WGR/WTR Readings

09/10/2026 06:31:37

3/1/4030/0/0/0

_1st Flr: City Water Pressure

68.9

PSI

40

90

OK

09/10/2026 06:27:05

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

7.3

7.5

9

Lower Ctl Limit

09/10/2026 06:30:04

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

OK

09/10/2026 06:00:12

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.545

InH2O

0

1.5

OK

09/10/2026 06:27:19

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.111

InH2O

0

1

OK

09/10/2026 05:52:24

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.064

InH2O

0

2

OK

09/10/2026 06:33:06

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.315

InH2O

0

2

OK

08/14/2026 09:43:29

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

0.1

0

100

Inactive

09/10/2026 06:20:02

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

1.0

On/Off

0

2

OK

08/31/2026 15:10:16

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2

1.0

On/Off

0

2

Inactive

09/10/2026 06:17:37

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

09/10/2026 06:30:53

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

1.52

PSI

0.8

1.75

OK

09/10/2026 03:33:30

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

361.0

PSI

275

800

Inactive

09/10/2026 06:26:38

4/1/5034/0/0/0

_ASML: Proc Gas Fault Alarm

5.2

ON/OFF

4

6

OK

09/10/2026 06:32:30

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

101.1

0

800

OK

09/10/2026 06:30:51

3/1/4101/0/0/0

_CDA Pressure

115.7

PSI

90

140

OK

09/10/2026 06:33:15

0/1/1201/0/0/0

_Cleanroom: Equip RH

42% / 70.3

F

38 / 65

42 / 75

OK

09/10/2026 06:27:24

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

1.0

On/Off

0

2

OK

09/10/2026 06:27:24

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

09/10/2026 06:09:18

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2591

PSI

200

3000

OK

09/10/2026 06:24:26

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

368

PSI

200

3000

OK

09/10/2026 06:23:42

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

09/10/2026 06:32:13

3/1/4031/0/0/0

_DI-RO: Light Sensor

0.0

On/Off

0

2

OK

09/10/2026 06:30:23

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

14.9

Ohm-cm

14

100

OK

09/10/2026 06:31:10

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

5.76

PSI

4

10

OK

09/10/2026 06:30:40

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

8.07

PSI

4

10

OK

09/10/2026 06:19:08

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

143.8

PSI

0

400

OK

09/10/2026 06:19:12

3/1/4015/0/0/0

_House Vacuum

-24.50

inHg

-30

-23

OK

09/10/2026 06:22:16

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

67.7

DEG F

0

85

OK

09/10/2026 06:27:01

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

162.2

InH2O

0

300

OK

09/10/2026 06:29:15

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

238.7

InH2O

0

300

OK

09/10/2026 06:24:38

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

111.1

InH2O

0

300

OK

09/10/2026 06:21:22

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

162.1

PSI

118

300

OK

09/10/2026 06:19:55

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

58.1

PSI

0

300

OK

09/10/2026 06:27:27

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

151.6

PSI

118

300

OK

09/10/2026 06:28:28

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

100.0

PSI

0

110

OK

09/10/2026 06:23:23

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

52.2

DEG F

0

52

Upper Ctl Limit

09/10/2026 06:33:35

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

82.4

PSI

67

94

OK

09/10/2026 06:31:25

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

54.4

F

0

160

OK

09/10/2026 06:27:07

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

124.8

PSI

0

135

OK

09/10/2026 06:19:40

3/1/4032/0/0/0

_RO: Flow to 236

2.15

GPM

0

100

OK

09/10/2026 06:28:26

0/1/1062/0/0/0

_Tank 47 GPN2

143.35

PSI

90

400

OK

09/10/2026 06:31:42

0/1/1064/0/0/0

_Tank 47 UHPN2

120.3

PSI

90

400

OK

09/10/2026 06:05:05

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

114.369

PSI

0

125

OK

09/10/2026 06:31:53

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2669

PSI

200

2800

OK

09/10/2026 06:31:07

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1004

PSI

200

2800

OK

09/10/2026 06:29:48

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

2001

PSI

300

2800

OK

09/10/2026 06:21:13

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

712

PSI

150

1000

OK

09/10/2026 06:30:49

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

560

PSI

200

3000

OK

09/10/2026 06:18:52

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

604

PSI

400

3000

OK

09/10/2026 06:28:45

0/1/1021/0/0/0

C_DDC_133_CO2_105376

825

PSI

350

2800

OK

09/10/2026 06:27:48

0/1/1022/0/0/0

C_DDC_133_O2_105375

2004

PSI

300

2800

OK

09/10/2026 06:27:21

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

2014

PSI

300

2800

OK

09/10/2026 06:19:17

0/1/1003/0/0/0

C_EX3_121_He_

453

PSI

200

2800

OK

09/10/2026 06:22:48

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

2085

PSI

200

2800

OK

09/10/2026 06:31:32

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

238

PSI

300

2600

Lower Ctl Limit

09/10/2026 06:20:17

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1535

PSI

300

3000

OK

09/10/2026 06:29:40

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

1929

PSI

200

2800

OK

09/10/2026 06:26:23

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

1811

PSI

200

2800

OK

09/10/2026 06:24:28

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

1003

PSI

200

2800

OK

09/10/2026 06:28:16

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2084

PSI

200

2800

OK

09/10/2026 06:31:04

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

571

PSI

200

2800

OK

09/10/2026 06:32:00

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

2108

PSI

200

2800

OK

09/10/2026 06:18:43

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1685

PSI

200

2800

OK

09/10/2026 06:24:46

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

711

PSI

200

2800

OK

09/10/2026 06:26:26

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

300

PSI

140

350

OK

09/10/2026 06:27:43

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1618

PSI

200

2800

OK

09/10/2026 06:30:16

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

785

PSI

200

3000

OK

09/10/2026 06:28:40

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

18

PSI

5

25

OK

09/10/2026 06:32:16

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

1840

PSI

350

4000

OK

09/10/2026 06:26:26

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1600

PSI

200

4000

OK

09/10/2026 06:29:19

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

1719

PSI

500

3000

OK

09/10/2026 06:22:42

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

883

PSI

200

2800

OK

09/10/2026 06:29:24

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1287

PSI

200

4000

OK

09/10/2026 06:26:56

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

18

PSI

5

300

OK

09/10/2026 06:29:37

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

476

PSI

200

4000

OK

09/10/2026 06:26:31

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

219

PSI

200

3000

OK

09/10/2026 06:27:26

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

636

PSI

150

1500

OK

09/10/2026 06:19:19

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

982

PSI

500

3000

Error-27

09/10/2026 06:29:53

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

2088

PSI

500

3000

OK

09/10/2026 06:33:25

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

OK

09/10/2026 06:23:19

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

17.8

LBS

5

300

OK

09/10/2026 06:23:19

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

10.9

LBS

3

300

OK

09/10/2026 06:12:26

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

30.0

LBS

3

300

OK

09/10/2026 06:12:26

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

39.1

LBS

3

300

OK

09/10/2026 06:26:56

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

09/10/2026 06:26:56

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

11.88

LBS

3

300

OK

09/10/2026 06:19:35

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

09/10/2026 06:24:14

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

20.9

LBS

3

300

OK

09/10/2026 06:24:14

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.1

LBS

0

300

OK

09/10/2026 06:19:35

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

3.75

LBS

3

300

OK

09/10/2026 06:19:19

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

30.9

LBS

3

300

OK

09/10/2026 06:26:27

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

13.2

LBS

5

300

OK

09/10/2026 06:20:48

0/1/1045/0/0/0

C_Weigh_Scale_138_HBr

12.4

LBS

2

20

OK

09/10/2026 06:26:27

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

09/10/2026 06:19:19

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

2.34

LBS

3

300

Lower Ctl Limit

09/10/2026 06:20:48

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

0.0

LBS

0

300

OK

09/10/2026 06:24:58

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

68.0

LBS

3

300

OK

09/10/2026 06:24:58

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

28.7

LBS

3

300

OK

09/10/2026 06:19:26

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

36.6

LBS

3

300

OK

09/10/2026 06:22:48

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

17.5

LBS

3

300

OK

09/10/2026 06:22:48

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

16.6

LBS

3

300

OK

09/10/2026 06:19:51

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

18.7

LBS

3

300

OK

09/10/2026 06:04:35

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

18.3

LBS

3

300

OK

09/10/2026 06:04:35

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

29.3

LBS

3

300

OK

09/10/2026 06:19:26

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

09/10/2026 06:23:29

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

4.74

LBS

3

300

OK

09/10/2026 06:25:30

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

76.0

LBS

5

300

OK

09/10/2026 06:33:25

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

16.55

LBS

3

300

OK

09/10/2026 06:19:51

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

12.21

LBS

3

300

OK

09/10/2026 06:23:29

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

09/10/2026 06:25:30

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

mAMPS

No Data

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

mAMPS

No Data

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data