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WGR Readings: 118 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
06/27/2026 02:26:453/1/4030/0/0/0_1st Flr: City Water Pressure69.2PSI4090OK
06/27/2026 02:39:324/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH0.1 7.59Lower Ctl Limit
02/15/2026 22:44:474/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02Inactive
06/27/2026 02:30:024/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.835InH2O01.5OK
06/27/2026 02:40:104/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.122InH2O01OK
06/27/2026 02:35:354/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.074InH2O02OK
06/27/2026 02:40:234/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.335InH2O02OK
02/04/2026 23:05:554/1/5030/0/0/0_2nd Flr: Cool Fogger WDR99.1 0100Inactive
06/27/2026 02:34:574/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
06/27/2026 02:41:304/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 20.0On/Off02OK
06/27/2026 02:37:204/1/5034/0/0/0_2nd Flr: Rm 237 Haskris Chiller0.0On/Off02OK
06/27/2026 02:43:544/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
06/27/2026 02:33:344/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.06PSI0.81.75OK
06/27/2026 02:41:454/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow357.2PSI275800OK
 3/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad    No Data
06/27/2026 02:43:073/1/4101/0/0/0_CDA Pressure118.7PSI90140OK
06/27/2026 02:42:470/1/1201/0/0/0_Cleanroom: Equip RH42% / 70.5F38 / 6542 / 75OK
06/27/2026 02:48:110/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
06/27/2026 02:48:110/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
06/27/2026 02:39:564/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112580PSI2003000OK
06/27/2026 02:00:384/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010380PSI2003000OK
06/27/2026 02:35:190/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
06/27/2026 02:35:523/1/4032/0/0/0_DI-RO: Flow-9.52GPM0100Lower Ctl Limit
06/27/2026 02:34:543/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
06/27/2026 02:47:073/1/4017/0/0/0_DI-RO: Resistivity Gauge #1817.9Ohm-cm14100OK
06/27/2026 02:37:463/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)6.44PSI410OK
06/27/2026 02:46:553/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.66PSI410OK
06/27/2026 02:22:360/1/1065/0/0/0_GPN2 Pressure Gauge After Filters124.8PSI0400OK
06/27/2026 02:47:523/1/4015/0/0/0_House Vacuum-26.13inHg-30-23OK
06/27/2026 02:46:183/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp64.3DEG F085OK
06/27/2026 02:46:003/1/4002/0/0/0_LN2_Tanks_LI-1-1177.8InH2O0300OK
06/27/2026 02:39:193/1/4004/0/0/0_LN2_Tanks_LI-1-2177.8InH2O0300OK
05/28/2026 00:03:213/1/4006/0/0/0_LN2_Tanks_LI-1-3112.0InH2O0300Inactive
06/27/2026 02:43:253/1/4001/0/0/0_LN2_Tanks_PI-1-1127.7PSI0300OK
06/27/2026 02:33:393/1/4003/0/0/0_LN2_Tanks_PI-1-257.8PSI0300OK
01/10/2026 22:46:503/1/4005/0/0/0_LN2_Tanks_PI-1-3152.0PSI0300Inactive
06/27/2026 02:44:120/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
06/27/2026 02:42:283/1/4020/0/0/0_PCW: Lower Temp Gauge49.4DEG F057OK
06/27/2026 02:41:243/1/4009/0/0/0_PCW: Middle Pressure Gauge82.4PSI6794OK
06/27/2026 02:44:583/1/4008/0/0/0_PCW: Upper Temp Gauge57.3F0160OK
06/27/2026 02:42:120/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall116.6PSI0135OK
06/27/2026 02:34:160/1/1062/0/0/0_Tank 47 GPN2125.35PSI90400OK
06/27/2026 02:35:360/1/1064/0/0/0_Tank 47 UHPN2117.6PSI90400OK
06/27/2026 02:31:560/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters112.056PSI0125OK
06/27/2026 02:44:070/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882669PSI2002800OK
06/27/2026 02:46:020/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491031PSI2002800OK
06/27/2026 02:42:530/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052502001PSI3002800OK
06/27/2026 02:43:160/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089708PSI1501000OK
06/27/2026 02:16:090/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089552PSI2003000OK
06/27/2026 02:45:420/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090607PSI4003000OK
06/27/2026 02:38:020/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
06/27/2026 02:47:060/1/1022/0/0/0C_DDC_133_O2_1053752004PSI3002800OK
06/27/2026 02:45:530/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_193PSI3002800Lower Ctl Limit
06/27/2026 02:37:400/1/1003/0/0/0C_EX3_121_He_493PSI2002800OK
06/27/2026 02:40:270/1/1002/0/0/0C_EX6_102_He_NoPVS2147PSI2002800OK
06/27/2026 02:42:250/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS360PSI3002600OK
06/27/2026 02:38:220/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541600PSI3003000OK
06/27/2026 02:38:530/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081929PSI2002800OK
06/27/2026 02:34:370/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091987PSI2002800OK
06/27/2026 02:35:050/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
06/27/2026 02:37:090/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822095PSI2002800OK
06/27/2026 02:38:220/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284569PSI2002800OK
06/27/2026 02:43:010/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052532432PSI2002800OK
06/27/2026 02:36:220/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691685PSI2002800OK
06/27/2026 02:42:300/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270754PSI2002800OK
06/27/2026 02:34:060/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271303PSI140350OK
06/27/2026 02:38:500/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721618PSI2002800OK
06/27/2026 02:43:130/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O774PSI2003000OK
06/27/2026 02:47:270/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O18PSI525OK
06/27/2026 02:46:090/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601825PSI3504000OK
06/27/2026 02:42:510/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591632PSI2004000OK
06/27/2026 02:37:400/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1751PSI5003000OK
06/27/2026 02:47:420/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243903PSI2002800OK
06/27/2026 02:35:050/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661287PSI2004000OK
06/27/2026 02:46:330/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261315PSI5300OK
06/27/2026 02:34:260/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265485PSI2004000OK
06/27/2026 02:46:080/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS338PSI2003000OK
06/27/2026 02:38:430/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3631PSI1501500OK
06/27/2026 02:38:180/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092974PSI5003000OK
06/27/2026 02:37:460/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931957PSI5003000OK
02/21/2026 07:36:290/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300Inactive
06/27/2026 02:35:050/1/1041/0/0/1C_Weigh_Scale_125_CCL2F219.1LBS5300OK
06/27/2026 02:35:050/1/1041/0/0/0C_Weigh_Scale_125_CF411.4LBS3300OK
06/27/2026 02:42:060/1/1040/0/0/0C_Weigh_Scale_125_CHF331.9LBS3300OK
06/27/2026 02:42:060/1/1040/0/0/1C_Weigh_Scale_125_SF639.6LBS3300OK
06/27/2026 02:42:100/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
06/27/2026 02:42:100/1/1051/0/0/0C_Weigh_Scale_126_SF611.7LBS3300OK
06/27/2026 02:45:130/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
06/27/2026 02:44:160/1/1050/0/0/0C_Weigh_Scale_130_CF421.2LBS3300OK
06/27/2026 02:44:160/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
06/27/2026 02:45:130/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher5.9LBS3300OK
06/27/2026 02:44:450/1/1046/0/0/0C_Weigh_Scale_138_C4F829.1LBS3300OK
06/27/2026 02:33:240/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane12.5LBS5300OK
 0/1/1045/0/0/0C_Weigh_Scale_138_HBr LBS  No Data
06/27/2026 02:33:240/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
06/27/2026 02:44:450/1/1046/0/0/1C_Weigh_Scale_138_SF619.9LBS3300OK
 0/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected LBS  No Data
06/27/2026 02:34:350/1/1053/0/0/1C_Weigh_Scale_143A_C4F811.0LBS3300OK
06/27/2026 02:34:350/1/1053/0/0/0C_Weigh_Scale_143A_SF634.6LBS3300OK
06/27/2026 02:42:280/1/1052/0/0/0C_Weigh_Scale_152_Far C4F836.0LBS3300OK
06/27/2026 02:47:280/1/1047/0/0/1C_Weigh_Scale_152_Far_CF413.8LBS3300OK
06/27/2026 02:47:280/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF315.2LBS3300OK
06/27/2026 02:43:130/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F831.0LBS3300OK
06/27/2026 02:45:270/1/1043/0/0/1C_Weigh_Scale_152_Near_CF420.1LBS3300OK
06/27/2026 02:45:270/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF327.6LBS3300OK
06/27/2026 02:42:280/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
06/27/2026 02:42:320/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL35.9LBS3300OK
06/27/2026 02:36:060/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine7.8LBS5300OK
02/21/2026 07:36:290/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF417.8LBS3300Inactive
06/27/2026 02:43:130/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF625.8LBS3300OK
06/27/2026 02:36:060/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
06/27/2026 02:42:320/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data