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WGR Readings: 155 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
11/14/2026 06:05:413/1/4030/0/0/0_1st Flr: City Water Pressure56.5PSI4090OK
11/14/2026 06:05:084/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.3 7.59OK
11/14/2026 06:03:594/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
11/14/2026 03:10:254/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.505InH2O01.5Inactive
11/14/2026 05:35:594/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.167InH2O01OK
11/14/2026 06:10:424/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.064InH2O02OK
11/14/2026 05:59:564/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.245InH2O02OK
08/14/2026 09:43:294/1/5030/0/0/0_2nd Flr: Cool Fogger WDR0.1 0100Inactive
09/30/2026 02:39:314/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02Inactive
11/14/2026 05:46:444/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
11/14/2026 06:06:344/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.47PSI0.81.75OK
11/05/2026 10:00:184/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow361.3PSI275800Inactive
11/14/2026 06:01:083/1/4017/0/0/0_ASML: ArXeNe Gas2,197.8PSI2002800OK
11/14/2026 05:57:174/1/5034/0/0/0_ASML: Proc Gas Fault Alarm1.0On/Off0.51.2OK
11/14/2026 06:02:163/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad51.2 0800OK
09/28/2026 23:41:013/1/4101/0/0/0_CDA Pressure130.0PSI90140Inactive
11/14/2026 06:02:040/1/1201/0/0/0_Cleanroom: Equip RH42% / 70.3F38 / 6542 / 75OK
11/14/2026 06:06:520/1/6003/0/0/1_Cleanroom: Rm 101_Humidity (%)52.6(BLANK)3060OK
11/14/2026 06:06:520/1/6003/0/0/0_Cleanroom: Rm 101_Temperature (F)67.5(BLANK)5580OK
11/14/2026 06:07:350/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
11/14/2026 06:07:350/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
11/14/2026 06:01:274/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112568PSI2003000OK
11/14/2026 05:47:594/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010357PSI2003000OK
11/14/2026 06:00:460/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
11/14/2026 06:01:550/1/6004/0/0/1_Cleanroom: Rm 134_Humidity (%)55.1(BLANK)3060OK
11/14/2026 06:01:550/1/6004/0/0/0_Cleanroom: Rm 134_Temperature (F)69.5(BLANK)5580OK
11/14/2026 06:09:510/1/6005/0/0/1_Cleanroom: Rm 136_Humidity (%)51.8(BLANK)3060OK
11/14/2026 06:09:510/1/6005/0/0/0_Cleanroom: Rm 136_Temperature (F)71.1(BLANK)5580OK
11/14/2026 06:10:200/1/6001/0/0/1_Cleanroom: Rm 147_Humidity (%)49.4(BLANK)3060OK
11/14/2026 06:10:200/1/6001/0/0/0_Cleanroom: Rm 147_Temperature (F)70.0(BLANK)5580OK
11/14/2026 06:06:400/1/6002/0/0/1_Cleanroom: Rm 153_Humidity (%)49.5(BLANK)3060OK
11/14/2026 06:06:400/1/6002/0/0/0_Cleanroom: Rm 153_Temperature (F)67.3(BLANK)5580OK
10/22/2026 15:15:470/1/6014/0/0/1_Cleanroom: Rm XXX RH (%)-25.0(BLANK)3060Inactive
10/27/2026 11:42:490/1/6015/0/0/1_Cleanroom: Rm XXX RH (%)-24.8(BLANK)3060Inactive
10/27/2026 11:46:000/1/6016/0/0/1_Cleanroom: Rm XXX RH (%)-25.0(BLANK)3060Inactive
10/22/2026 15:15:470/1/6014/0/0/0_Cleanroom: Rm XXX Temperature (F)-85.0(BLANK)5580Inactive
10/27/2026 11:42:490/1/6015/0/0/0_Cleanroom: Rm XXX Temperature (F)-84.6(BLANK)5580Inactive
10/27/2026 11:46:000/1/6016/0/0/0_Cleanroom: Rm XXX Temperature (F)-85.0(BLANK)5580Inactive
11/14/2026 06:02:183/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
11/14/2026 05:53:523/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)5.57PSI410OK
11/14/2026 06:08:353/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.51PSI410OK
11/14/2026 06:00:210/1/1065/0/0/0_GPN2 Pressure Gauge After Filters124.8PSI0400OK
11/14/2026 06:10:293/1/4015/0/0/0_House Vacuum-25.83inHg-30-23OK
11/14/2026 06:08:063/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp63.1DEG F085OK
11/14/2026 05:58:493/1/4002/0/0/0_LN2_Tanks_LI-1-1197.3InH2O0300OK
11/14/2026 06:01:133/1/4004/0/0/0_LN2_Tanks_LI-1-2160.9InH2O0300OK
11/14/2026 05:59:163/1/4006/0/0/0_LN2_Tanks_LI-1-3104.6InH2O0300OK
11/14/2026 06:07:433/1/4001/0/0/0_LN2_Tanks_PI-1-1134.8PSI118300OK
11/14/2026 06:06:433/1/4003/0/0/0_LN2_Tanks_PI-1-258.9PSI0300OK
11/14/2026 05:57:033/1/4005/0/0/0_LN2_Tanks_PI-1-3152.2PSI118300OK
11/14/2026 06:07:210/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
11/14/2026 06:01:303/1/4020/0/0/0_PCW: Lower Temp Gauge43.1DEG F052Error-28
11/14/2026 06:03:083/1/4009/0/0/0_PCW: Middle Pressure Gauge82.4PSI6794OK
11/14/2026 06:03:513/1/4008/0/0/0_PCW: Upper Temp Gauge55.8F0160OK
11/14/2026 06:04:340/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall115.3PSI0135OK
11/14/2026 06:05:333/1/4032/0/0/0_RO: Flow to 2360.95GPM0100OK
11/14/2026 06:11:040/1/1062/0/0/0_Tank 47 GPN2128.33PSI90400Error-28
11/14/2026 06:06:100/1/1064/0/0/0_Tank 47 UHPN2117.6PSI90400OK
10/13/2026 13:05:000/1/6023/0/0/1_TEST: Rm XXX RH (%) Test5.205(BLANK)3060Inactive
10/13/2026 13:05:000/1/6023/0/0/0_TEST: Rm XXX Temperature (F)76.7(BLANK)5580Inactive
11/14/2026 06:03:350/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters112.636PSI0125OK
11/14/2026 06:07:550/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882669PSI2002800OK
11/14/2026 06:05:500/1/1012/0/0/0C_AJACovaporator_129_Ar_105249990PSI2002800OK
11/14/2026 06:03:070/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052501975PSI3002800OK
11/14/2026 06:06:310/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089638PSI1501000OK
11/14/2026 05:58:350/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089541PSI2003000OK
11/14/2026 05:58:060/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090596PSI4003000OK
11/14/2026 06:06:090/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
11/14/2026 06:04:120/1/1022/0/0/0C_DDC_133_O2_1053752001PSI3002800OK
11/14/2026 06:10:450/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_1978PSI3002800OK
11/14/2026 05:58:500/1/1003/0/0/0C_EX3_121_He_438PSI2002800OK
11/14/2026 06:00:550/1/1002/0/0/0C_EX6_102_He_NoPVS2055PSI2002800OK
11/14/2026 06:08:360/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS92PSI3002600Lower Ctl Limit
11/14/2026 05:57:540/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_105254234PSI3003000Lower Ctl Limit
11/14/2026 06:04:230/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081899PSI2002800Error-27
11/14/2026 06:05:390/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091626PSI2002800OK
11/14/2026 06:03:430/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
11/14/2026 06:02:320/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822095PSI2002800OK
11/14/2026 06:03:350/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284571PSI2002800OK
11/14/2026 06:07:400/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_105253152PSI2002800Lower Ctl Limit
11/14/2026 06:07:570/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691647PSI2002800OK
11/14/2026 06:03:400/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270711PSI2002800OK
11/14/2026 06:05:370/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271288PSI140350OK
11/14/2026 06:06:300/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721618PSI2002800OK
11/14/2026 05:58:070/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O812PSI2003000OK
11/14/2026 06:10:030/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O17PSI525OK
11/14/2026 05:57:470/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601831PSI3504000OK
11/14/2026 06:06:000/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
11/14/2026 06:06:020/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1675PSI5003000OK
11/14/2026 05:59:580/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243877PSI2002800OK
11/14/2026 05:57:090/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661284PSI2004000OK
11/14/2026 06:07:230/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261333PSI5300OK
11/14/2026 06:05:090/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265462PSI2004000OK
11/14/2026 05:57:300/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS367PSI2003000OK
11/14/2026 05:49:320/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3628PSI1501500OK
11/14/2026 06:02:160/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092971PSI5003000OK
11/14/2026 06:05:340/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931931PSI5003000OK
11/14/2026 06:04:320/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
11/14/2026 06:09:200/1/1041/0/0/1C_Weigh_Scale_125_CCL2F218.2LBS5300OK
11/14/2026 06:09:200/1/1041/0/0/0C_Weigh_Scale_125_CF410.5LBS3300OK
11/14/2026 06:07:540/1/1040/0/0/0C_Weigh_Scale_125_CHF321.7LBS3300OK
11/14/2026 06:07:540/1/1040/0/0/1C_Weigh_Scale_125_SF633.5LBS3300OK
11/14/2026 06:10:230/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
11/14/2026 06:10:230/1/1051/0/0/0C_Weigh_Scale_126_SF610.75LBS3300OK
11/14/2026 06:05:010/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
11/14/2026 05:56:020/1/1050/0/0/0C_Weigh_Scale_130_CF421.0LBS3300OK
11/14/2026 05:56:020/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
11/14/2026 06:05:010/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher2.54LBS3300Lower Ctl Limit
11/14/2026 06:00:490/1/1046/0/0/0C_Weigh_Scale_138_C4F830.1LBS3300OK
11/14/2026 06:10:030/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane7.9LBS5300OK
11/14/2026 05:57:270/1/1045/0/0/0C_Weigh_Scale_138_HBr7.2LBS220OK
11/14/2026 06:10:030/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
11/14/2026 06:00:490/1/1046/0/0/1C_Weigh_Scale_138_SF635.8LBS3300OK
11/14/2026 05:57:270/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected0.0LBS0300OK
11/14/2026 05:57:470/1/1053/0/0/1C_Weigh_Scale_143A_C4F85.0LBS3300OK
11/14/2026 05:57:470/1/1053/0/0/0C_Weigh_Scale_143A_SF617.1LBS3300OK
11/14/2026 05:53:140/1/1052/0/0/0C_Weigh_Scale_152_Far C4F835.8LBS3300OK
11/14/2026 06:08:180/1/1047/0/0/1C_Weigh_Scale_152_Far_CF418.9LBS3300OK
11/14/2026 06:08:180/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF317.5LBS3300OK
11/14/2026 06:02:070/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F813.7LBS3300OK
11/14/2026 05:59:260/1/1043/0/0/1C_Weigh_Scale_152_Near_CF418.4LBS3300OK
11/14/2026 05:59:260/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF330.7LBS3300OK
11/14/2026 05:53:140/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
11/14/2026 06:00:400/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL34.08LBS3300OK
11/14/2026 06:02:380/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine13.15LBS5300OK
11/14/2026 06:04:320/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF417.10LBS3300OK
11/14/2026 06:02:070/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF611.24LBS3300OK
11/14/2026 06:00:400/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
11/14/2026 06:02:380/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0NodeID 0 PSI  No Data
 0/1/6006/0/0/0WDR 6006    No Data
 0/1/6007/0/0/0WDR 6007    No Data
 0/1/6008/0/0/0WDR 6008    No Data
 0/1/6009/0/0/0WGR 6009    No Data
 0/1/6011/0/0/0WGR 6011    No Data
10/15/2026 15:33:450/1/6013/0/0/1WTR 6013 CH2 Humidity (%)30.7(BLANK)3060Inactive
10/15/2026 15:33:450/1/6013/0/0/0WTR 6013 Temperature (F)-85.0(BLANK)5580Inactive
10/15/2026 11:31:500/1/6017/0/0/1WTR 6017 CH2 Humidity (%)-25.0(BLANK)3060Inactive
10/15/2026 11:31:500/1/6017/0/0/0WTR 6017_Temperature (F)63.2(BLANK)5580Inactive
 0/1/6018/0/0/0WTR 6018 V  No Data
 0/1/6018/0/0/1WTR 6018 CH2 V  No Data
 0/1/6019/0/0/0WTR 6019 V  No Data
 0/1/6019/0/0/1WTR 6019 CH2 V  No Data
 0/1/6021/0/0/0WTR 6021 V  No Data
 0/1/6021/0/0/1WTR 6021 CH2 V  No Data
10/14/2026 14:47:150/1/6022/0/0/0WTR 6022 (4-20mA) Temperature (F)-40.0(BLANK)5580Inactive
10/14/2026 14:47:150/1/6022/0/0/1WTR 6022 CH2 (4-20mA) Humidity%100.8(BLANK)3060Inactive
10/15/2026 15:53:580/1/6025/0/0/0WTR 6025 CH1 Temperature (F)27.437(BLANK)5580Inactive
10/15/2026 15:53:580/1/6025/0/0/1WTR 6025 CH2 Humidity (%)1,715.080(BLANK)3060Inactive
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data