pressure130.0PSI90140Inactive
11/02/2026 05:26:280/1/1201/0/0/0_Cleanroom: Equip RH41% / 70.3F38 / 6542 / 75OK
11/02/2026 05:19:440/1/6003/0/0/1_Cleanroom: Rm 101_Humidity (%)51.6(BLANK)3060OK
11/02/2026 05:19:440/1/6003/0/0/0_Cleanroom: Rm 101_Temperature (F)67.7(BLANK)5580OK
11/02/2026 05:16:050/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
11/02/2026 05:16:050/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
11/02/2026 04:42:514/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112585PSI2003000OK
11/02/2026 05:15:234/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010354PSI2003000OK
11/02/2026 05:20:260/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
11/02/2026 05:26:250/1/6004/0/0/1_Cleanroom: Rm 134_Humidity (%)48.5(BLANK)3060OK
11/02/2026 05:26:250/1/6004/0/0/0_Cleanroom: Rm 134_Temperature (F)68.9(BLANK)5580OK
11/02/2026 05:20:510/1/6005/0/0/1_Cleanroom: Rm 136_Humidity (%)47.5(BLANK)3060OK
11/02/2026 05:20:510/1/6005/0/0/0_Cleanroom: Rm 136_Temperature (F)71.1(BLANK)5580OK
11/02/2026 05:23:100/1/6001/0/0/1_Cleanroom: Rm 147_Humidity (%)53.6(BLANK)3060OK
11/02/2026 05:23:100/1/6001/0/0/0_Cleanroom: Rm 147_Temperature (F)66.3(BLANK)5580OK
11/02/2026 05:24:300/1/6002/0/0/1_Cleanroom: Rm 153_Humidity (%)63.2(BLANK)3060Upper Ctl Limit
11/02/2026 05:24:300/1/6002/0/0/0_Cleanroom: Rm 153_Temperature (F)59.5(BLANK)5580OK
10/22/2026 15:15:470/1/6014/0/0/1_Cleanroom: Rm XXX RH (%)-25.0(BLANK)3060Inactive
10/27/2026 11:42:490/1/6015/0/0/1_Cleanroom: Rm XXX RH (%)-24.8(BLANK)3060Inactive
10/27/2026 11:46:000/1/6016/0/0/1_Cleanroom: Rm XXX RH (%)-25.0(BLANK)3060Inactive
10/22/2026 15:15:470/1/6014/0/0/0_Cleanroom: Rm XXX Temperature (F)-85.0(BLANK)5580Inactive
10/27/2026 11:42:490/1/6015/0/0/0_Cleanroom: Rm XXX Temperature (F)-84.6(BLANK)5580Inactive
10/27/2026 11:46:000/1/6016/0/0/0_Cleanroom: Rm XXX Temperature (F)-85.0(BLANK)5580Inactive
11/02/2026 05:15:073/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
11/02/2026 05:20:543/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)5.84PSI410OK
11/02/2026 05:20:453/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.59PSI410OK
11/02/2026 05:25:320/1/1065/0/0/0_GPN2 Pressure Gauge After Filters122.0PSI0400OK
11/02/2026 05:22:343/1/4015/0/0/0_House Vacuum-25.87inHg-30-23OK
11/02/2026 05:20:583/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp61.5DEG F085OK
11/02/2026 05:21:043/1/4002/0/0/0_LN2_Tanks_LI-1-1147.6InH2O0300OK
11/02/2026 05:24:283/1/4004/0/0/0_LN2_Tanks_LI-1-2185.8InH2O0300OK
11/02/2026 05:22:153/1/4006/0/0/0_LN2_Tanks_LI-1-3114.4InH2O0300OK
11/02/2026 05:15:453/1/4001/0/0/0_LN2_Tanks_PI-1-1136.8PSI118300OK
11/02/2026 05:14:573/1/4003/0/0/0_LN2_Tanks_PI-1-259.1PSI0300OK
11/02/2026 05:21:363/1/4005/0/0/0_LN2_Tanks_PI-1-3151.6PSI118300OK
11/02/2026 05:25:210/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
11/02/2026 05:14:273/1/4020/0/0/0_PCW: Lower Temp Gauge51.3DEG F052OK
11/02/2026 05:27:003/1/4009/0/0/0_PCW: Middle Pressure Gauge81.3PSI6794OK
11/02/2026 05:15:273/1/4008/0/0/0_PCW: Upper Temp Gauge54.4F0160OK
11/02/2026 05:15:030/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall114.0PSI0135OK
11/02/2026 05:25:563/1/4032/0/0/0_RO: Flow to 2362.31GPM0100OK
11/02/2026 05:20:300/1/1062/0/0/0_Tank 47 GPN2126.24PSI90400OK
11/02/2026 05:23:170/1/1064/0/0/0_Tank 47 UHPN2117.6PSI90400OK
10/13/2026 13:05:000/1/6023/0/0/1_TEST: Rm XXX RH (%) Test5.205(BLANK)3060Inactive
10/13/2026 13:05:000/1/6023/0/0/0_TEST: Rm XXX Temperature (F)76.7(BLANK)5580Inactive
11/02/2026 05:16:060/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters112.056PSI0125OK
11/02/2026 05:20:100/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882669PSI2002800OK
11/02/2026 05:18:350/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491007PSI2002800OK
11/02/2026 05:16:140/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052501975PSI3002800OK
11/02/2026 05:15:510/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089630PSI1501000OK
11/02/2026 05:22:040/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089543PSI2003000OK
11/02/2026 05:26:400/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090584PSI4003000OK
11/02/2026 05:18:090/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
11/02/2026 05:15:520/1/1022/0/0/0C_DDC_133_O2_1053752001PSI3002800OK
11/02/2026 05:24:500/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_1982PSI3002800OK
11/02/2026 05:16:160/1/1003/0/0/0C_EX3_121_He_438PSI2002800OK
11/02/2026 05:26:570/1/1002/0/0/0C_EX6_102_He_NoPVS2055PSI2002800OK
11/02/2026 05:21:440/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS143PSI3002600Lower Ctl Limit
11/02/2026 05:25:440/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_105254234PSI3003000Lower Ctl Limit
11/02/2026 05:27:160/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081899PSI2002800Error-27
11/02/2026 05:17:380/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091670PSI2002800OK
11/02/2026 05:14:140/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
11/02/2026 05:15:100/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822084PSI2002800OK
11/02/2026 05:16:020/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284571PSI2002800OK
11/02/2026 05:20:390/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_105253152PSI2002800Lower Ctl Limit
11/02/2026 05:19:390/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691647PSI2002800OK
11/02/2026 05:15:210/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270711PSI2002800OK
11/02/2026 05:22:280/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271279PSI140350OK
11/02/2026 05:17:520/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721618PSI2002800OK
11/02/2026 05:25:260/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O812PSI2003000OK
11/02/2026 05:20:420/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O18PSI525OK
11/02/2026 05:26:580/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601825PSI3504000OK
11/02/2026 05:22:250/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
11/02/2026 05:17:240/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1679PSI5003000OK
11/02/2026 05:18:380/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243877PSI2002800OK
11/02/2026 05:26:500/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661290PSI2004000OK
11/02/2026 05:24:450/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261318PSI5300OK
11/02/2026 05:19:050/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265476PSI2004000OK
11/02/2026 05:24:550/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS370PSI2003000OK
11/02/2026 05:16:340/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3620PSI1501500OK
11/02/2026 05:15:490/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092971PSI5003000OK
11/02/2026 05:20:260/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931906PSI5003000OK
11/02/2026 05:20:210/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
11/02/2026 05:19:200/1/1041/0/0/1C_Weigh_Scale_125_CCL2F217.9LBS5300OK
11/02/2026 05:19:200/1/1041/0/0/0C_Weigh_Scale_125_CF410.6LBS3300OK
11/02/2026 05:28:140/1/1040/0/0/0C_Weigh_Scale_125_CHF321.6LBS3300OK
11/02/2026 05:28:140/1/1040/0/0/1C_Weigh_Scale_125_SF633.0LBS3300OK
11/02/2026 05:23:290/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
11/02/2026 05:23:290/1/1051/0/0/0C_Weigh_Scale_126_SF610.63LBS3300OK
11/02/2026 05:26:170/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
11/02/2026 05:26:300/1/1050/0/0/0C_Weigh_Scale_130_CF421.1LBS3300OK
11/02/2026 05:26:300/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
11/02/2026 05:26:170/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher2.62LBS3300Lower Ctl Limit
11/02/2026 05:21:080/1/1046/0/0/0C_Weigh_Scale_138_C4F830.1LBS3300OK
11/02/2026 05:24:050/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane8.2LBS5300OK
11/02/2026 05:21:350/1/1045/0/0/0C_Weigh_Scale_138_HBr8.2LBS220OK
11/02/2026 05:24:050/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
11/02/2026 05:21:080/1/1046/0/0/1C_Weigh_Scale_138_SF636.4LBS3300OK
11/02/2026 05:21:350/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected0.0LBS0300OK
11/02/2026 05:22:000/1/1053/0/0/1C_Weigh_Scale_143A_C4F86.2LBS3300OK
11/02/2026 05:22:000/1/1053/0/0/0C_Weigh_Scale_143A_SF619.7LBS3300OK
11/02/2026 05:27:030/1/1052/0/0/0C_Weigh_Scale_152_Far C4F836.4LBS3300OK
11/02/2026 05:24:360/1/1047/0/0/1C_Weigh_Scale_152_Far_CF419.5LBS3300OK
11/02/2026 05:24:360/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF317.7LBS3300OK
11/02/2026 05:26:380/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F814.4LBS3300OK
11/02/2026 05:21:450/1/1043/0/0/1C_Weigh_Scale_152_Near_CF418.6LBS3300OK
11/02/2026 05:21:450/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF331.7LBS3300OK
11/02/2026 05:27:030/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
11/02/2026 05:21:550/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL34.19LBS3300OK
11/02/2026 05:23:460/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine13.52LBS5300OK
11/02/2026 05:20:210/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF416.87LBS3300OK
11/02/2026 05:26:380/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF610.68LBS3300OK
11/02/2026 05:21:550/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
11/02/2026 05:23:460/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0NodeID 0 PSI  No Data
 0/1/6006/0/0/0WDR 6006    No Data
 0/1/6007/0/0/0WDR 6007    No Data
 0/1/6008/0/0/0WDR 6008    No Data
 0/1/6009/0/0/0WGR 6009    No Data
 0/1/6011/0/0/0WGR 6011    No Data
10/15/2026 15:33:450/1/6013/0/0/1WTR 6013 CH2 Humidity (%)30.7(BLANK)3060Inactive
10/15/2026 15:33:450/1/6013/0/0/0WTR 6013 Temperature (F)-85.0(BLANK)5580Inactive
10/15/2026 11:31:500/1/6017/0/0/1WTR 6017 CH2 Humidity (%)-25.0(BLANK)3060Inactive
10/15/2026 11:31:500/1/6017/0/0/0WTR 6017_Temperature (F)63.2(BLANK)5580Inactive
 0/1/6018/0/0/0WTR 6018 V  No Data
 0/1/6018/0/0/1WTR 6018 CH2 V  No Data
 0/1/6019/0/0/0WTR 6019 V  No Data
 0/1/6019/0/0/1WTR 6019 CH2 V  No Data
 0/1/6021/0/0/0WTR 6021 V  No Data
 0/1/6021/0/0/1WTR 6021 CH2 V  No Data
10/14/2026 14:47:150/1/6022/0/0/0WTR 6022 (4-20mA) Temperature (F)-40.0(BLANK)5580Inactive
10/14/2026 14:47:150/1/6022/0/0/1WTR 6022 CH2 (4-20mA) Humidity%100.8(BLANK)3060Inactive
10/15/2026 15:53:580/1/6025/0/0/0WTR 6025 CH1 Temperature (F)27.437(BLANK)5580Inactive
10/15/2026 15:53:580/1/6025/0/0/1WTR 6025 CH2 Humidity (%)1,715.080(BLANK)3060Inactive
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data