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WGR Readings: 119 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
08/20/2026 21:18:173/1/4030/0/0/0_1st Flr: City Water Pressure68.0PSI4090OK
08/14/2026 14:04:194/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH0.1 7.59Inactive
08/20/2026 21:04:344/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
08/20/2026 20:53:544/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.480InH2O01.5OK
08/20/2026 21:08:044/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.344InH2O01OK
08/20/2026 21:06:254/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.049InH2O02OK
08/15/2026 23:03:194/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.315InH2O02Inactive
08/14/2026 09:43:294/1/5030/0/0/0_2nd Flr: Cool Fogger WDR0.1 0100Inactive
08/20/2026 21:07:554/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
08/03/2026 12:30:514/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 21.0On/Off02Inactive
08/20/2026 21:12:374/1/5034/0/0/0_2nd Flr: Rm 237 Haskris Chiller0.0On/Off-0.92OK
08/20/2026 21:06:014/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
08/20/2026 20:43:144/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.55PSI0.81.75OK
08/20/2026 21:15:514/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow297.7PSI275800OK
08/20/2026 21:12:374/1/5034/0/0/1_ASML_TEST: Proc Gas Fault Alarm5.2VOLTS16Inactive
08/20/2026 21:13:083/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad1.3 0800OK
08/20/2026 21:17:483/1/4101/0/0/0_CDA Pressure118.1PSI90140OK
08/20/2026 21:13:570/1/1201/0/0/0_Cleanroom: Equip RH44% / 69.4F38 / 6542 / 75Upper Ctl Limit
08/20/2026 21:10:290/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
08/20/2026 21:10:290/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
08/20/2026 21:11:164/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112649PSI2003000OK
08/20/2026 20:25:074/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010374PSI2003000OK
08/20/2026 20:59:340/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
08/20/2026 21:05:443/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
08/20/2026 21:07:433/1/4017/0/0/0_DI-RO: Resistivity Gauge #1817.9Ohm-cm14100OK
08/20/2026 21:09:333/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)6.44PSI410OK
08/20/2026 21:09:053/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)8.12PSI410OK
08/20/2026 21:06:450/1/1065/0/0/0_GPN2 Pressure Gauge After Filters133.3PSI0400OK
08/20/2026 20:57:563/1/4015/0/0/0_House Vacuum-25.87inHg-30-23OK
08/20/2026 21:16:453/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp67.7DEG F085OK
08/19/2026 06:32:203/1/4002/0/0/0_LN2_Tanks_LI-1-1209.6InH2O0300Inactive
08/20/2026 21:06:193/1/4004/0/0/0_LN2_Tanks_LI-1-2246.4InH2O0300OK
08/20/2026 20:56:503/1/4006/0/0/0_LN2_Tanks_LI-1-388.1InH2O0300OK
08/20/2026 21:06:183/1/4001/0/0/0_LN2_Tanks_PI-1-1135.4PSI0300OK
08/20/2026 21:14:163/1/4003/0/0/0_LN2_Tanks_PI-1-257.8PSI0300OK
08/20/2026 21:10:093/1/4005/0/0/0_LN2_Tanks_PI-1-3151.8PSI0300OK
08/20/2026 20:57:400/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
08/20/2026 21:14:513/1/4020/0/0/0_PCW: Lower Temp Gauge44.6DEG F052OK
08/20/2026 21:18:453/1/4009/0/0/0_PCW: Middle Pressure Gauge81.3PSI6794OK
08/20/2026 21:08:083/1/4008/0/0/0_PCW: Upper Temp Gauge51.3F0160OK
08/20/2026 21:16:560/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall123.5PSI0135OK
08/20/2026 20:57:543/1/4032/0/0/0_RO: Flow to 2360.90GPM0100OK
08/20/2026 21:16:010/1/1062/0/0/0_Tank 47 GPN2136.65PSI90400OK
08/20/2026 21:10:310/1/1064/0/0/0_Tank 47 UHPN2120.3PSI90400OK
08/20/2026 21:11:440/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters117.543PSI0125OK
08/20/2026 21:06:230/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882689PSI2002800OK
08/20/2026 21:10:220/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491007PSI2002800OK
08/20/2026 21:07:150/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052502001PSI3002800OK
08/20/2026 21:06:560/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089716PSI1501000OK
08/20/2026 21:06:200/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089552PSI2003000OK
08/20/2026 21:17:430/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090604PSI4003000OK
08/20/2026 21:14:470/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
08/20/2026 21:07:260/1/1022/0/0/0C_DDC_133_O2_1053752004PSI3002800OK
08/20/2026 21:16:480/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_2001PSI3002800OK
08/20/2026 21:06:100/1/1003/0/0/0C_EX3_121_He_455PSI2002800OK
08/20/2026 21:15:190/1/1002/0/0/0C_EX6_102_He_NoPVS1689PSI2002800OK
08/20/2026 21:05:310/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS268PSI3002600Lower Ctl Limit
08/20/2026 21:13:100/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541517PSI3003000OK
08/20/2026 21:09:220/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081899PSI2002800OK
08/20/2026 21:11:410/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091767PSI2002800OK
08/20/2026 21:10:020/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
08/20/2026 21:07:170/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822095PSI2002800OK
08/20/2026 21:07:060/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284580PSI2002800OK
08/20/2026 21:17:520/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052532149PSI2002800OK
08/20/2026 21:10:260/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691685PSI2002800OK
08/20/2026 21:12:090/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270711PSI2002800OK
08/20/2026 21:07:360/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271303PSI140350OK
08/20/2026 21:06:480/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721618PSI2002800OK
08/20/2026 21:13:170/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O782PSI2003000OK
08/20/2026 21:17:340/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O18PSI525OK
08/20/2026 21:05:380/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601837PSI3504000OK
08/20/2026 21:12:360/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
08/20/2026 21:16:020/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1719PSI5003000OK
08/20/2026 21:04:360/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243877PSI2002800OK
08/20/2026 21:08:330/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661299PSI2004000OK
08/20/2026 21:12:260/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261315PSI5300OK
08/20/2026 21:06:590/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265473PSI2004000OK
08/20/2026 21:14:090/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS367PSI2003000OK
08/20/2026 21:14:340/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3614PSI1501500OK
08/20/2026 21:11:500/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092978PSI5003000OK
08/20/2026 21:10:100/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020932081PSI5003000OK
08/20/2026 21:06:460/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
08/20/2026 21:17:290/1/1041/0/0/1C_Weigh_Scale_125_CCL2F217.8LBS5300OK
08/20/2026 21:17:290/1/1041/0/0/0C_Weigh_Scale_125_CF411.0LBS3300OK
08/20/2026 21:18:080/1/1040/0/0/0C_Weigh_Scale_125_CHF331.5LBS3300OK
08/20/2026 21:18:080/1/1040/0/0/1C_Weigh_Scale_125_SF640.7LBS3300OK
08/20/2026 21:06:230/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
08/20/2026 21:06:230/1/1051/0/0/0C_Weigh_Scale_126_SF6106.3LBS3300OK
08/20/2026 21:08:240/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
08/20/2026 21:11:080/1/1050/0/0/0C_Weigh_Scale_130_CF420.7LBS3300OK
08/20/2026 21:11:080/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
08/20/2026 21:08:240/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher14.6LBS3300OK
08/20/2026 21:10:370/1/1046/0/0/0C_Weigh_Scale_138_C4F826.8LBS3300OK
08/20/2026 21:05:140/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane17.8LBS5300OK
08/20/2026 21:05:480/1/1045/0/0/0C_Weigh_Scale_138_HBr20.5LBS220Upper Ctl Limit
08/20/2026 21:05:140/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
08/20/2026 21:10:370/1/1046/0/0/1C_Weigh_Scale_138_SF638.6LBS3300OK
08/20/2026 21:05:480/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected0.0LBS0300OK
08/20/2026 21:05:470/1/1053/0/0/1C_Weigh_Scale_143A_C4F89.8LBS3300OK
08/20/2026 21:05:470/1/1053/0/0/0C_Weigh_Scale_143A_SF631.4LBS3300OK
08/20/2026 21:15:480/1/1052/0/0/0C_Weigh_Scale_152_Far C4F835.4LBS3300OK
08/20/2026 21:11:520/1/1047/0/0/1C_Weigh_Scale_152_Far_CF46.8LBS3300OK
08/20/2026 21:11:520/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF389.3LBS3300OK
08/20/2026 21:15:060/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F886.6LBS3300OK
08/20/2026 21:05:500/1/1043/0/0/1C_Weigh_Scale_152_Near_CF4103.7LBS3300OK
08/20/2026 21:05:500/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF351.5LBS3300OK
08/20/2026 21:15:480/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
08/20/2026 21:05:080/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL353.9LBS3300OK
08/20/2026 21:11:240/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine65.9LBS5300OK
08/20/2026 21:06:460/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF4118.6LBS3300OK
08/20/2026 21:15:060/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF651.6LBS3300OK
08/20/2026 21:05:080/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
08/20/2026 21:11:240/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data