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WGR Readings: 120 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
08/10/2026 15:18:363/1/4030/0/0/0_1st Flr: City Water Pressure61.9PSI4090OK
08/10/2026 15:02:344/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH0.4 7.59Lower Ctl Limit
08/06/2026 08:49:324/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02Inactive
08/10/2026 15:21:214/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.625InH2O01.5OK
08/10/2026 15:12:434/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.111InH2O01OK
08/10/2026 15:23:524/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.074InH2O02OK
08/10/2026 15:09:524/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.345InH2O02OK
08/10/2026 14:54:404/1/5030/0/0/0_2nd Flr: Cool Fogger WDR1.0 0100OK
08/10/2026 15:17:034/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
08/03/2026 12:30:514/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 21.0On/Off02Inactive
08/10/2026 15:18:074/1/5034/0/0/0_2nd Flr: Rm 237 Haskris Chiller0.0On/Off02OK
08/10/2026 15:11:054/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
08/10/2026 14:55:524/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic0.93PSI0.81.75OK
08/10/2026 15:23:484/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow201.8PSI275800Lower Ctl Limit
08/10/2026 15:21:053/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad51.1 0800OK
08/10/2026 15:17:503/1/4101/0/0/0_CDA Pressure123.4PSI90140OK
08/10/2026 15:11:290/1/1201/0/0/0_Cleanroom: Equip RH44% / 70.7F38 / 6542 / 75Upper Ctl Limit
08/10/2026 15:08:590/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
08/10/2026 15:08:590/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
08/10/2026 15:00:154/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112591PSI2003000OK
08/10/2026 15:23:404/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010380PSI2003000OK
08/10/2026 15:14:420/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
08/10/2026 15:13:243/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
08/10/2026 15:22:473/1/4017/0/0/0_DI-RO: Resistivity Gauge #1817.9Ohm-cm14100OK
08/10/2026 15:23:433/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)6.20PSI410OK
08/10/2026 15:23:323/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.87PSI410OK
08/06/2026 05:51:120/1/1065/0/0/0_GPN2 Pressure Gauge After Filters125.4PSI0400Inactive
08/10/2026 15:12:583/1/4015/0/0/0_House Vacuum-26.07inHg-30-23OK
08/10/2026 15:22:153/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp72.8DEG F085Error-27
08/10/2026 15:20:383/1/4002/0/0/0_LN2_Tanks_LI-1-1183.6InH2O0300OK
08/10/2026 15:21:173/1/4004/0/0/0_LN2_Tanks_LI-1-2241.6InH2O0300OK
08/10/2026 15:11:233/1/4006/0/0/0_LN2_Tanks_LI-1-397.9InH2O0300OK
08/10/2026 15:21:003/1/4001/0/0/0_LN2_Tanks_PI-1-1131.0PSI0300OK
08/10/2026 15:13:573/1/4003/0/0/0_LN2_Tanks_PI-1-255.7PSI0300OK
08/10/2026 15:09:093/1/4005/0/0/0_LN2_Tanks_PI-1-3150.9PSI0300OK
08/10/2026 15:16:580/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
08/10/2026 15:14:273/1/4020/0/0/0_PCW: Lower Temp Gauge58.4DEG F052Upper Ctl Limit
08/10/2026 15:16:513/1/4009/0/0/0_PCW: Middle Pressure Gauge82.0PSI6794OK
08/10/2026 15:14:563/1/4008/0/0/0_PCW: Upper Temp Gauge67.2F0160OK
08/10/2026 15:16:250/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall96.2PSI0135OK
08/10/2026 15:11:233/1/4032/0/0/0_RO: Flow to 2360.94GPM0100OK
08/10/2026 15:21:420/1/1062/0/0/0_Tank 47 GPN2124.91PSI90400OK
08/10/2026 14:59:120/1/1064/0/0/0_Tank 47 UHPN2120.9PSI90400OK
08/10/2026 15:14:240/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters114.369PSI0125OK
08/10/2026 15:20:110/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882689PSI2002800OK
08/10/2026 15:10:070/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491007PSI2002800OK
08/10/2026 15:20:320/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052502004PSI3002800OK
08/10/2026 15:22:150/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089747PSI1501000OK
08/10/2026 15:21:160/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089552PSI2003000OK
08/10/2026 15:22:240/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090627PSI4003000OK
08/10/2026 15:13:380/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
08/10/2026 15:21:550/1/1022/0/0/0C_DDC_133_O2_1053752004PSI3002800OK
08/10/2026 15:22:060/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_2012PSI3002800OK
 0/1/1204/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_Test  PSI  No Data
08/10/2026 15:11:030/1/1003/0/0/0C_EX3_121_He_462PSI2002800OK
08/10/2026 15:16:530/1/1002/0/0/0C_EX6_102_He_NoPVS2100PSI2002800OK
08/10/2026 15:21:080/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS291PSI3002600Lower Ctl Limit
08/10/2026 15:13:420/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541600PSI3003000OK
08/10/2026 15:13:300/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081899PSI2002800OK
08/10/2026 15:11:020/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091817PSI2002800OK
08/10/2026 15:10:130/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
08/10/2026 15:22:250/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822095PSI2002800OK
08/10/2026 15:22:170/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284564PSI2002800OK
08/10/2026 15:16:160/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052532274PSI2002800OK
08/10/2026 15:10:510/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691676PSI2002800OK
08/10/2026 15:10:380/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270722PSI2002800OK
08/10/2026 15:10:140/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271294PSI140350OK
08/10/2026 15:22:490/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721647PSI2002800OK
08/10/2026 15:18:160/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O774PSI2003000OK
08/10/2026 15:18:040/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O18PSI525OK
08/10/2026 15:20:170/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601825PSI3504000OK
08/10/2026 15:15:470/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
08/10/2026 15:15:280/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1722PSI5003000OK
08/10/2026 15:22:390/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243886PSI2002800OK
08/10/2026 15:21:290/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661287PSI2004000OK
08/10/2026 15:16:450/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261320PSI5300OK
08/10/2026 15:21:200/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265476PSI2004000OK
08/10/2026 15:16:130/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS338PSI2003000OK
08/10/2026 15:14:150/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3638PSI1501500OK
08/10/2026 15:12:330/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092976PSI5003000OK
08/10/2026 15:14:130/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020932081PSI5003000OK
08/10/2026 15:16:480/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
08/10/2026 15:18:010/1/1041/0/0/1C_Weigh_Scale_125_CCL2F217.8LBS5300OK
08/10/2026 15:18:010/1/1041/0/0/0C_Weigh_Scale_125_CF411.0LBS3300OK
08/10/2026 15:11:040/1/1040/0/0/0C_Weigh_Scale_125_CHF329.6LBS3300OK
08/10/2026 15:11:040/1/1040/0/0/1C_Weigh_Scale_125_SF639.5LBS3300OK
08/10/2026 15:07:580/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
08/10/2026 15:07:580/1/1051/0/0/0C_Weigh_Scale_126_SF6107.0LBS3300OK
08/10/2026 15:19:570/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
08/10/2026 15:23:430/1/1050/0/0/0C_Weigh_Scale_130_CF420.9LBS3300OK
08/10/2026 15:23:430/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
08/10/2026 15:19:570/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher10.9LBS3300OK
08/10/2026 15:22:010/1/1046/0/0/0C_Weigh_Scale_138_C4F827.5LBS3300OK
08/10/2026 15:21:240/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane20.8LBS5300OK
08/10/2026 15:14:440/1/1045/0/0/0C_Weigh_Scale_138_HBr15.7LBS220OK
08/10/2026 15:21:240/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
08/10/2026 15:22:010/1/1046/0/0/1C_Weigh_Scale_138_SF636.6LBS3300OK
08/10/2026 15:14:440/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected0.0LBS0300OK
08/10/2026 15:17:220/1/1053/0/0/1C_Weigh_Scale_143A_C4F810.0LBS3300OK
08/10/2026 15:17:220/1/1053/0/0/0C_Weigh_Scale_143A_SF631.4LBS3300OK
08/10/2026 15:16:490/1/1052/0/0/0C_Weigh_Scale_152_Far C4F835.5LBS3300OK
08/10/2026 15:23:100/1/1047/0/0/1C_Weigh_Scale_152_Far_CF418.1LBS3300OK
08/10/2026 15:23:100/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF333.1LBS3300OK
08/10/2026 15:19:360/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F828.4LBS3300OK
08/10/2026 14:55:010/1/1043/0/0/1C_Weigh_Scale_152_Near_CF441.2LBS3300OK
08/10/2026 14:55:010/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF345.0LBS3300OK
08/10/2026 15:16:490/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
08/10/2026 15:23:340/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL315.2LBS3300OK
08/10/2026 15:13:270/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine67.6LBS5300OK
08/10/2026 15:16:480/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF4114.0LBS3300OK
08/10/2026 15:19:360/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF649.7LBS3300OK
08/10/2026 15:13:270/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
08/10/2026 15:23:340/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/2815/0/0/0G1-2815_Test PSI  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data