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WGR Readings: 155 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
10/20/2026 00:14:513/1/4030/0/0/0_1st Flr: City Water Pressure55.9PSI4090OK
10/20/2026 00:05:214/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.3 7.59OK
10/20/2026 00:12:034/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
10/20/2026 00:17:374/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.560InH2O01.5OK
10/19/2026 23:56:054/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.167InH2O01OK
10/20/2026 00:23:564/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.064InH2O02OK
10/20/2026 00:20:294/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.295InH2O02OK
08/14/2026 09:43:294/1/5030/0/0/0_2nd Flr: Cool Fogger WDR0.1 0100Inactive
09/30/2026 02:39:314/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02Inactive
10/20/2026 00:19:514/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
10/20/2026 00:21:234/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.54PSI0.81.75OK
10/19/2026 21:26:424/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow341.0PSI275800Inactive
10/20/2026 00:24:463/1/4017/0/0/0_ASML: ArXeNe Gas2,460.9PSI2002800OK
10/20/2026 00:23:394/1/5034/0/0/0_ASML: Proc Gas Fault Alarm1.0On/Off0.51.2OK
10/20/2026 00:18:513/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad61.0 0800OK
09/28/2026 23:41:013/1/4101/0/0/0_CDA Pressure130.0PSI90140Inactive
10/20/2026 00:22:060/1/1201/0/0/0_Cleanroom: Equip RH41% / 70.3F38 / 6542 / 75OK
10/20/2026 00:18:460/1/6001/0/0/1_Cleanroom: Rm 101_Humidity (%)0.0(BLANK)3060Lower Ctl Limit
10/20/2026 00:18:460/1/6001/0/0/0_Cleanroom: Rm 101_Temperature (F)-40.0(BLANK)5580Lower Ctl Limit
10/20/2026 00:24:290/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
10/20/2026 00:24:290/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
10/20/2026 00:22:354/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112585PSI2003000OK
10/20/2026 00:10:134/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010357PSI2003000OK
10/20/2026 00:21:130/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
10/06/2026 15:09:340/1/6002/0/0/1_Cleanroom: Rm XXX RH (%)42.9(BLANK)3060Inactive
10/13/2026 13:05:000/1/6023/0/0/1_Cleanroom: Rm XXX RH (%) Test5.205(BLANK)3060Inactive
10/06/2026 15:09:340/1/6002/0/0/0_Cleanroom: Rm XXX Temperature (F)73.1(BLANK)5580Inactive
10/13/2026 13:05:000/1/6023/0/0/0_Cleanroom: Rm XXX Temperature (F)76.7(BLANK)5580Inactive
10/20/2026 00:19:423/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
10/20/2026 00:15:133/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)5.78PSI410OK
10/20/2026 00:14:233/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.59PSI410OK
10/20/2026 00:19:150/1/1065/0/0/0_GPN2 Pressure Gauge After Filters120.0PSI0400OK
10/20/2026 00:25:393/1/4015/0/0/0_House Vacuum-25.80inHg-30-23OK
10/20/2026 00:17:163/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp63.3DEG F085OK
10/20/2026 00:12:403/1/4002/0/0/0_LN2_Tanks_LI-1-1212.7InH2O0300OK
10/20/2026 00:16:313/1/4004/0/0/0_LN2_Tanks_LI-1-2214.7InH2O0300OK
10/20/2026 00:13:203/1/4006/0/0/0_LN2_Tanks_LI-1-375.1InH2O0300OK
10/20/2026 00:22:103/1/4001/0/0/0_LN2_Tanks_PI-1-1131.7PSI118300OK
10/20/2026 00:22:073/1/4003/0/0/0_LN2_Tanks_PI-1-258.9PSI0300OK
10/20/2026 00:15:113/1/4005/0/0/0_LN2_Tanks_PI-1-3151.6PSI118300OK
10/20/2026 00:11:070/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
10/20/2026 00:10:483/1/4020/0/0/0_PCW: Lower Temp Gauge39.5DEG F052Error-28
10/20/2026 00:20:363/1/4009/0/0/0_PCW: Middle Pressure Gauge83.3PSI6794OK
10/20/2026 00:25:373/1/4008/0/0/0_PCW: Upper Temp Gauge55.8F0160OK
10/20/2026 00:24:000/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall112.7PSI0135OK
10/20/2026 00:23:093/1/4032/0/0/0_RO: Flow to 2361.04GPM0100OK
10/20/2026 00:11:370/1/1062/0/0/0_Tank 47 GPN2121.49PSI90400Error-28
10/20/2026 00:20:080/1/1064/0/0/0_Tank 47 UHPN2117.9PSI90400OK
10/20/2026 00:25:350/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters112.636PSI0125OK
10/20/2026 00:16:320/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882683PSI2002800OK
10/20/2026 00:13:450/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491007PSI2002800OK
10/20/2026 00:11:490/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052501975PSI3002800OK
10/20/2026 00:22:140/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089670PSI1501000OK
10/20/2026 00:14:180/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089554PSI2003000OK
10/20/2026 00:22:310/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090604PSI4003000OK
10/20/2026 00:12:320/1/1021/0/0/0C_DDC_133_CO2_105376825PSI3502800OK
10/20/2026 00:12:420/1/1022/0/0/0C_DDC_133_O2_1053751999PSI3002800OK
10/20/2026 00:22:510/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_1988PSI3002800OK
10/20/2026 00:17:130/1/1003/0/0/0C_EX3_121_He_451PSI2002800OK
10/20/2026 00:22:240/1/1002/0/0/0C_EX6_102_He_NoPVS2055PSI2002800OK
10/20/2026 00:16:360/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS143PSI3002600Lower Ctl Limit
10/20/2026 00:20:420/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_105254293PSI3003000Lower Ctl Limit
10/20/2026 00:24:360/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081899PSI2002800OK
10/20/2026 00:12:250/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091700PSI2002800OK
10/20/2026 00:24:100/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
10/20/2026 00:12:450/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822088PSI2002800OK
10/20/2026 00:12:360/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284571PSI2002800OK
10/20/2026 00:14:460/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_105253312PSI2002800OK
10/20/2026 00:14:520/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691664PSI2002800OK
10/20/2026 00:24:370/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270711PSI2002800OK
10/20/2026 00:21:350/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271306PSI140350OK
10/20/2026 00:13:310/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721618PSI2002800OK
10/20/2026 00:20:410/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O815PSI2003000OK
10/20/2026 00:16:150/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O19PSI525OK
10/20/2026 00:23:440/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601837PSI3504000OK
10/20/2026 00:22:560/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
10/20/2026 00:12:310/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1683PSI5003000OK
10/20/2026 00:19:580/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243877PSI2002800OK
10/20/2026 00:24:210/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661287PSI2004000OK
10/20/2026 00:25:020/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261333PSI5300OK
10/20/2026 00:14:340/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265473PSI2004000OK
10/20/2026 00:20:090/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS370PSI2003000OK
10/20/2026 00:10:550/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3636PSI1501500OK
10/20/2026 00:12:420/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092974PSI5003000OK
10/20/2026 00:16:350/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931968PSI5003000OK
10/20/2026 00:14:190/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
10/20/2026 00:22:520/1/1041/0/0/1C_Weigh_Scale_125_CCL2F217.9LBS5300OK
10/20/2026 00:22:520/1/1041/0/0/0C_Weigh_Scale_125_CF410.7LBS3300OK
10/20/2026 00:20:090/1/1040/0/0/0C_Weigh_Scale_125_CHF322.3LBS3300OK
10/20/2026 00:20:090/1/1040/0/0/1C_Weigh_Scale_125_SF633.3LBS3300OK
10/20/2026 00:13:250/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
10/20/2026 00:13:250/1/1051/0/0/0C_Weigh_Scale_126_SF610.70LBS3300OK
10/20/2026 00:19:190/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
10/20/2026 00:02:160/1/1050/0/0/0C_Weigh_Scale_130_CF421.1LBS3300OK
10/20/2026 00:02:160/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.2LBS0300OK
10/20/2026 00:19:190/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher2.72LBS3300Lower Ctl Limit
10/20/2026 00:11:190/1/1046/0/0/0C_Weigh_Scale_138_C4F830.0LBS3300OK
10/19/2026 23:56:120/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane8.8LBS5300OK
10/20/2026 00:23:480/1/1045/0/0/0C_Weigh_Scale_138_HBr7.6LBS220OK
10/19/2026 23:56:120/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
10/20/2026 00:11:190/1/1046/0/0/1C_Weigh_Scale_138_SF636.5LBS3300OK
10/20/2026 00:23:480/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected0.0LBS0300OK
10/20/2026 00:17:360/1/1053/0/0/1C_Weigh_Scale_143A_C4F87.6LBS3300OK
10/20/2026 00:17:360/1/1053/0/0/0C_Weigh_Scale_143A_SF623.9LBS3300OK
10/20/2026 00:16:530/1/1052/0/0/0C_Weigh_Scale_152_Far C4F835.9LBS3300OK
10/20/2026 00:21:180/1/1047/0/0/1C_Weigh_Scale_152_Far_CF417.8LBS3300OK
10/20/2026 00:21:180/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF317.1LBS3300OK
10/20/2026 00:13:010/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F814.0LBS3300OK
10/20/2026 00:25:080/1/1043/0/0/1C_Weigh_Scale_152_Near_CF417.1LBS3300OK
10/20/2026 00:25:080/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF328.6LBS3300OK
10/20/2026 00:16:530/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
10/20/2026 00:25:090/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL34.25LBS3300OK
10/20/2026 00:22:190/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine13.68LBS5300OK
10/20/2026 00:14:190/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF416.29LBS3300OK
10/20/2026 00:13:010/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF610.66LBS3300OK
10/20/2026 00:22:190/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
10/20/2026 00:25:090/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
10/19/2026 15:46:160/1/6003/0/0/0ID:6003 ATO Temp & ATO Humidity-40.0(BLANK)5580Inactive
10/19/2026 15:46:160/1/6003/0/0/1ID:6003 ATO Temp & ATO Humidity CH20.0(BLANK)3060Inactive
10/05/2026 13:39:500/1/6004/0/0/0ID:6004 ATO Temp & ATO Humidity-40.0VOLTS5580Inactive
10/05/2026 13:39:500/1/6004/0/0/1ID:6004 ATO Temp & ATO Humidity CH20.0VOLTS3060Inactive
10/06/2026 15:18:080/1/6005/0/0/0ID:6005 ATO Temp & ATO Humidity-40.0(BLANK)5580Inactive
10/06/2026 15:18:080/1/6005/0/0/1ID:6005 ATO Temp & ATO Humidity CH20.0(BLANK)3060Inactive
 0NodeID 0 PSI  No Data
 0/1/6006/0/0/0WDR 6006    No Data
 0/1/6007/0/0/0WDR 6007    No Data
 0/1/6008/0/0/0WDR 6008    No Data
 0/1/6009/0/0/0WGR 6009    No Data
 0/1/6011/0/0/0WGR 6011    No Data
10/15/2026 15:33:450/1/6013/0/0/1WTR 6013 CH2 Humidity (%)30.7(BLANK)3060Inactive
10/15/2026 15:33:450/1/6013/0/0/0WTR 6013 Temperature (F)-85.0(BLANK)5580Inactive
 0/1/6014/0/0/0WTR 6014 V  No Data
 0/1/6014/0/0/1WTR 6014 CH2 V  No Data
 0/1/6015/0/0/0WTR 6015 V  No Data
 0/1/6015/0/0/1WTR 6015 CH2 V  No Data
 0/1/6016/0/0/0WTR 6016 V  No Data
 0/1/6016/0/0/1WTR 6016 CH2 V  No Data
10/15/2026 11:31:500/1/6017/0/0/1WTR 6017 CH2 Humidity (%)-25.0(BLANK)3060Inactive
10/15/2026 11:31:500/1/6017/0/0/0WTR 6017_Temperature (F)63.2(BLANK)5580Inactive
 0/1/6018/0/0/0WTR 6018 V  No Data
 0/1/6018/0/0/1WTR 6018 CH2 V  No Data
 0/1/6019/0/0/0WTR 6019 V  No Data
 0/1/6019/0/0/1WTR 6019 CH2 V  No Data
 0/1/6021/0/0/0WTR 6021 V  No Data
 0/1/6021/0/0/1WTR 6021 CH2 V  No Data
10/14/2026 14:47:150/1/6022/0/0/0WTR 6022 (4-20mA) Temperature (F)-40.0(BLANK)5580Inactive
10/14/2026 14:47:150/1/6022/0/0/1WTR 6022 CH2 (4-20mA) Humidity%100.8(BLANK)3060Inactive
10/15/2026 15:53:580/1/6025/0/0/0WTR 6025 CH1 Temperature (F)27.437(BLANK)5580Inactive
10/15/2026 15:53:580/1/6025/0/0/1WTR 6025 CH2 Humidity (%)1,715.080(BLANK)3060Inactive
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data