WGR/WTR Readings

09/01/2026 04:19:32

3/1/4030/0/0/0

_1st Flr: City Water Pressure

69.2

PSI

40

90

OK

08/31/2026 17:25:55

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

0.4

7.5

9

Inactive

09/01/2026 04:26:06

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

OK

09/01/2026 01:59:27

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.510

InH2O

0

1.5

Inactive

09/01/2026 02:57:19

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.122

InH2O

0

1

Inactive

09/01/2026 03:23:08

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.064

InH2O

0

2

Inactive

09/01/2026 04:19:30

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.295

InH2O

0

2

OK

08/14/2026 09:43:29

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

0.1

0

100

Inactive

09/01/2026 04:15:11

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

1.0

On/Off

0

2

OK

08/31/2026 15:10:16

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2

1.0

On/Off

0

2

Inactive

09/01/2026 04:22:45

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

09/01/2026 04:31:01

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

1.52

PSI

0.8

1.75

OK

09/01/2026 04:25:28

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

337.7

PSI

275

800

OK

09/01/2026 04:24:36

4/1/5034/0/0/0

_ASML: Proc Gas Fault Alarm

5.2

ON/OFF

4

6

OK

09/01/2026 04:24:57

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

1.5

0

800

OK

09/01/2026 04:18:10

3/1/4101/0/0/0

_CDA Pressure

119.6

PSI

90

140

OK

09/01/2026 04:17:00

0/1/1201/0/0/0

_Cleanroom: Equip RH

41% / 70.5

F

38 / 65

42 / 75

OK

09/01/2026 04:24:00

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

1.0

On/Off

0

2

OK

09/01/2026 04:24:00

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

09/01/2026 04:26:18

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2594

PSI

200

3000

OK

09/01/2026 04:26:22

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

365

PSI

200

3000

OK

09/01/2026 04:20:18

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

09/01/2026 04:29:28

3/1/4031/0/0/0

_DI-RO: Light Sensor

0.0

On/Off

0

2

OK

09/01/2026 04:20:11

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

15.0

Ohm-cm

14

100

OK

09/01/2026 04:17:01

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

6.20

PSI

4

10

OK

09/01/2026 04:16:43

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

8.07

PSI

4

10

OK

09/01/2026 04:05:33

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

107.2

PSI

0

400

OK

09/01/2026 04:22:24

3/1/4015/0/0/0

_House Vacuum

-24.50

inHg

-30

-23

OK

09/01/2026 04:27:34

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

63.1

DEG F

0

85

OK

09/01/2026 04:27:35

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

203.6

InH2O

0

300

OK

09/01/2026 04:28:56

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

243.3

InH2O

0

300

OK

09/01/2026 04:25:35

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

115.6

InH2O

0

300

OK

09/01/2026 04:22:23

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

114.3

PSI

0

300

OK

09/01/2026 04:21:08

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

58.9

PSI

0

300

OK

09/01/2026 04:26:23

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

152.2

PSI

0

300

OK

09/01/2026 04:18:53

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

97.8

PSI

0

110

OK

09/01/2026 04:24:17

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

52.0

DEG F

0

52

OK

09/01/2026 04:19:19

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

82.8

PSI

67

94

OK

09/01/2026 04:18:42

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

55.8

F

0

160

OK

09/01/2026 04:29:04

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

97.1

PSI

0

135

OK

09/01/2026 04:24:20

3/1/4032/0/0/0

_RO: Flow to 236

1.13

GPM

0

100

OK

09/01/2026 04:00:40

0/1/1062/0/0/0

_Tank 47 GPN2

129.37

PSI

90

400

Error-28

09/01/2026 04:06:16

0/1/1064/0/0/0

_Tank 47 UHPN2

109.5

PSI

90

400

OK

09/01/2026 04:22:52

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

100.508

PSI

0

125

OK

09/01/2026 04:17:56

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2669

PSI

200

2800

OK

09/01/2026 04:03:48

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1016

PSI

200

2800

OK

09/01/2026 04:30:39

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

2001

PSI

300

2800

OK

09/01/2026 04:22:35

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

675

PSI

150

1000

OK

09/01/2026 04:31:02

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

556

PSI

200

3000

OK

09/01/2026 04:23:23

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

598

PSI

400

3000

OK

09/01/2026 04:31:02

0/1/1021/0/0/0

C_DDC_133_CO2_105376

820

PSI

350

2800

OK

09/01/2026 04:30:12

0/1/1022/0/0/0

C_DDC_133_O2_105375

1999

PSI

300

2800

OK

09/01/2026 04:28:27

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

2014

PSI

300

2800

OK

09/01/2026 04:23:39

0/1/1003/0/0/0

C_EX3_121_He_

455

PSI

200

2800

OK

09/01/2026 04:24:28

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

2097

PSI

200

2800

OK

09/01/2026 04:18:22

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

253

PSI

300

2600

Lower Ctl Limit

09/01/2026 04:21:31

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1564

PSI

300

3000

OK

09/01/2026 04:19:47

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

1899

PSI

200

2800

OK

09/01/2026 04:28:17

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

1788

PSI

200

2800

OK

09/01/2026 04:26:50

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

991

PSI

200

2800

OK

09/01/2026 04:29:22

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2088

PSI

200

2800

OK

09/01/2026 04:17:22

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

580

PSI

200

2800

OK

09/01/2026 04:20:21

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

2140

PSI

200

2800

OK

09/01/2026 04:19:10

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1676

PSI

200

2800

OK

09/01/2026 04:26:38

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

711

PSI

200

2800

OK

09/01/2026 04:17:31

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

291

PSI

140

350

OK

09/01/2026 04:29:44

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1618

PSI

200

2800

OK

09/01/2026 04:20:49

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

785

PSI

200

3000

OK

09/01/2026 04:16:51

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

19

PSI

5

25

OK

09/01/2026 04:19:48

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

1837

PSI

350

4000

OK

09/01/2026 04:16:50

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1600

PSI

200

4000

OK

09/01/2026 04:31:38

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

1719

PSI

500

3000

OK

09/01/2026 04:27:55

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

883

PSI

200

2800

OK

09/01/2026 04:30:39

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1299

PSI

200

4000

OK

09/01/2026 04:16:47

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

15

PSI

5

300

OK

09/01/2026 04:30:14

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

479

PSI

200

4000

OK

09/01/2026 04:28:50

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

219

PSI

200

3000

OK

09/01/2026 04:29:47

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

634

PSI

150

1500

OK

09/01/2026 04:22:12

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

980

PSI

500

3000

OK

09/01/2026 04:20:31

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

1964

PSI

500

3000

OK

09/01/2026 04:30:51

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

OK

09/01/2026 04:26:33

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

17.9

LBS

5

300

OK

09/01/2026 04:26:33

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

11.1

LBS

3

300

OK

09/01/2026 04:28:00

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

29.9

LBS

3

300

OK

09/01/2026 04:28:00

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

39.0

LBS

3

300

OK

09/01/2026 04:30:47

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

09/01/2026 04:30:47

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

10.93

LBS

3

300

OK

09/01/2026 04:24:36

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

09/01/2026 04:21:16

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

20.9

LBS

3

300

OK

09/01/2026 04:21:16

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.1

LBS

0

300

OK

09/01/2026 04:24:36

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

11.0

LBS

3

300

OK

09/01/2026 04:19:40

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

27.4

LBS

3

300

OK

09/01/2026 04:29:09

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

19.4

LBS

5

300

OK

09/01/2026 04:25:42

0/1/1045/0/0/0

C_Weigh_Scale_138_HBr

7.9

LBS

2

20

OK

09/01/2026 04:29:09

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

09/01/2026 04:19:40

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

38.7

LBS

3

300

OK

09/01/2026 04:25:42

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

0.0

LBS

0

300

OK

09/01/2026 04:23:47

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

9.8

LBS

3

300

OK

09/01/2026 04:23:47

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

30.8

LBS

3

300

OK

09/01/2026 03:40:54

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

37.5

LBS

3

300

OK

09/01/2026 04:21:45

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

25.1

LBS

3

300

OK

09/01/2026 04:21:45

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

38.0

LBS

3

300

OK

09/01/2026 04:26:35

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

30.0

LBS

3

300

OK

09/01/2026 04:25:10

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

48.2

LBS

3

300

OK

09/01/2026 04:25:10

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

50.6

LBS

3

300

OK

09/01/2026 03:40:54

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

09/01/2026 04:19:25

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

16.1

LBS

3

300

OK

09/01/2026 04:28:06

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

78.1

LBS

5

300

OK

09/01/2026 04:30:51

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

119.7

LBS

3

300

OK

09/01/2026 04:26:35

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

51.7

LBS

3

300

OK

09/01/2026 04:19:25

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

09/01/2026 04:28:06

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

mAMPS

No Data

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

mAMPS

No Data

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data