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WGR Readings: 118 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
10/16/2025 14:30:043/1/4030/0/0/0_1st Flr: City Water Pressure61.4PSI4090Inactive
10/10/2025 22:36:034/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.7 7.59Inactive
10/17/2025 03:48:074/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
10/17/2025 03:28:464/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.815InH2O01.5OK
10/17/2025 03:46:524/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.356InH2O01OK
10/17/2025 03:45:094/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.114InH2O02OK
10/17/2025 03:43:174/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.230InH2O02OK
10/17/2025 02:59:414/1/5030/0/0/0_2nd Flr: Cool Fogger WDR10.1 0100Inactive
10/17/2025 03:38:094/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
10/17/2025 03:28:504/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 20.0On/Off02OK
10/17/2025 03:39:404/1/5034/0/0/0_2nd Flr: Rm 237 Haskris Chiller0.0On/Off02OK
10/17/2025 03:47:544/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
10/17/2025 03:45:534/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.43PSI0.81.75OK
10/17/2025 03:42:564/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow303.5PSI275800OK
09/21/2025 08:18:313/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad402.3 0800Inactive
10/17/2025 03:41:523/1/4101/0/0/0_CDA Pressure121.9PSI90140OK
10/17/2025 03:46:240/1/1201/0/0/0_Cleanroom: Equip RH40% / 70.3F38 / 6542 / 75OK
10/17/2025 03:39:410/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
10/17/2025 03:39:410/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
10/17/2025 03:37:284/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112588PSI4003000OK
10/17/2025 03:38:254/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010409PSI4003000OK
10/17/2025 03:37:170/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
10/17/2025 03:49:203/1/4032/0/0/0_DI-RO: Flow2.96GPM0100OK
10/17/2025 03:51:113/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
10/17/2025 03:37:283/1/4017/0/0/0_DI-RO: Resistivity Gauge #1817.9Ohm-cm14100OK
10/17/2025 03:47:533/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)6.27PSI410OK
10/17/2025 03:41:513/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)8.07PSI410OK
10/17/2025 03:44:250/1/1065/0/0/0_GPN2 Pressure Gauge After Filters118.0PSI0400OK
10/17/2025 03:47:523/1/4015/0/0/0_House Vacuum-26.10inHg-30-23OK
10/17/2025 03:48:203/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp60.3DEG F085OK
10/17/2025 03:49:513/1/4002/0/0/0_LN2_Tanks_LI-1-1157.1InH2O0300OK
10/17/2025 03:43:333/1/4004/0/0/0_LN2_Tanks_LI-1-2214.0InH2O0300OK
10/17/2025 03:50:303/1/4006/0/0/0_LN2_Tanks_LI-1-385.3InH2O0300OK
10/17/2025 03:43:543/1/4001/0/0/0_LN2_Tanks_PI-1-1121.5PSI0300OK
10/17/2025 03:45:243/1/4003/0/0/0_LN2_Tanks_PI-1-259.6PSI0300OK
10/17/2025 03:40:533/1/4005/0/0/0_LN2_Tanks_PI-1-3151.6PSI0300OK
10/17/2025 03:46:580/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
10/17/2025 03:41:593/1/4020/0/0/0_PCW: Lower Temp Gauge48.6DEG F057OK
10/17/2025 03:49:313/1/4009/0/0/0_PCW: Middle Pressure Gauge85.5PSI6794OK
10/17/2025 03:43:373/1/4008/0/0/0_PCW: Upper Temp Gauge57.0F0160OK
10/17/2025 03:41:310/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall112.7PSI0135OK
10/17/2025 03:42:550/1/1062/0/0/0_Tank 47 GPN2125.80PSI90400Error-28
10/17/2025 03:43:450/1/1064/0/0/0_Tank 47 UHPN2117.6PSI90400OK
10/17/2025 03:38:190/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters110.616PSI0125OK
10/17/2025 03:46:250/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882701PSI2002800OK
10/17/2025 03:50:090/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491105PSI2002800OK
10/17/2025 03:41:090/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052502001PSI3002800OK
10/17/2025 03:40:480/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089752PSI1501000OK
10/17/2025 03:44:530/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089644PSI2003000OK
10/17/2025 03:41:350/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090596PSI4003000OK
10/17/2025 03:43:180/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
10/17/2025 03:48:070/1/1022/0/0/0C_DDC_133_O2_1053752004PSI3002800OK
10/17/2025 03:48:440/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_308PSI3002800OK
10/17/2025 03:46:490/1/1003/0/0/0C_EX3_121_He_554PSI2002800OK
10/17/2025 03:38:550/1/1002/0/0/0C_EX6_102_He_NoPVS2465PSI2002800OK
10/17/2025 01:11:070/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS729PSI3002600Inactive
10/17/2025 03:44:460/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541689PSI3003000OK
10/17/2025 03:41:130/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050082050PSI2002800OK
10/17/2025 03:39:330/1/1008/0/0/0C_General Use ICP Etchers_126_He_105009443PSI2002800OK
10/17/2025 03:47:100/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
10/17/2025 03:44:590/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822075PSI2002800OK
10/17/2025 03:51:350/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284642PSI2002800OK
10/17/2025 03:38:090/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052532569PSI2002800OK
10/17/2025 03:44:440/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691620PSI2002800OK
10/17/2025 03:42:230/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270797PSI2002800OK
10/17/2025 03:38:040/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271294PSI140350OK
10/17/2025 03:41:580/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721705PSI2002800OK
10/17/2025 03:40:060/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O774PSI2003000OK
10/17/2025 03:36:560/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O16PSI525OK
10/17/2025 03:36:430/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601956PSI3504000OK
10/17/2025 03:47:320/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
10/17/2025 03:38:090/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS197PSI5003000Lower Ctl Limit
10/17/2025 03:41:130/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243954PSI2002800OK
10/17/2025 03:44:350/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661328PSI2004000OK
10/17/2025 03:42:340/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_1026139PSI5300OK
10/17/2025 03:42:550/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265525PSI2004000OK
10/17/2025 03:40:200/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS353PSI2003000OK
10/17/2025 03:38:350/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3614PSI1501500OK
10/17/2025 03:44:010/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092980PSI5003000OK
10/17/2025 03:51:180/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931933PSI5003000OK
10/17/2025 03:49:290/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
10/17/2025 03:48:100/1/1041/0/0/1C_Weigh_Scale_125_CCL2F217.7LBS5300OK
10/17/2025 03:48:100/1/1041/0/0/0C_Weigh_Scale_125_CF412.4LBS3300OK
10/17/2025 03:39:320/1/1040/0/0/0C_Weigh_Scale_125_CHF398.4LBS3300OK
10/17/2025 03:39:320/1/1040/0/0/1C_Weigh_Scale_125_SF6100.4LBS3300OK
10/17/2025 03:36:450/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
10/17/2025 03:36:450/1/1051/0/0/0C_Weigh_Scale_126_SF616.5LBS3300OK
10/17/2025 03:41:540/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
10/17/2025 03:40:250/1/1050/0/0/0C_Weigh_Scale_130_CF421.0LBS3300OK
10/17/2025 03:40:250/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
10/17/2025 03:41:540/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher27.2LBS3300OK
10/17/2025 03:49:450/1/1046/0/0/0C_Weigh_Scale_138_C4F82.7LBS3300Lower Ctl Limit
10/17/2025 03:50:530/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane9.1LBS5300OK
 0/1/1045/0/0/0C_Weigh_Scale_138_HBr LBS  No Data
10/17/2025 03:50:530/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
10/17/2025 03:49:450/1/1046/0/0/1C_Weigh_Scale_138_SF671.4LBS3300OK
 0/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected LBS  No Data
10/17/2025 03:37:110/1/1053/0/0/1C_Weigh_Scale_143A_C4F815.6LBS3300OK
10/17/2025 03:37:110/1/1053/0/0/0C_Weigh_Scale_143A_SF617.5LBS3300OK
10/17/2025 03:38:480/1/1052/0/0/0C_Weigh_Scale_152_Far C4F836.4LBS3300OK
10/17/2025 03:41:230/1/1047/0/0/1C_Weigh_Scale_152_Far_CF418.6LBS3300OK
10/17/2025 03:41:230/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF316.2LBS3300OK
10/17/2025 03:24:300/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F810.1LBS3300OK
10/17/2025 03:45:100/1/1043/0/0/1C_Weigh_Scale_152_Near_CF419.6LBS3300OK
10/17/2025 03:45:100/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF328.0LBS3300OK
10/17/2025 03:38:480/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
10/17/2025 03:49:050/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL36.6LBS3300OK
10/17/2025 03:45:200/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine8.8LBS5300OK
10/17/2025 03:49:290/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF478.3LBS3300OK
10/17/2025 03:24:300/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF628.7LBS3300OK
10/17/2025 03:45:200/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
10/17/2025 03:49:050/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
10/17/2025 03:46:370/1/1202/0/0/0High Precision Humidity Sensor_Not Installed40.3mAMPS0100OK
10/17/2025 03:46:370/1/1202/0/0/1High Precision Temperature Sensor_Not Installed70.9mAMPS0200OK
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data