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WGR Readings: 119 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
08/07/2026 14:14:473/1/4030/0/0/0_1st Flr: City Water Pressure69.4PSI4090OK
08/07/2026 14:13:544/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.7 7.59OK
08/06/2026 08:49:324/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02Inactive
08/07/2026 13:39:394/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.605InH2O01.5OK
08/07/2026 14:09:184/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.122InH2O01OK
08/07/2026 14:24:474/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.069InH2O02OK
08/07/2026 14:27:304/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.335InH2O02OK
08/07/2026 13:37:144/1/5030/0/0/0_2nd Flr: Cool Fogger WDR99.7 0100Inactive
08/07/2026 13:59:044/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
08/03/2026 12:30:514/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 21.0On/Off02Inactive
08/07/2026 14:15:434/1/5034/0/0/0_2nd Flr: Rm 237 Haskris Chiller0.0On/Off02OK
08/07/2026 14:28:504/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
08/07/2026 14:21:054/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic0.93PSI0.81.75OK
08/07/2026 13:58:584/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow317.6PSI275800OK
08/07/2026 14:28:123/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad151.1 0800OK
08/07/2026 14:13:283/1/4101/0/0/0_CDA Pressure123.2PSI90140OK
08/07/2026 14:06:430/1/1201/0/0/0_Cleanroom: Equip RH42% / 70.5F38 / 6542 / 75Inactive
08/07/2026 14:16:130/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
08/07/2026 14:16:130/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
08/07/2026 14:26:354/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112585PSI2003000OK
08/07/2026 14:03:504/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010377PSI2003000OK
08/07/2026 14:23:390/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
08/07/2026 14:24:203/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
08/07/2026 14:18:513/1/4017/0/0/0_DI-RO: Resistivity Gauge #1817.9Ohm-cm14100OK
08/07/2026 14:19:343/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)6.40PSI410OK
08/07/2026 14:19:113/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.87PSI410OK
08/06/2026 05:51:120/1/1065/0/0/0_GPN2 Pressure Gauge After Filters125.4PSI0400Inactive
08/07/2026 14:23:233/1/4015/0/0/0_House Vacuum-26.13inHg-30-23OK
08/07/2026 14:18:473/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp71.0DEG F085OK
08/07/2026 14:15:533/1/4002/0/0/0_LN2_Tanks_LI-1-1188.2InH2O0300OK
08/07/2026 14:16:343/1/4004/0/0/0_LN2_Tanks_LI-1-2195.3InH2O0300OK
08/07/2026 14:21:113/1/4006/0/0/0_LN2_Tanks_LI-1-3100.9InH2O0300OK
08/07/2026 14:16:323/1/4001/0/0/0_LN2_Tanks_PI-1-1130.6PSI0300OK
08/07/2026 14:23:353/1/4003/0/0/0_LN2_Tanks_PI-1-257.8PSI0300OK
08/07/2026 14:19:293/1/4005/0/0/0_LN2_Tanks_PI-1-3152.4PSI0300OK
08/07/2026 14:28:220/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
08/07/2026 14:25:033/1/4020/0/0/0_PCW: Lower Temp Gauge50.1DEG F052OK
08/07/2026 14:27:513/1/4009/0/0/0_PCW: Middle Pressure Gauge81.3PSI6794OK
08/07/2026 14:25:223/1/4008/0/0/0_PCW: Upper Temp Gauge57.3F0160OK
08/07/2026 14:02:540/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall97.6PSI0135OK
08/07/2026 14:17:473/1/4032/0/0/0_RO: Flow to 2361.03GPM0100OK
08/07/2026 14:17:200/1/1062/0/0/0_Tank 47 GPN2123.57PSI90400OK
08/07/2026 14:26:090/1/1064/0/0/0_Tank 47 UHPN2120.3PSI90400OK
08/07/2026 14:25:290/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters115.236PSI0125OK
08/07/2026 14:15:350/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882689PSI2002800OK
08/07/2026 14:20:170/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491007PSI2002800OK
08/07/2026 14:15:270/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052502004PSI3002800OK
08/07/2026 14:17:440/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089739PSI1501000OK
08/07/2026 14:02:300/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089549PSI2003000OK
08/07/2026 14:19:110/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090647PSI4003000OK
08/07/2026 14:23:340/1/1021/0/0/0C_DDC_133_CO2_105376825PSI3502800OK
08/07/2026 14:17:210/1/1022/0/0/0C_DDC_133_O2_1053752004PSI3002800OK
08/07/2026 14:29:080/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_2006PSI3002800OK
 0/1/1204/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_Test PSI  No Data
08/07/2026 14:22:110/1/1003/0/0/0C_EX3_121_He_466PSI2002800OK
08/07/2026 14:27:110/1/1002/0/0/0C_EX6_102_He_NoPVS2100PSI2002800OK
08/07/2026 14:15:530/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS286PSI3002600Lower Ctl Limit
08/07/2026 14:24:310/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541630PSI3003000OK
08/07/2026 14:25:140/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081929PSI2002800OK
08/07/2026 14:22:160/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091840PSI2002800OK
08/07/2026 14:21:110/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
08/07/2026 14:18:120/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822084PSI2002800OK
08/07/2026 14:22:270/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284564PSI2002800OK
08/07/2026 14:27:000/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052532286PSI2002800OK
08/07/2026 14:22:490/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691685PSI2002800OK
08/07/2026 14:29:190/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270711PSI2002800OK
08/07/2026 14:17:500/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271297PSI140350OK
08/07/2026 14:24:190/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721647PSI2002800OK
08/07/2026 14:26:420/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O774PSI2003000OK
08/07/2026 14:28:520/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O18PSI525OK
08/07/2026 14:16:250/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601825PSI3504000OK
08/07/2026 14:27:260/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
08/07/2026 14:27:550/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1722PSI5003000OK
08/07/2026 14:19:370/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243886PSI2002800OK
08/07/2026 14:17:150/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661287PSI2004000OK
08/07/2026 14:16:090/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261315PSI5300OK
08/07/2026 14:16:540/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265473PSI2004000OK
08/07/2026 14:16:550/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS338PSI2003000OK
08/07/2026 14:24:490/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3638PSI1501500OK
08/07/2026 14:27:550/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092971PSI5003000OK
08/07/2026 14:26:010/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020932083PSI5003000OK
08/07/2026 14:18:290/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
08/07/2026 14:28:280/1/1041/0/0/1C_Weigh_Scale_125_CCL2F218.1LBS5300OK
08/07/2026 14:28:280/1/1041/0/0/0C_Weigh_Scale_125_CF411.2LBS3300OK
08/07/2026 14:27:040/1/1040/0/0/0C_Weigh_Scale_125_CHF332.0LBS3300OK
08/07/2026 14:27:040/1/1040/0/0/1C_Weigh_Scale_125_SF639.8LBS3300OK
08/07/2026 14:20:270/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
08/07/2026 14:20:270/1/1051/0/0/0C_Weigh_Scale_126_SF6112.8LBS3300OK
08/07/2026 14:24:570/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
08/07/2026 14:22:520/1/1050/0/0/0C_Weigh_Scale_130_CF468.0LBS3300OK
08/07/2026 14:22:520/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.2LBS0300OK
08/07/2026 14:24:570/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher14.9LBS3300OK
08/07/2026 14:18:040/1/1046/0/0/0C_Weigh_Scale_138_C4F827.4LBS3300OK
08/07/2026 14:15:040/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane13.2LBS5300OK
08/07/2026 14:20:110/1/1045/0/0/0C_Weigh_Scale_138_HBr18.3LBS220OK
08/07/2026 14:15:040/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
08/07/2026 14:18:040/1/1046/0/0/1C_Weigh_Scale_138_SF638.7LBS3300OK
08/07/2026 14:20:110/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected0.0LBS0300OK
08/07/2026 14:26:160/1/1053/0/0/1C_Weigh_Scale_143A_C4F869.3LBS3300OK
08/07/2026 14:26:160/1/1053/0/0/0C_Weigh_Scale_143A_SF631.5LBS3300OK
08/07/2026 14:26:040/1/1052/0/0/0C_Weigh_Scale_152_Far C4F835.6LBS3300OK
08/07/2026 14:14:290/1/1047/0/0/1C_Weigh_Scale_152_Far_CF419.0LBS3300OK
08/07/2026 14:14:290/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF331.6LBS3300OK
08/07/2026 14:18:160/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F828.2LBS3300OK
08/07/2026 14:27:580/1/1043/0/0/1C_Weigh_Scale_152_Near_CF442.1LBS3300OK
08/07/2026 14:27:580/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF345.4LBS3300OK
08/07/2026 14:26:040/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
08/07/2026 14:21:120/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL316.9LBS3300OK
08/07/2026 14:27:340/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine66.4LBS5300OK
08/07/2026 14:18:290/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF4113.8LBS3300OK
08/07/2026 14:18:160/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF650.8LBS3300OK
08/07/2026 14:21:120/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
08/07/2026 14:27:340/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data