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WGR Readings: 118 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
06/16/2026 19:55:343/1/4030/0/0/0_1st Flr: City Water Pressure69.4PSI4090OK
03/17/2026 18:29:254/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.9 7.59Inactive
02/15/2026 22:44:474/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02Inactive
06/16/2026 19:56:384/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.695InH2O01.5OK
06/16/2026 19:55:384/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.122InH2O01OK
06/16/2026 20:02:054/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.074InH2O02OK
06/16/2026 19:44:044/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.335InH2O02OK
02/04/2026 23:05:554/1/5030/0/0/0_2nd Flr: Cool Fogger WDR99.1 0100Inactive
06/16/2026 20:08:364/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
06/16/2026 19:56:114/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 20.0On/Off02OK
06/16/2026 19:58:194/1/5034/0/0/0_2nd Flr: Rm 237 Haskris Chiller0.0On/Off02OK
06/16/2026 19:59:024/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
06/16/2026 20:00:314/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.10PSI0.81.75OK
03/08/2026 21:57:514/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow301.1PSI275800Inactive
 3/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad    No Data
06/16/2026 20:08:353/1/4101/0/0/0_CDA Pressure121.0PSI90140OK
06/16/2026 19:56:390/1/1201/0/0/0_Cleanroom: Equip RH43% / 70.3F38 / 6542 / 75Upper Ctl Limit
06/16/2026 20:01:000/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
06/16/2026 20:01:000/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
06/16/2026 19:39:054/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112585PSI2003000OK
06/16/2026 20:01:214/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010380PSI2003000OK
06/16/2026 20:07:150/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
06/16/2026 20:02:143/1/4032/0/0/0_DI-RO: Flow-9.52GPM0100Lower Ctl Limit
06/16/2026 19:48:213/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
06/16/2026 20:01:023/1/4017/0/0/0_DI-RO: Resistivity Gauge #1817.9Ohm-cm14100OK
06/16/2026 20:06:253/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)6.20PSI410OK
06/16/2026 20:01:463/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.87PSI410OK
06/16/2026 20:07:210/1/1065/0/0/0_GPN2 Pressure Gauge After Filters132.2PSI0400OK
06/16/2026 20:04:493/1/4015/0/0/0_House Vacuum-26.13inHg-30-23OK
06/16/2026 19:55:353/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp66.1DEG F085OK
06/16/2026 19:59:483/1/4002/0/0/0_LN2_Tanks_LI-1-1218.9InH2O0300OK
06/16/2026 20:07:423/1/4004/0/0/0_LN2_Tanks_LI-1-2229.1InH2O0300OK
05/28/2026 00:03:213/1/4006/0/0/0_LN2_Tanks_LI-1-3112.0InH2O0300Inactive
06/16/2026 19:56:003/1/4001/0/0/0_LN2_Tanks_PI-1-1125.3PSI0300Error-27
06/16/2026 20:02:023/1/4003/0/0/0_LN2_Tanks_PI-1-257.8PSI0300OK
01/10/2026 22:46:503/1/4005/0/0/0_LN2_Tanks_PI-1-3152.0PSI0300Inactive
06/16/2026 20:02:460/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
06/16/2026 19:55:393/1/4020/0/0/0_PCW: Lower Temp Gauge49.4DEG F057OK
06/16/2026 19:53:523/1/4009/0/0/0_PCW: Middle Pressure Gauge82.5PSI6794OK
06/16/2026 20:01:003/1/4008/0/0/0_PCW: Upper Temp Gauge57.0F0160OK
06/16/2026 19:40:410/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall113.2PSI0135OK
06/16/2026 20:02:190/1/1062/0/0/0_Tank 47 GPN2135.32PSI90400OK
06/16/2026 20:06:280/1/1064/0/0/0_Tank 47 UHPN2120.3PSI90400OK
06/16/2026 20:02:300/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters114.369PSI0125OK
06/16/2026 19:58:160/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882689PSI2002800OK
06/16/2026 20:02:330/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491049PSI2002800OK
06/16/2026 19:55:550/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052502004PSI3002800OK
06/16/2026 19:55:470/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089746PSI1501000OK
06/16/2026 19:58:550/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089552PSI2003000OK
06/16/2026 20:01:280/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090629PSI4003000OK
06/16/2026 20:07:400/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
06/16/2026 20:01:180/1/1022/0/0/0C_DDC_133_O2_1053752004PSI3002800OK
06/16/2026 20:08:260/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_214PSI3002800Lower Ctl Limit
06/16/2026 19:56:210/1/1003/0/0/0C_EX3_121_He_499PSI2002800OK
06/16/2026 19:55:090/1/1002/0/0/0C_EX6_102_He_NoPVS2159PSI2002800OK
06/16/2026 19:57:540/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS387PSI3002600OK
06/16/2026 19:53:470/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541627PSI3003000OK
06/16/2026 19:57:270/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081929PSI2002800OK
06/16/2026 20:04:000/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050092019PSI2002800OK
06/16/2026 20:04:490/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
06/16/2026 19:53:340/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822088PSI2002800OK
06/16/2026 20:08:070/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284573PSI2002800OK
06/16/2026 19:58:330/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052532540PSI2002800OK
06/16/2026 20:06:090/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691685PSI2002800OK
06/16/2026 19:57:380/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270754PSI2002800OK
06/16/2026 20:07:200/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271291PSI140350OK
06/16/2026 20:08:290/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721647PSI2002800OK
06/16/2026 19:58:490/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O779PSI2003000OK
06/16/2026 20:02:420/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O18PSI525OK
06/16/2026 20:01:130/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601861PSI3504000OK
06/16/2026 20:02:250/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
06/16/2026 19:53:460/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1751PSI5003000OK
06/16/2026 20:07:240/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243906PSI2002800OK
06/16/2026 20:04:370/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661290PSI2004000OK
06/16/2026 20:07:310/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261315PSI5300OK
06/16/2026 20:03:520/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265485PSI2004000OK
06/16/2026 20:00:500/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS338PSI2003000OK
06/16/2026 19:54:040/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3634PSI1501500OK
06/16/2026 19:54:590/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092974PSI5003000OK
06/16/2026 19:53:360/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931979PSI5003000OK
02/21/2026 07:36:290/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300Inactive
06/16/2026 20:00:150/1/1041/0/0/1C_Weigh_Scale_125_CCL2F219.1LBS5300OK
06/16/2026 20:00:150/1/1041/0/0/0C_Weigh_Scale_125_CF411.6LBS3300OK
06/16/2026 20:01:110/1/1040/0/0/0C_Weigh_Scale_125_CHF332.0LBS3300OK
06/16/2026 20:01:110/1/1040/0/0/1C_Weigh_Scale_125_SF6100.9LBS3300OK
06/16/2026 19:59:160/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
06/16/2026 19:59:160/1/1051/0/0/0C_Weigh_Scale_126_SF611.9LBS3300OK
06/16/2026 20:03:550/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
06/16/2026 19:55:040/1/1050/0/0/0C_Weigh_Scale_130_CF421.2LBS3300OK
06/16/2026 19:55:040/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
06/16/2026 20:03:550/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher6.6LBS3300OK
06/16/2026 20:01:400/1/1046/0/0/0C_Weigh_Scale_138_C4F829.1LBS3300OK
06/16/2026 20:03:350/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane13.6LBS5300OK
 0/1/1045/0/0/0C_Weigh_Scale_138_HBr LBS  No Data
06/16/2026 20:03:350/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
06/16/2026 20:01:400/1/1046/0/0/1C_Weigh_Scale_138_SF618.3LBS3300OK
 0/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected LBS  No Data
06/16/2026 20:00:450/1/1053/0/0/1C_Weigh_Scale_143A_C4F810.8LBS3300OK
06/16/2026 20:00:450/1/1053/0/0/0C_Weigh_Scale_143A_SF61.9LBS3300Lower Ctl Limit
06/16/2026 20:08:000/1/1052/0/0/0C_Weigh_Scale_152_Far C4F836.0LBS3300OK
06/16/2026 20:08:360/1/1047/0/0/1C_Weigh_Scale_152_Far_CF414.0LBS3300OK
06/16/2026 20:08:360/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF315.3LBS3300OK
06/16/2026 20:07:280/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F831.6LBS3300OK
06/16/2026 19:58:580/1/1043/0/0/1C_Weigh_Scale_152_Near_CF418.1LBS3300OK
06/16/2026 19:58:580/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF327.5LBS3300OK
06/16/2026 20:08:000/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
06/16/2026 20:06:010/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL35.9LBS3300OK
06/16/2026 19:54:450/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine7.7LBS5300OK
02/21/2026 07:36:290/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF417.8LBS3300Inactive
06/16/2026 20:07:280/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF625.3LBS3300OK
06/16/2026 19:54:450/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
06/16/2026 20:06:010/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data