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WGR Readings: 154 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
10/02/2026 20:03:193/1/4030/0/0/0_1st Flr: City Water Pressure68.3PSI4090OK
10/01/2026 18:57:154/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.3 7.59Inactive
10/02/2026 20:04:214/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
10/02/2026 20:04:584/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.520InH2O01.5OK
10/02/2026 20:00:144/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.122InH2O01OK
10/02/2026 19:57:074/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.069InH2O02OK
10/02/2026 19:38:114/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.315InH2O02OK
08/14/2026 09:43:294/1/5030/0/0/0_2nd Flr: Cool Fogger WDR0.1 0100Inactive
09/30/2026 02:39:314/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02Inactive
09/24/2026 13:08:194/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 2_RH_TEST_%43.6 3060Inactive
10/02/2026 19:50:324/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
10/02/2026 19:40:044/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.54PSI0.81.75OK
10/01/2026 13:34:534/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow337.3PSI275800Inactive
10/02/2026 19:52:204/1/5034/0/0/0_ASML: Proc Gas Fault Alarm1.0On/Off0.51.2OK
09/24/2026 01:36:563/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad1.7 0800Inactive
09/28/2026 23:41:013/1/4101/0/0/0_CDA Pressure130.0PSI90140Inactive
10/02/2026 20:03:310/1/1201/0/0/0_Cleanroom: Equip RH41% / 70.5F38 / 6542 / 75OK
10/02/2026 20:03:280/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
10/02/2026 20:03:280/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
10/02/2026 19:26:454/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112591PSI2003000OK
10/02/2026 19:58:014/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010362PSI2003000OK
10/02/2026 19:55:360/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
09/24/2026 13:08:194/1/5033/0/0/1_Cleanroom: Rm Test RH (Percentage)0.000(BLANK)050Inactive
10/02/2026 19:51:503/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
10/02/2026 19:44:093/1/4017/0/0/0_DI-RO: Resistivity Gauge #182,621.7Ohm-cm14100Upper Ctl Limit
10/02/2026 20:03:533/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)5.79PSI410OK
10/02/2026 20:04:053/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.59PSI410OK
10/02/2026 19:53:040/1/1065/0/0/0_GPN2 Pressure Gauge After Filters113.5PSI0400OK
10/02/2026 19:54:383/1/4015/0/0/0_House Vacuum-25.80inHg-30-23OK
10/02/2026 19:57:323/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp68.7DEG F085OK
10/02/2026 19:53:473/1/4002/0/0/0_LN2_Tanks_LI-1-1127.6InH2O0300OK
10/01/2026 05:00:463/1/4004/0/0/0_LN2_Tanks_LI-1-2181.6InH2O0300Inactive
10/02/2026 20:01:093/1/4006/0/0/0_LN2_Tanks_LI-1-390.8InH2O0300OK
10/02/2026 19:54:323/1/4001/0/0/0_LN2_Tanks_PI-1-1125.3PSI118300OK
10/02/2026 19:54:273/1/4003/0/0/0_LN2_Tanks_PI-1-258.3PSI0300OK
10/02/2026 20:02:583/1/4005/0/0/0_LN2_Tanks_PI-1-3151.8PSI118300OK
10/02/2026 19:52:000/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
10/02/2026 20:00:143/1/4020/0/0/0_PCW: Lower Temp Gauge47.2DEG F052OK
10/02/2026 19:53:143/1/4009/0/0/0_PCW: Middle Pressure Gauge83.3PSI6794OK
10/02/2026 20:00:203/1/4008/0/0/0_PCW: Upper Temp Gauge55.8F0160OK
10/02/2026 19:59:430/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall103.8PSI0135OK
10/02/2026 19:52:263/1/4032/0/0/0_RO: Flow to 2361.22GPM0100OK
10/02/2026 20:00:220/1/1062/0/0/0_Tank 47 GPN2115.69PSI90400Error-28
10/02/2026 19:59:320/1/1064/0/0/0_Tank 47 UHPN2117.6PSI90400OK
10/02/2026 20:02:490/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters111.189PSI0125OK
10/02/2026 19:53:000/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882669PSI2002800OK
10/02/2026 20:03:560/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491007PSI2002800OK
10/02/2026 20:01:230/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052501975PSI3002800OK
10/02/2026 19:54:530/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089726PSI1501000OK
10/02/2026 20:02:330/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089556PSI2003000OK
10/02/2026 20:01:190/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090647PSI4003000OK
10/02/2026 20:01:500/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
10/02/2026 20:01:550/1/1022/0/0/0C_DDC_133_O2_1053752004PSI3002800OK
10/02/2026 20:04:520/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_1995PSI3002800OK
10/02/2026 20:00:480/1/1003/0/0/0C_EX3_121_He_451PSI2002800OK
10/02/2026 19:56:590/1/1002/0/0/0C_EX6_102_He_NoPVS2055PSI2002800OK
10/02/2026 19:50:240/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS161PSI3002600Lower Ctl Limit
10/02/2026 19:54:590/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_105254927PSI3003000OK
10/02/2026 19:54:470/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081899PSI2002800OK
10/02/2026 20:00:190/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091752PSI2002800OK
10/02/2026 19:58:440/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
10/02/2026 20:01:580/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822088PSI2002800OK
10/02/2026 20:01:590/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284571PSI2002800OK
10/02/2026 20:04:060/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052531235PSI2002800OK
10/02/2026 19:50:320/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691664PSI2002800OK
10/02/2026 19:59:200/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270711PSI2002800OK
10/02/2026 20:03:310/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271291PSI140350OK
10/02/2026 20:01:460/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721618PSI2002800OK
09/30/2026 02:08:270/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O785PSI2003000Inactive
10/02/2026 19:54:180/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O18PSI525OK
10/02/2026 20:01:200/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601831PSI3504000OK
10/02/2026 19:50:190/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591632PSI2004000OK
10/02/2026 20:02:550/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1702PSI5003000OK
10/02/2026 19:59:000/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243877PSI2002800OK
10/02/2026 20:03:140/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661293PSI2004000OK
10/02/2026 19:52:140/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261320PSI5300OK
10/02/2026 20:04:030/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265473PSI2004000OK
10/02/2026 19:58:480/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS219PSI2003000OK
10/02/2026 20:00:440/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3639PSI1501500OK
10/02/2026 20:03:540/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092982PSI5003000OK
10/02/2026 19:58:180/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020932083PSI5003000OK
10/02/2026 19:55:530/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
10/02/2026 20:01:200/1/1041/0/0/1C_Weigh_Scale_125_CCL2F218.1LBS5300OK
10/02/2026 20:01:200/1/1041/0/0/0C_Weigh_Scale_125_CF410.7LBS3300OK
10/02/2026 19:52:300/1/1040/0/0/0C_Weigh_Scale_125_CHF321.2LBS3300OK
10/02/2026 19:52:300/1/1040/0/0/1C_Weigh_Scale_125_SF633.3LBS3300OK
10/02/2026 19:58:300/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
10/02/2026 19:58:300/1/1051/0/0/0C_Weigh_Scale_126_SF611.56LBS3300OK
10/02/2026 19:57:240/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
10/02/2026 19:53:380/1/1050/0/0/0C_Weigh_Scale_130_CF421.0LBS3300OK
10/02/2026 19:53:380/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
10/02/2026 19:57:240/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher6.04LBS3300OK
10/02/2026 20:04:540/1/1046/0/0/0C_Weigh_Scale_138_C4F830.4LBS3300OK
10/02/2026 19:52:310/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane8.9LBS5300OK
10/02/2026 19:56:470/1/1045/0/0/0C_Weigh_Scale_138_HBr16.8LBS220OK
10/02/2026 19:52:310/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
10/02/2026 20:04:540/1/1046/0/0/1C_Weigh_Scale_138_SF62.44LBS3300Lower Ctl Limit
10/02/2026 19:56:470/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected0.0LBS0300OK
10/02/2026 19:51:140/1/1053/0/0/1C_Weigh_Scale_143A_C4F88.2LBS3300OK
10/02/2026 19:51:140/1/1053/0/0/0C_Weigh_Scale_143A_SF625.7LBS3300OK
10/02/2026 20:04:320/1/1052/0/0/0C_Weigh_Scale_152_Far C4F894.8LBS3300OK
10/02/2026 19:54:160/1/1047/0/0/1C_Weigh_Scale_152_Far_CF415.9LBS3300OK
10/02/2026 19:54:160/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF315.4LBS3300OK
10/02/2026 20:04:150/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F817.3LBS3300OK
10/02/2026 20:02:280/1/1043/0/0/1C_Weigh_Scale_152_Near_CF417.3LBS3300OK
10/02/2026 20:02:280/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF328.1LBS3300OK
10/02/2026 20:04:320/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
10/02/2026 19:54:090/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL34.66LBS3300OK
10/02/2026 19:48:080/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine15.52LBS5300OK
10/02/2026 19:55:530/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF416.73LBS3300OK
10/02/2026 20:04:150/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF612.19LBS3300OK
10/02/2026 19:48:080/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
10/02/2026 19:54:090/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0/1/6006/0/0/0WDR 6006    No Data
 0/1/6007/0/0/0WDR 6007    No Data
 0/1/6008/0/0/0WDR 6008    No Data
 0/1/6009/0/0/0WGR 6009    No Data
 0/1/6011/0/0/0WGR 6011    No Data
 0/1/6013/0/0/0WTR 6013 V  No Data
 0/1/6013/0/0/1WTR 6013 CH2 V  No Data
 0/1/6014/0/0/0WTR 6014 V  No Data
 0/1/6014/0/0/1WTR 6014 CH2 V  No Data
 0/1/6015/0/0/0WTR 6015 V  No Data
 0/1/6015/0/0/1WTR 6015 CH2 V  No Data
 0/1/6016/0/0/0WTR 6016 V  No Data
 0/1/6016/0/0/1WTR 6016 CH2 V  No Data
 0/1/6017/0/0/0WTR 6017 V  No Data
 0/1/6017/0/0/1WTR 6017 CH2 V  No Data
 0/1/6018/0/0/0WTR 6018 V  No Data
 0/1/6018/0/0/1WTR 6018 CH2 V  No Data
 0/1/6019/0/0/0WTR 6019 V  No Data
 0/1/6019/0/0/1WTR 6019 CH2 V  No Data
 0/1/6021/0/0/0WTR 6021 V  No Data
 0/1/6021/0/0/1WTR 6021 CH2 V  No Data
 0/1/6022/0/0/0WTR 6022 V  No Data
 0/1/6022/0/0/1WTR 6022 CH2 V  No Data
 0/1/6023/0/0/0WTR 6023 V  No Data
 0/1/6023/0/0/1WTR 6023 CH2 V  No Data
 0/1/6024/0/0/0WTR 6024 V  No Data
 0/1/6024/0/0/1WTR 6024 CH2 V  No Data
 0/1/6025/0/0/0WTR 6025 V  No Data
 0/1/6025/0/0/1WTR 6025 CH2 V  No Data
 0/1/6026/0/0/0WTR 6026 V  No Data
 0/1/6026/0/0/1WTR 6026 CH2 V  No Data
 0/1/6027/0/0/0WTR 6027 V  No Data
 0/1/6027/0/0/1WTR 6027 CH2 V  No Data
 0/1/6028/0/0/0WTR 6028 V  No Data
 0/1/6028/0/0/1WTR 6028 CH2 V  No Data
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data