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WGR Readings: 155 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
11/04/2026 02:51:563/1/4030/0/0/0_1st Flr: City Water Pressure69.1PSI4090OK
11/03/2026 11:11:434/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.3 7.59Inactive
11/04/2026 02:43:424/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
11/02/2026 13:31:284/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.475InH2O01.5Inactive
11/04/2026 01:50:084/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.167InH2O01Inactive
11/04/2026 02:53:074/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.064InH2O02OK
11/04/2026 02:44:304/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.245InH2O02OK
08/14/2026 09:43:294/1/5030/0/0/0_2nd Flr: Cool Fogger WDR0.1 0100Inactive
09/30/2026 02:39:314/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02Inactive
11/04/2026 02:37:024/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
11/04/2026 02:49:454/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.53PSI0.81.75OK
11/03/2026 23:46:174/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow381.5PSI275800Inactive
11/04/2026 02:47:123/1/4017/0/0/0_ASML: ArXeNe Gas2,397.8PSI2002800OK
11/04/2026 02:44:494/1/5034/0/0/0_ASML: Proc Gas Fault Alarm1.0On/Off0.51.2OK
11/04/2026 02:46:533/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad1.1 0800OK
09/28/2026 23:41:013/1/4101/0/0/0_CDA Pressure130.0PSI90140Inactive
11/04/2026 02:44:250/1/1201/0/0/0_Cleanroom: Equip RH41% / 70.3F38 / 6542 / 75OK
11/04/2026 02:42:310/1/6003/0/0/1_Cleanroom: Rm 101_Humidity (%)51.0(BLANK)3060OK
11/04/2026 02:42:310/1/6003/0/0/0_Cleanroom: Rm 101_Temperature (F)67.7(BLANK)5580OK
11/04/2026 02:46:420/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
11/04/2026 02:46:420/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
11/03/2026 16:15:314/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112583PSI2003000Inactive
11/04/2026 02:33:354/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010354PSI2003000OK
11/04/2026 02:53:050/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
11/04/2026 02:45:010/1/6004/0/0/1_Cleanroom: Rm 134_Humidity (%)48.5(BLANK)3060OK
11/04/2026 02:45:010/1/6004/0/0/0_Cleanroom: Rm 134_Temperature (F)68.9(BLANK)5580OK
11/04/2026 02:42:240/1/6005/0/0/1_Cleanroom: Rm 136_Humidity (%)48.1(BLANK)3060OK
11/04/2026 02:42:240/1/6005/0/0/0_Cleanroom: Rm 136_Temperature (F)70.5(BLANK)5580OK
11/04/2026 02:41:520/1/6001/0/0/1_Cleanroom: Rm 147_Humidity (%)52.2(BLANK)3060OK
11/04/2026 02:41:520/1/6001/0/0/0_Cleanroom: Rm 147_Temperature (F)67.2(BLANK)5580OK
11/04/2026 02:47:190/1/6002/0/0/1_Cleanroom: Rm 153_Humidity (%)58.6(BLANK)3060OK
11/04/2026 02:47:190/1/6002/0/0/0_Cleanroom: Rm 153_Temperature (F)62.1(BLANK)5580OK
10/22/2026 15:15:470/1/6014/0/0/1_Cleanroom: Rm XXX RH (%)-25.0(BLANK)3060Inactive
10/27/2026 11:42:490/1/6015/0/0/1_Cleanroom: Rm XXX RH (%)-24.8(BLANK)3060Inactive
10/27/2026 11:46:000/1/6016/0/0/1_Cleanroom: Rm XXX RH (%)-25.0(BLANK)3060Inactive
10/22/2026 15:15:470/1/6014/0/0/0_Cleanroom: Rm XXX Temperature (F)-85.0(BLANK)5580Inactive
10/27/2026 11:42:490/1/6015/0/0/0_Cleanroom: Rm XXX Temperature (F)-84.6(BLANK)5580Inactive
10/27/2026 11:46:000/1/6016/0/0/0_Cleanroom: Rm XXX Temperature (F)-85.0(BLANK)5580Inactive
11/04/2026 02:47:273/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
11/04/2026 02:53:393/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)5.90PSI410OK
11/04/2026 02:53:283/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.59PSI410OK
11/04/2026 02:43:350/1/1065/0/0/0_GPN2 Pressure Gauge After Filters124.8PSI0400OK
11/04/2026 02:40:273/1/4015/0/0/0_House Vacuum-25.90inHg-30-23OK
11/04/2026 02:53:563/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp61.5DEG F085OK
11/04/2026 02:54:503/1/4002/0/0/0_LN2_Tanks_LI-1-1212.7InH2O0300OK
11/04/2026 02:42:433/1/4004/0/0/0_LN2_Tanks_LI-1-2182.2InH2O0300OK
11/04/2026 02:40:303/1/4006/0/0/0_LN2_Tanks_LI-1-3112.7InH2O0300OK
11/04/2026 02:49:243/1/4001/0/0/0_LN2_Tanks_PI-1-1136.8PSI118300OK
11/04/2026 02:48:263/1/4003/0/0/0_LN2_Tanks_PI-1-258.9PSI0300OK
11/04/2026 02:40:223/1/4005/0/0/0_LN2_Tanks_PI-1-3152.2PSI118300OK
11/04/2026 02:42:210/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
11/04/2026 02:44:503/1/4020/0/0/0_PCW: Lower Temp Gauge51.5DEG F052OK
11/04/2026 02:45:333/1/4009/0/0/0_PCW: Middle Pressure Gauge83.3PSI6794OK
11/04/2026 02:48:153/1/4008/0/0/0_PCW: Upper Temp Gauge55.8F0160OK
11/04/2026 02:48:280/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall115.0PSI0135OK
11/04/2026 02:47:323/1/4032/0/0/0_RO: Flow to 2361.28GPM0100OK
11/04/2026 02:53:310/1/1062/0/0/0_Tank 47 GPN2128.03PSI90400OK
11/04/2026 02:41:260/1/1064/0/0/0_Tank 47 UHPN2117.6PSI90400OK
10/13/2026 13:05:000/1/6023/0/0/1_TEST: Rm XXX RH (%) Test5.205(BLANK)3060Inactive
10/13/2026 13:05:000/1/6023/0/0/0_TEST: Rm XXX Temperature (F)76.7(BLANK)5580Inactive
11/04/2026 02:49:060/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters112.923PSI0125OK
11/04/2026 02:52:470/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882669PSI2002800OK
11/04/2026 02:51:190/1/1012/0/0/0C_AJACovaporator_129_Ar_105249990PSI2002800OK
11/04/2026 02:33:540/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052501975PSI3002800OK
11/04/2026 02:34:170/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089638PSI1501000OK
11/04/2026 02:40:370/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089541PSI2003000OK
11/04/2026 02:45:160/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090573PSI4003000OK
11/04/2026 02:50:530/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
11/04/2026 02:48:230/1/1022/0/0/0C_DDC_133_O2_1053751987PSI3002800OK
11/04/2026 02:52:210/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_1980PSI3002800OK
11/04/2026 02:48:270/1/1003/0/0/0C_EX3_121_He_451PSI2002800OK
11/04/2026 02:44:520/1/1002/0/0/0C_EX6_102_He_NoPVS2055PSI2002800OK
11/04/2026 02:54:210/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS143PSI3002600Lower Ctl Limit
11/04/2026 02:43:180/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_105254234PSI3003000Lower Ctl Limit
11/04/2026 02:40:440/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081899PSI2002800OK
11/04/2026 02:50:160/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091673PSI2002800OK
11/04/2026 02:47:280/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
11/04/2026 02:47:390/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822095PSI2002800OK
11/04/2026 02:48:130/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284571PSI2002800OK
11/04/2026 02:53:240/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_105253152PSI2002800Lower Ctl Limit
11/04/2026 02:52:170/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691664PSI2002800OK
11/04/2026 02:47:480/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270711PSI2002800OK
11/04/2026 02:54:290/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271294PSI140350OK
11/04/2026 02:50:200/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721618PSI2002800OK
11/04/2026 02:43:220/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O812PSI2003000OK
11/04/2026 02:53:220/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O17PSI525OK
11/04/2026 02:44:350/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601837PSI3504000OK
11/04/2026 02:54:470/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
11/04/2026 02:50:180/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1679PSI5003000OK
11/04/2026 02:50:490/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243881PSI2002800OK
11/04/2026 02:44:080/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661287PSI2004000OK
11/04/2026 02:41:060/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261320PSI5300OK
11/04/2026 02:51:070/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265473PSI2004000OK
11/04/2026 02:43:050/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS397PSI2003000OK
11/04/2026 02:49:440/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3626PSI1501500OK
11/04/2026 02:48:450/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092974PSI5003000Error-27
11/04/2026 02:52:450/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931922PSI5003000OK
11/04/2026 02:42:540/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
11/04/2026 02:46:500/1/1041/0/0/1C_Weigh_Scale_125_CCL2F217.8LBS5300OK
11/04/2026 02:46:500/1/1041/0/0/0C_Weigh_Scale_125_CF410.6LBS3300OK
11/04/2026 02:53:400/1/1040/0/0/0C_Weigh_Scale_125_CHF321.7LBS3300OK
11/04/2026 02:53:400/1/1040/0/0/1C_Weigh_Scale_125_SF633.2LBS3300OK
11/04/2026 02:53:140/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
11/04/2026 02:53:140/1/1051/0/0/0C_Weigh_Scale_126_SF610.19LBS3300OK
11/04/2026 02:41:450/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
11/04/2026 02:40:130/1/1050/0/0/0C_Weigh_Scale_130_CF421.0LBS3300OK
11/04/2026 02:40:130/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
11/04/2026 02:41:450/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher2.52LBS3300Lower Ctl Limit
11/04/2026 02:52:070/1/1046/0/0/0C_Weigh_Scale_138_C4F829.6LBS3300OK
11/04/2026 02:50:460/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane8.0LBS5300OK
11/04/2026 02:40:570/1/1045/0/0/0C_Weigh_Scale_138_HBr7.9LBS220OK
11/04/2026 02:50:460/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
11/04/2026 02:52:070/1/1046/0/0/1C_Weigh_Scale_138_SF636.4LBS3300OK
11/04/2026 02:40:570/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected0.0LBS0300OK
11/04/2026 02:45:200/1/1053/0/0/1C_Weigh_Scale_143A_C4F85.5LBS3300OK
11/04/2026 02:45:200/1/1053/0/0/0C_Weigh_Scale_143A_SF619.1LBS3300OK
11/04/2026 02:46:540/1/1052/0/0/0C_Weigh_Scale_152_Far C4F836.6LBS3300OK
11/04/2026 02:47:180/1/1047/0/0/1C_Weigh_Scale_152_Far_CF418.8LBS3300OK
11/04/2026 02:47:180/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF317.6LBS3300OK
11/04/2026 02:42:020/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F814.0LBS3300OK
11/04/2026 02:54:590/1/1043/0/0/1C_Weigh_Scale_152_Near_CF418.1LBS3300OK
11/04/2026 02:54:590/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF330.0LBS3300OK
11/04/2026 02:46:540/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
11/04/2026 02:53:090/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL34.12LBS3300OK
11/04/2026 02:47:120/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine13.59LBS5300OK
11/04/2026 02:42:540/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF416.43LBS3300OK
11/04/2026 02:42:020/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF610.92LBS3300OK
11/04/2026 02:47:120/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
11/04/2026 02:53:090/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0NodeID 0 PSI  No Data
 0/1/6006/0/0/0WDR 6006    No Data
 0/1/6007/0/0/0WDR 6007    No Data
 0/1/6008/0/0/0WDR 6008    No Data
 0/1/6009/0/0/0WGR 6009    No Data
 0/1/6011/0/0/0WGR 6011    No Data
10/15/2026 15:33:450/1/6013/0/0/1WTR 6013 CH2 Humidity (%)30.7(BLANK)3060Inactive
10/15/2026 15:33:450/1/6013/0/0/0WTR 6013 Temperature (F)-85.0(BLANK)5580Inactive
10/15/2026 11:31:500/1/6017/0/0/1WTR 6017 CH2 Humidity (%)-25.0(BLANK)3060Inactive
10/15/2026 11:31:500/1/6017/0/0/0WTR 6017_Temperature (F)63.2(BLANK)5580Inactive
 0/1/6018/0/0/0WTR 6018 V  No Data
 0/1/6018/0/0/1WTR 6018 CH2 V  No Data
 0/1/6019/0/0/0WTR 6019 V  No Data
 0/1/6019/0/0/1WTR 6019 CH2 V  No Data
 0/1/6021/0/0/0WTR 6021 V  No Data
 0/1/6021/0/0/1WTR 6021 CH2 V  No Data
10/14/2026 14:47:150/1/6022/0/0/0WTR 6022 (4-20mA) Temperature (F)-40.0(BLANK)5580Inactive
10/14/2026 14:47:150/1/6022/0/0/1WTR 6022 CH2 (4-20mA) Humidity%100.8(BLANK)3060Inactive
10/15/2026 15:53:580/1/6025/0/0/0WTR 6025 CH1 Temperature (F)27.437(BLANK)5580Inactive
10/15/2026 15:53:580/1/6025/0/0/1WTR 6025 CH2 Humidity (%)1,715.080(BLANK)3060Inactive
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data