WGR Readings: 118 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
01/13/2026 03:55:183/1/4030/0/0/0_1st Flr: City Water Pressure69.2PSI4090OK
10/10/2025 22:36:034/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.7 7.59Inactive
01/13/2026 03:48:314/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02Low Battery
01/12/2026 20:05:014/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.805InH2O01.5Inactive
01/13/2026 03:50:394/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.089InH2O01OK
01/13/2026 03:47:004/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.074InH2O02OK
01/13/2026 03:52:154/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.240InH2O02OK
01/13/2026 03:28:464/1/5030/0/0/0_2nd Flr: Cool Fogger WDR99.3 0100OK
01/13/2026 03:49:074/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
01/13/2026 03:39:394/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 21.0On/Off02OK
01/13/2026 03:43:594/1/5034/0/0/0_2nd Flr: Rm 237 Haskris Chiller0.0On/Off02OK
01/13/2026 03:46:374/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
01/13/2026 03:53:104/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.50PSI0.81.75OK
01/08/2026 01:03:284/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow1.0PSI275800Inactive
09/21/2025 08:18:313/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad402.3 0800Inactive
01/13/2026 03:53:343/1/4101/0/0/0_CDA Pressure117.3PSI90140OK
01/13/2026 03:52:020/1/1201/0/0/0_Cleanroom: Equip RH33% / 70.3F38 / 6542 / 75Lower Ctl Limit
01/13/2026 03:47:530/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
01/13/2026 03:47:530/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
01/13/2026 03:41:144/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112594PSI2003000OK
01/13/2026 03:42:334/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010391PSI2003000OK
01/13/2026 03:43:140/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
01/13/2026 03:44:533/1/4032/0/0/0_DI-RO: Flow2.60GPM0100OK
01/13/2026 03:45:043/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
01/13/2026 03:46:593/1/4017/0/0/0_DI-RO: Resistivity Gauge #1817.9Ohm-cm14100OK
01/13/2026 03:45:233/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)6.20PSI410OK
01/13/2026 03:43:483/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)8.12PSI410OK
01/13/2026 03:43:550/1/1065/0/0/0_GPN2 Pressure Gauge After Filters126.5PSI0400OK
01/13/2026 03:45:583/1/4015/0/0/0_House Vacuum-25.43inHg-30-23OK
01/13/2026 03:43:143/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp55.7DEG F085OK
01/13/2026 03:55:183/1/4002/0/0/0_LN2_Tanks_LI-1-1210.7InH2O0300OK
01/13/2026 03:56:033/1/4004/0/0/0_LN2_Tanks_LI-1-2180.9InH2O0300OK
01/13/2026 03:47:423/1/4006/0/0/0_LN2_Tanks_LI-1-3104.6InH2O0300OK
01/13/2026 03:42:413/1/4001/0/0/0_LN2_Tanks_PI-1-1127.9PSI0300OK
01/13/2026 03:42:573/1/4003/0/0/0_LN2_Tanks_PI-1-259.6PSI0300OK
01/10/2026 22:46:503/1/4005/0/0/0_LN2_Tanks_PI-1-3152.0PSI0300Inactive
01/13/2026 03:53:300/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
01/13/2026 03:47:273/1/4020/0/0/0_PCW: Lower Temp Gauge50.1DEG F057OK
01/13/2026 03:41:323/1/4009/0/0/0_PCW: Middle Pressure Gauge87.0PSI6794OK
01/13/2026 03:50:093/1/4008/0/0/0_PCW: Upper Temp Gauge57.0F0160OK
01/13/2026 03:52:360/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall117.8PSI0135OK
01/13/2026 03:53:420/1/1062/0/0/0_Tank 47 GPN2126.99PSI90400OK
01/13/2026 03:43:200/1/1064/0/0/0_Tank 47 UHPN2120.3PSI90400OK
01/13/2026 03:43:150/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters112.923PSI0125OK
01/13/2026 03:46:160/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882669PSI2002800OK
01/13/2026 03:44:510/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491076PSI2002800OK
01/13/2026 03:50:470/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052502004PSI3002800OK
01/13/2026 03:46:260/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089706PSI1501000OK
01/13/2026 03:45:530/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089631PSI2003000OK
01/13/2026 03:30:560/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090604PSI4003000OK
01/13/2026 03:49:420/1/1021/0/0/0C_DDC_133_CO2_105376823PSI3502800OK
01/13/2026 03:42:440/1/1022/0/0/0C_DDC_133_O2_1053751999PSI3002800OK
01/13/2026 03:55:130/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_269PSI3002800Lower Ctl Limit
01/13/2026 03:54:450/1/1003/0/0/0C_EX3_121_He_517PSI2002800OK
01/13/2026 03:45:430/1/1002/0/0/0C_EX6_102_He_NoPVS2364PSI2002800OK
01/13/2026 03:51:520/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS610PSI3002600OK
01/13/2026 03:54:220/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541659PSI3003000OK
01/13/2026 03:50:360/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050082020PSI2002800OK
01/13/2026 03:43:520/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050092344PSI2002800OK
01/13/2026 03:43:230/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
01/13/2026 03:51:090/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822084PSI2002800OK
01/13/2026 03:45:470/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284580PSI2002800OK
01/13/2026 03:54:170/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052532569PSI2002800OK
01/13/2026 03:44:040/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691685PSI2002800OK
01/13/2026 03:52:290/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270771PSI2002800OK
01/13/2026 03:46:560/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271288PSI140350OK
01/13/2026 03:51:520/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721676PSI2002800OK
01/13/2026 03:47:150/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O774PSI2003000OK
01/13/2026 03:43:120/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O19PSI525OK
01/13/2026 03:53:270/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601905PSI3504000OK
01/13/2026 03:51:320/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
01/13/2026 03:46:310/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1849PSI5003000OK
01/13/2026 03:42:070/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243912PSI2002800OK
01/13/2026 03:49:530/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661290PSI2004000OK
01/13/2026 03:43:420/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261320PSI5300OK
01/13/2026 03:53:000/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265485PSI2004000OK
01/13/2026 03:51:040/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS353PSI2003000OK
01/13/2026 03:55:520/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3613PSI1501500OK
01/13/2026 03:55:380/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092985PSI5003000OK
01/13/2026 03:50:560/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931906PSI5003000OK
01/13/2026 03:48:260/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
01/13/2026 03:49:340/1/1041/0/0/1C_Weigh_Scale_125_CCL2F219.6LBS5300OK
01/13/2026 03:49:340/1/1041/0/0/0C_Weigh_Scale_125_CF411.6LBS3300OK
01/13/2026 03:45:350/1/1040/0/0/0C_Weigh_Scale_125_CHF332.5LBS3300OK
01/13/2026 03:45:350/1/1040/0/0/1C_Weigh_Scale_125_SF640.8LBS3300OK
01/13/2026 03:41:160/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
01/13/2026 03:41:160/1/1051/0/0/0C_Weigh_Scale_126_SF615.1LBS3300OK
01/13/2026 03:51:250/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
01/13/2026 03:47:350/1/1050/0/0/0C_Weigh_Scale_130_CF421.6LBS3300OK
01/13/2026 03:47:350/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
01/13/2026 03:51:250/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher20.2LBS3300OK
01/13/2026 03:43:270/1/1046/0/0/0C_Weigh_Scale_138_C4F830.7LBS3300OK
01/13/2026 03:47:520/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane9.5LBS5300OK
 0/1/1045/0/0/0C_Weigh_Scale_138_HBr LBS  No Data
01/13/2026 03:47:520/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
01/13/2026 03:43:270/1/1046/0/0/1C_Weigh_Scale_138_SF620.3LBS3300OK
 0/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected LBS  No Data
01/13/2026 03:43:230/1/1053/0/0/1C_Weigh_Scale_143A_C4F815.6LBS3300OK
01/13/2026 03:43:230/1/1053/0/0/0C_Weigh_Scale_143A_SF617.3LBS3300OK
01/13/2026 03:50:570/1/1052/0/0/0C_Weigh_Scale_152_Far C4F836.5LBS3300OK
01/13/2026 03:42:410/1/1047/0/0/1C_Weigh_Scale_152_Far_CF413.9LBS3300OK
01/13/2026 03:42:410/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF315.9LBS3300OK
01/13/2026 03:52:480/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F833.4LBS3300OK
01/13/2026 03:46:540/1/1043/0/0/1C_Weigh_Scale_152_Near_CF418.7LBS3300OK
01/13/2026 03:46:540/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF327.9LBS3300OK
01/13/2026 03:50:570/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
01/13/2026 03:53:540/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL38.1LBS3300OK
01/13/2026 03:55:270/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine20.9LBS5300OK
01/13/2026 03:48:260/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF418.2LBS3300OK
01/13/2026 03:52:480/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF621.8LBS3300OK
01/13/2026 03:53:540/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
01/13/2026 03:55:270/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
12/05/2025 10:51:340/1/1202/0/0/0High Precision Humidity Sensor_Not Installed-25.0mAMPS0100Inactive
12/05/2025 10:51:340/1/1202/0/0/1High Precision Temperature Sensor_Not Installed72.7mAMPS0200Inactive
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data