WGR/WTR Readings

04/16/2026 05:09:57

3/1/4030/0/0/0

_1st Flr: City Water Pressure

56.6

PSI

40

90

OK

03/17/2026 18:29:25

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

8.9

7.5

9

Inactive

02/15/2026 22:44:47

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

Inactive

04/08/2026 04:16:30

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.600

InH2O

0

1.5

Inactive

04/16/2026 05:07:55

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.100

InH2O

0

1

OK

04/07/2026 07:11:10

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.074

InH2O

0

2

Inactive

04/16/2026 05:04:54

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.285

InH2O

0

2

OK

02/04/2026 23:05:55

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

99.1

0

100

Inactive

04/16/2026 05:00:07

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

0.0

On/Off

0

2

OK

04/16/2026 05:02:48

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2

0.0

On/Off

0

2

OK

04/16/2026 05:03:46

4/1/5034/0/0/0

_2nd Flr: Rm 237 Haskris Chiller

0.0

On/Off

0

2

OK

04/16/2026 05:06:10

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

04/16/2026 04:57:11

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

1.27

PSI

0.8

1.75

OK

03/08/2026 21:57:51

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

301.1

PSI

275

800

Inactive

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

No Data

04/16/2026 05:09:41

3/1/4101/0/0/0

_CDA Pressure

125.2

PSI

90

140

OK

04/16/2026 05:00:21

0/1/1201/0/0/0

_Cleanroom: Equip RH

42% / 70.3

F

38 / 65

42 / 75

OK

04/16/2026 04:49:30

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

1.0

On/Off

0

2

OK

04/16/2026 04:49:30

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

04/16/2026 05:09:24

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2588

PSI

200

3000

OK

04/16/2026 05:03:54

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

383

PSI

200

3000

OK

04/16/2026 04:57:50

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

04/16/2026 04:58:38

3/1/4032/0/0/0

_DI-RO: Flow

1.02

GPM

0

100

OK

04/16/2026 05:01:25

3/1/4031/0/0/0

_DI-RO: Light Sensor

0.0

On/Off

0

2

OK

04/16/2026 04:58:55

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

17.9

Ohm-cm

14

100

OK

04/16/2026 05:01:06

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

6.20

PSI

4

10

OK

04/16/2026 04:54:11

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

7.99

PSI

4

10

OK

04/16/2026 04:53:52

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

126.0

PSI

0

400

OK

04/16/2026 05:06:43

3/1/4015/0/0/0

_House Vacuum

-26.30

inHg

-30

-23

OK

04/16/2026 04:59:20

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

58.4

DEG F

0

85

OK

04/16/2026 04:58:07

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

206.2

InH2O

0

300

OK

04/16/2026 04:56:13

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

238.7

InH2O

0

300

OK

04/16/2026 05:06:25

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

116.9

InH2O

0

300

OK

04/16/2026 05:09:01

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

128.4

PSI

0

300

OK

04/16/2026 04:57:07

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

56.8

PSI

0

300

OK

01/10/2026 22:46:50

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

152.0

PSI

0

300

Inactive

04/16/2026 05:09:25

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

99.5

PSI

0

110

OK

04/16/2026 05:03:28

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

49.4

DEG F

0

57

OK

04/16/2026 05:06:10

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

82.4

PSI

67

94

OK

04/16/2026 04:59:17

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

57.0

F

0

160

OK

04/16/2026 05:07:00

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

118.8

PSI

0

135

OK

04/16/2026 05:04:25

0/1/1062/0/0/0

_Tank 47 GPN2

128.33

PSI

90

400

OK

04/16/2026 04:56:36

0/1/1064/0/0/0

_Tank 47 UHPN2

117.9

PSI

90

400

OK

04/16/2026 05:01:19

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

112.636

PSI

0

125

OK

04/16/2026 05:10:55

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2689

PSI

200

2800

OK

04/16/2026 05:01:11

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1061

PSI

200

2800

OK

04/16/2026 05:08:38

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

1990

PSI

300

2800

OK

04/16/2026 05:06:36

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

700

PSI

150

1000

OK

04/16/2026 05:07:00

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

576

PSI

200

3000

OK

04/16/2026 05:03:14

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

604

PSI

400

3000

OK

04/16/2026 05:06:22

0/1/1021/0/0/0

C_DDC_133_CO2_105376

825

PSI

350

2800

OK

04/16/2026 04:57:31

0/1/1022/0/0/0

C_DDC_133_O2_105375

2004

PSI

300

2800

OK

04/16/2026 05:06:10

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

232

PSI

300

2800

Lower Ctl Limit

04/16/2026 05:05:32

0/1/1003/0/0/0

C_EX3_121_He_

499

PSI

200

2800

OK

04/16/2026 05:05:04

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

2245

PSI

200

2800

OK

04/16/2026 04:56:20

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

506

PSI

300

2600

OK

04/16/2026 05:10:07

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1689

PSI

300

3000

OK

04/16/2026 05:05:20

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

1959

PSI

200

2800

OK

04/16/2026 05:01:24

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

2107

PSI

200

2800

OK

04/16/2026 05:03:37

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

1003

PSI

200

2800

OK

04/16/2026 05:06:01

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2090

PSI

200

2800

OK

04/16/2026 05:05:53

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

569

PSI

200

2800

OK

04/16/2026 04:56:18

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

2552

PSI

200

2800

OK

04/16/2026 05:04:04

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1664

PSI

200

2800

OK

04/16/2026 04:56:16

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

771

PSI

200

2800

OK

04/16/2026 04:58:12

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

294

PSI

140

350

OK

04/16/2026 05:06:52

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1647

PSI

200

2800

OK

04/16/2026 05:02:48

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

774

PSI

200

3000

OK

04/16/2026 05:07:17

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

18

PSI

5

25

OK

04/16/2026 05:06:36

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

1879

PSI

350

4000

OK

04/16/2026 05:10:43

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1632

PSI

200

4000

OK

04/16/2026 05:04:16

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

1789

PSI

500

3000

OK

04/16/2026 05:03:47

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

903

PSI

200

2800

OK

04/16/2026 05:03:44

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1281

PSI

200

4000

OK

04/16/2026 05:10:51

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

18

PSI

5

300

OK

04/16/2026 05:00:29

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

485

PSI

200

4000

OK

04/16/2026 05:02:34

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

361

PSI

200

3000

OK

04/16/2026 04:59:01

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

623

PSI

150

1500

OK

04/16/2026 05:09:00

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

987

PSI

500

3000

Error-27

04/16/2026 05:02:26

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

1922

PSI

500

3000

OK

02/21/2026 07:36:29

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

Inactive

04/16/2026 04:40:53

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

19.1

LBS

5

300

OK

04/16/2026 04:40:53

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

11.8

LBS

3

300

OK

04/16/2026 04:45:00

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

30.7

LBS

3

300

OK

04/16/2026 04:45:00

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

40.2

LBS

3

300

OK

04/16/2026 04:57:00

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

04/16/2026 04:57:00

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

12.8

LBS

3

300

OK

04/16/2026 05:00:43

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

04/16/2026 05:02:44

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

21.2

LBS

3

300

OK

04/16/2026 05:02:44

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.2

LBS

0

300

OK

04/16/2026 05:00:43

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

11.7

LBS

3

300

OK

04/16/2026 04:55:53

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

29.9

LBS

3

300

OK

04/16/2026 05:06:55

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

5.4

LBS

5

300

OK

0/1/1045/0/0/0

C_Weigh_Scale_138_HBr

LBS

No Data

04/16/2026 05:06:55

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

04/16/2026 04:55:53

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

19.5

LBS

3

300

OK

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

LBS

No Data

04/16/2026 05:02:25

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

14.3

LBS

3

300

OK

04/16/2026 05:02:25

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

11.7

LBS

3

300

OK

04/16/2026 05:04:45

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

36.4

LBS

3

300

OK

04/16/2026 05:03:32

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

13.0

LBS

3

300

OK

04/16/2026 05:03:32

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

15.7

LBS

3

300

OK

04/16/2026 04:58:56

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

38.9

LBS

3

300

OK

04/16/2026 05:01:51

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

18.1

LBS

3

300

OK

04/16/2026 05:01:51

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

28.1

LBS

3

300

OK

04/16/2026 05:04:45

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

04/16/2026 05:05:56

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

6.2

LBS

3

300

OK

04/16/2026 05:02:59

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

7.7

LBS

5

300

OK

02/21/2026 07:36:29

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

17.8

LBS

3

300

Inactive

04/16/2026 04:58:56

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

29.7

LBS

3

300

OK

04/16/2026 05:02:59

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

04/16/2026 05:05:56

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

12/05/2025 10:51:34

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

-25.0

mAMPS

0

100

Inactive

12/05/2025 10:51:34

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

72.7

mAMPS

0

200

Inactive

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data