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WGR Readings: 152 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
10/13/2026 23:35:423/1/4030/0/0/0_1st Flr: City Water Pressure68.9PSI4090OK
10/13/2026 23:27:574/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.3 7.59OK
10/13/2026 23:27:194/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
10/13/2026 20:38:114/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.505InH2O01.5Inactive
10/13/2026 23:32:154/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.122InH2O01OK
10/13/2026 23:29:494/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.064InH2O02OK
10/13/2026 23:10:374/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.285InH2O02OK
08/14/2026 09:43:294/1/5030/0/0/0_2nd Flr: Cool Fogger WDR0.1 0100Inactive
09/30/2026 02:39:314/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02Inactive
10/13/2026 23:20:004/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
10/13/2026 23:26:274/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.54PSI0.81.75OK
10/13/2026 16:31:194/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow381.7PSI275800Inactive
10/13/2026 23:31:173/1/4017/0/0/0_ASML: ArXeNe Gas2,460.9PSI2002800OK
10/13/2026 23:25:584/1/5034/0/0/0_ASML: Proc Gas Fault Alarm1.0On/Off0.51.2OK
10/13/2026 23:35:193/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad1.1 0800OK
09/28/2026 23:41:013/1/4101/0/0/0_CDA Pressure130.0PSI90140Inactive
10/13/2026 23:30:100/1/1201/0/0/0_Cleanroom: Equip RH37% / 70.3F38 / 6542 / 75Lower Ctl Limit
10/13/2026 23:26:450/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
10/13/2026 23:26:450/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
10/13/2026 23:14:104/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112591PSI2003000OK
10/13/2026 23:30:494/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010362PSI2003000OK
10/13/2026 23:25:500/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
10/06/2026 15:09:340/1/6002/0/0/1_Cleanroom: Rm XXX RH (%)42.9(BLANK)3060Inactive
10/13/2026 23:28:340/1/6001/0/0/1_Cleanroom: Rm XXX RH (%)36.3(BLANK)3060OK
10/13/2026 13:05:000/1/6023/0/0/1_Cleanroom: Rm XXX RH (%) Test5.205(BLANK)3060Inactive
10/06/2026 15:09:340/1/6002/0/0/0_Cleanroom: Rm XXX Temperature (F)73.1(BLANK)5580Inactive
10/13/2026 13:05:000/1/6023/0/0/0_Cleanroom: Rm XXX Temperature (F)76.7(BLANK)5580Inactive
10/13/2026 23:28:340/1/6001/0/0/0_Cleanroom: Rm XXX Temperature (F)74.8(BLANK)5580OK
10/13/2026 23:37:273/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
10/13/2026 23:35:333/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)5.80PSI410OK
10/13/2026 23:35:503/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.59PSI410OK
10/13/2026 23:25:110/1/1065/0/0/0_GPN2 Pressure Gauge After Filters133.6PSI0400OK
10/13/2026 23:32:193/1/4015/0/0/0_House Vacuum-25.87inHg-30-23OK
10/13/2026 23:24:403/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp63.1DEG F085OK
10/13/2026 23:32:503/1/4002/0/0/0_LN2_Tanks_LI-1-1160.0InH2O0300OK
10/13/2026 23:36:533/1/4004/0/0/0_LN2_Tanks_LI-1-2228.2InH2O0300OK
10/13/2026 23:33:343/1/4006/0/0/0_LN2_Tanks_LI-1-380.7InH2O0300OK
10/13/2026 23:27:013/1/4001/0/0/0_LN2_Tanks_PI-1-1157.5PSI118300OK
10/13/2026 23:26:433/1/4003/0/0/0_LN2_Tanks_PI-1-258.9PSI0300OK
10/13/2026 23:36:033/1/4005/0/0/0_LN2_Tanks_PI-1-3151.6PSI118300OK
10/13/2026 23:34:270/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
10/13/2026 23:33:083/1/4020/0/0/0_PCW: Lower Temp Gauge38.8DEG F052OK
10/13/2026 23:26:153/1/4009/0/0/0_PCW: Middle Pressure Gauge82.4PSI6794OK
10/13/2026 23:32:003/1/4008/0/0/0_PCW: Upper Temp Gauge57.0F0160OK
10/13/2026 23:30:310/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall123.2PSI0135OK
10/13/2026 23:36:253/1/4032/0/0/0_RO: Flow to 2361.07GPM0100OK
10/13/2026 23:31:060/1/1062/0/0/0_Tank 47 GPN2139.63PSI90400OK
10/13/2026 23:28:240/1/1064/0/0/0_Tank 47 UHPN2117.6PSI90400OK
10/13/2026 23:32:260/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters111.189PSI0125OK
10/13/2026 23:23:370/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882669PSI2002800OK
10/13/2026 23:34:170/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491010PSI2002800OK
10/13/2026 23:32:060/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052501975PSI3002800OK
10/13/2026 23:27:080/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089654PSI1501000OK
10/13/2026 23:34:340/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089538PSI2003000OK
10/13/2026 23:30:580/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090604PSI4003000OK
10/13/2026 23:34:030/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
10/13/2026 23:33:570/1/1022/0/0/0C_DDC_133_O2_1053751999PSI3002800OK
10/13/2026 23:36:410/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_1980PSI3002800OK
10/13/2026 23:26:250/1/1003/0/0/0C_EX3_121_He_438PSI2002800OK
10/13/2026 23:29:100/1/1002/0/0/0C_EX6_102_He_NoPVS2055PSI2002800OK
10/13/2026 23:37:290/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS161PSI3002600Lower Ctl Limit
10/13/2026 23:27:090/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_105254412PSI3003000OK
10/13/2026 23:34:140/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081899PSI2002800Error-27
10/13/2026 23:32:590/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091749PSI2002800OK
10/13/2026 23:31:210/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
10/13/2026 23:34:180/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822090PSI2002800OK
10/13/2026 23:32:540/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284573PSI2002800OK
10/13/2026 23:35:200/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_105253453PSI2002800OK
10/13/2026 23:35:350/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691664PSI2002800OK
10/13/2026 23:30:180/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270722PSI2002800OK
10/13/2026 23:30:280/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271291PSI140350OK
10/13/2026 23:34:050/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721618PSI2002800OK
10/13/2026 23:27:220/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O812PSI2003000OK
10/13/2026 23:37:060/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O17PSI525OK
10/13/2026 23:31:070/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601837PSI3504000OK
10/13/2026 23:31:280/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
10/13/2026 23:34:350/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1681PSI5003000OK
10/13/2026 23:27:450/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243877PSI2002800OK
10/13/2026 23:32:320/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661284PSI2004000OK
10/13/2026 23:33:390/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261315PSI5300OK
10/13/2026 23:35:450/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265476PSI2004000OK
10/13/2026 23:26:350/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS370PSI2003000OK
10/13/2026 23:32:320/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3635PSI1501500OK
10/13/2026 23:34:290/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092974PSI5003000OK
10/13/2026 23:10:340/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931933PSI5003000OK
10/13/2026 23:37:290/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
10/13/2026 23:28:390/1/1041/0/0/1C_Weigh_Scale_125_CCL2F217.8LBS5300OK
10/13/2026 23:28:390/1/1041/0/0/0C_Weigh_Scale_125_CF410.7LBS3300OK
10/13/2026 23:23:260/1/1040/0/0/0C_Weigh_Scale_125_CHF322.8LBS3300OK
10/13/2026 23:23:260/1/1040/0/0/1C_Weigh_Scale_125_SF633.4LBS3300OK
10/13/2026 23:27:330/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
10/13/2026 23:27:330/1/1051/0/0/0C_Weigh_Scale_126_SF610.84LBS3300OK
10/13/2026 23:29:440/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
10/13/2026 23:16:330/1/1050/0/0/0C_Weigh_Scale_130_CF420.9LBS3300OK
10/13/2026 23:16:330/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
10/13/2026 23:29:440/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher2.21LBS3300Lower Ctl Limit
10/13/2026 23:36:390/1/1046/0/0/0C_Weigh_Scale_138_C4F829.6LBS3300OK
10/13/2026 23:14:230/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane8.9LBS5300OK
10/13/2026 23:31:180/1/1045/0/0/0C_Weigh_Scale_138_HBr8.0LBS220OK
10/13/2026 23:14:230/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
10/13/2026 23:36:390/1/1046/0/0/1C_Weigh_Scale_138_SF636.6LBS3300OK
10/13/2026 23:31:180/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected0.0LBS0300OK
10/13/2026 23:36:260/1/1053/0/0/1C_Weigh_Scale_143A_C4F87.8LBS3300OK
10/13/2026 23:36:260/1/1053/0/0/0C_Weigh_Scale_143A_SF624.6LBS3300OK
10/13/2026 23:28:060/1/1052/0/0/0C_Weigh_Scale_152_Far C4F835.5LBS3300OK
10/13/2026 23:32:120/1/1047/0/0/1C_Weigh_Scale_152_Far_CF418.7LBS3300OK
10/13/2026 23:32:120/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF317.3LBS3300OK
10/13/2026 23:13:090/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F814.2LBS3300OK
10/13/2026 23:31:380/1/1043/0/0/1C_Weigh_Scale_152_Near_CF417.0LBS3300OK
10/13/2026 23:31:380/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF329.3LBS3300OK
10/13/2026 23:28:060/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
10/13/2026 23:31:540/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL33.84LBS3300OK
10/13/2026 23:36:110/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine13.73LBS5300OK
10/13/2026 23:37:290/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF416.87LBS3300OK
10/13/2026 23:13:090/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF610.68LBS3300OK
10/13/2026 23:31:540/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
10/13/2026 23:36:110/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
10/13/2026 23:27:280/1/6003/0/0/0ID:6003 ATO Temp & ATO Humidity-40.0(BLANK)5580Lower Ctl Limit
10/13/2026 23:27:280/1/6003/0/0/1ID:6003 ATO Temp & ATO Humidity CH20.0(BLANK)3060Lower Ctl Limit
10/05/2026 13:39:500/1/6004/0/0/0ID:6004 ATO Temp & ATO Humidity-40.0VOLTS5580Inactive
10/05/2026 13:39:500/1/6004/0/0/1ID:6004 ATO Temp & ATO Humidity CH20.0VOLTS3060Inactive
10/06/2026 15:18:080/1/6005/0/0/0ID:6005 ATO Temp & ATO Humidity-40.0(BLANK)5580Inactive
10/06/2026 15:18:080/1/6005/0/0/1ID:6005 ATO Temp & ATO Humidity CH20.0(BLANK)3060Inactive
 0/1/6006/0/0/0WDR 6006    No Data
 0/1/6007/0/0/0WDR 6007    No Data
 0/1/6008/0/0/0WDR 6008    No Data
 0/1/6009/0/0/0WGR 6009    No Data
 0/1/6011/0/0/0WGR 6011    No Data
 0/1/6013/0/0/0WTR 6013 V  No Data
 0/1/6013/0/0/1WTR 6013 CH2 V  No Data
 0/1/6014/0/0/0WTR 6014 V  No Data
 0/1/6014/0/0/1WTR 6014 CH2 V  No Data
 0/1/6015/0/0/0WTR 6015 V  No Data
 0/1/6015/0/0/1WTR 6015 CH2 V  No Data
 0/1/6016/0/0/0WTR 6016 V  No Data
 0/1/6016/0/0/1WTR 6016 CH2 V  No Data
10/09/2026 11:34:110/1/6017/0/0/0WTR 60170.00(BLANK)011Inactive
10/09/2026 11:34:110/1/6017/0/0/1WTR 6017 CH20.00(BLANK)011Inactive
 0/1/6018/0/0/0WTR 6018 V  No Data
 0/1/6018/0/0/1WTR 6018 CH2 V  No Data
 0/1/6019/0/0/0WTR 6019 V  No Data
 0/1/6019/0/0/1WTR 6019 CH2 V  No Data
 0/1/6021/0/0/0WTR 6021 V  No Data
 0/1/6021/0/0/1WTR 6021 CH2 V  No Data
10/05/2026 14:34:510/1/6022/0/0/0WTR 6022 (4-20mA)411.6(BLANK)5580Inactive
10/05/2026 14:34:510/1/6022/0/0/1WTR 6022 CH2 (4-20mA)168.3(BLANK)3060Inactive
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data