WGR/WTR Readings

07/01/2025 18:26:48

3/1/4030/0/0/0

_1st Flr: City Water Pressure

84.1

PSI

40

90

OK

07/01/2025 18:25:37

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

8.5

7.5

9

OK

07/01/2025 18:23:09

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

OK

07/01/2025 18:30:08

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.625

InH2O

0

1.5

OK

07/01/2025 18:29:43

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.233

InH2O

0

1

OK

07/01/2025 18:29:47

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.123

InH2O

0

2

OK

07/01/2025 18:23:04

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.265

InH2O

0

2

OK

06/28/2025 07:24:26

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

1.1

0

100

Inactive

07/01/2025 18:27:11

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

0.0

On/Off

0

2

OK

07/01/2025 18:28:30

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2

1.0

On/Off

0

2

OK

07/01/2025 18:20:59

4/1/5034/0/0/0

_2nd Flr: Rm 237 Haskris Chiller

0.0

On/Off

0

2

OK

07/01/2025 18:28:42

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

07/01/2025 18:31:09

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

0.93

PSI

1

1.75

Lower Ctl Limit

07/01/2025 18:21:27

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

331.0

PSI

275

800

OK

07/01/2025 18:23:14

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

408.4

0

800

OK

07/01/2025 18:17:23

3/1/4101/0/0/0

_CDA Pressure

117.3

PSI

90

140

OK

07/01/2025 18:22:09

0/1/1201/0/0/0

_Cleanroom: Equip RH

38% / 70.3

F

38 / 65

42 / 75

OK

07/01/2025 18:09:14

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

1.0

On/Off

0

2

OK

07/01/2025 18:09:14

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

07/01/2025 18:16:37

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2591

PSI

400

3000

OK

07/01/2025 18:17:01

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

423

PSI

400

3000

OK

07/01/2025 18:29:14

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

07/01/2025 18:31:03

3/1/4032/0/0/0

_DI-RO: Flow

0.34

GPM

0

100

OK

07/01/2025 18:24:38

3/1/4031/0/0/0

_DI-RO: Light Sensor

0.0

On/Off

0

2

OK

07/01/2025 18:17:04

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

17.9

Ohm-cm

14

100

Error-28

07/01/2025 18:06:14

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

6.20

PSI

4

10

Inactive

07/01/2025 18:28:56

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

8.12

PSI

4

10

OK

07/01/2025 18:19:38

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

115.7

PSI

0

400

OK

07/01/2025 18:28:45

3/1/4015/0/0/0

_House Vacuum

-25.27

inHg

-30

-23

OK

07/01/2025 18:23:22

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

70.8

DEG F

0

85

OK

07/01/2025 18:30:04

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

184.0

InH2O

0

300

OK

07/01/2025 18:29:47

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

210.2

InH2O

0

300

OK

07/01/2025 18:27:34

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

97.8

InH2O

0

300

OK

07/01/2025 18:19:56

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

123.3

PSI

0

300

OK

07/01/2025 18:28:32

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

58.9

PSI

0

300

OK

07/01/2025 18:20:06

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

151.6

PSI

0

300

OK

07/01/2025 18:18:56

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

100.0

PSI

0

110

OK

07/01/2025 18:18:07

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

49.1

DEG F

0

57

OK

07/01/2025 18:17:38

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

86.4

PSI

67

94

OK

07/01/2025 18:20:03

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

56.5

F

0

160

OK

07/01/2025 18:19:17

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

105.3

PSI

0

135

OK

07/01/2025 18:16:35

0/1/1062/0/0/0

_Tank 47 GPN2

120.45

PSI

90

400

Error-28

07/01/2025 18:29:00

0/1/1064/0/0/0

_Tank 47 UHPN2

109.5

PSI

90

400

OK

07/01/2025 18:24:28

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

102.815

PSI

0

125

OK

07/01/2025 18:19:05

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2715

PSI

200

2800

OK

07/01/2025 18:23:04

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1153

PSI

200

2800

OK

07/01/2025 18:18:33

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

2001

PSI

300

2800

OK

07/01/2025 18:27:00

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

235

PSI

300

1000

Lower Ctl Limit

07/01/2025 18:24:24

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

778

PSI

400

3000

OK

07/01/2025 18:16:43

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

644

PSI

400

3000

OK

07/01/2025 18:16:51

0/1/1021/0/0/0

C_DDC_133_CO2_105376

809

PSI

350

2800

OK

07/01/2025 18:23:08

0/1/1022/0/0/0

C_DDC_133_O2_105375

2004

PSI

300

2800

OK

07/01/2025 18:27:37

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

379

PSI

300

2800

OK

07/01/2025 18:30:52

0/1/1003/0/0/0

C_EX3_121_He_

572

PSI

200

2800

OK

07/01/2025 18:18:02

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

2581

PSI

200

2800

OK

07/01/2025 18:17:51

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

818

PSI

300

2600

OK

07/01/2025 18:17:25

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1689

PSI

300

3000

OK

07/01/2025 18:26:04

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

2092

PSI

200

2800

OK

07/01/2025 18:24:01

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

2043

PSI

200

2800

OK

07/01/2025 18:16:57

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

1003

PSI

200

2800

OK

07/01/2025 18:21:56

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2075

PSI

200

2800

OK

07/01/2025 18:19:01

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

649

PSI

200

2800

OK

07/01/2025 18:19:43

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

2572

PSI

200

2800

OK

07/01/2025 18:21:04

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1615

PSI

200

2800

OK

07/01/2025 18:30:50

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

797

PSI

200

2800

OK

07/01/2025 18:25:12

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

288

PSI

140

350

OK

07/01/2025 18:24:44

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1705

PSI

200

2800

OK

07/01/2025 18:24:53

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

232

PSI

200

3000

OK

07/01/2025 18:26:47

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

18

PSI

5

25

OK

07/01/2025 18:28:40

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

2092

PSI

350

4000

OK

07/01/2025 18:31:04

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1600

PSI

200

4000

OK

07/01/2025 18:29:23

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

615

PSI

500

3000

OK

07/01/2025 18:31:04

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

959

PSI

200

2800

OK

07/01/2025 18:26:52

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1346

PSI

200

4000

OK

07/01/2025 18:28:12

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

11

PSI

5

300

OK

07/01/2025 18:22:34

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

525

PSI

200

4000

OK

07/01/2025 18:22:03

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

347

PSI

200

3000

OK

07/01/2025 18:19:48

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

644

PSI

150

1500

OK

07/01/2025 18:17:47

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

985

PSI

500

3000

OK

07/01/2025 18:28:03

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

1990

PSI

500

3000

OK

07/01/2025 18:19:23

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

OK

07/01/2025 18:28:00

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

20.1

LBS

5

300

OK

07/01/2025 18:28:00

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

13.3

LBS

3

300

OK

07/01/2025 18:20:28

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

32.7

LBS

3

300

OK

07/01/2025 18:20:28

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

40.0

LBS

3

300

OK

07/01/2025 18:20:42

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

07/01/2025 18:20:42

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

18.7

LBS

3

300

OK

07/01/2025 18:25:19

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

07/01/2025 18:30:48

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

21.0

LBS

3

300

OK

07/01/2025 18:30:48

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.1

LBS

0

300

OK

07/01/2025 18:25:19

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

3.1

LBS

3

300

OK

07/01/2025 18:18:07

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

5.4

LBS

3

300

OK

04/11/2025 07:22:43

0/1/1045/0/0/0

C_Weigh_Scale_138_Cl_Not In Use

8.7

LBS

0

300

Inactive

07/01/2025 18:29:21

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

10.0

LBS

5

300

OK

07/01/2025 18:29:21

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

07/01/2025 18:18:07

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

14.1

LBS

3

300

OK

04/11/2025 07:22:43

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

0.0

LBS

0

300

Inactive

07/01/2025 18:21:55

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

17.0

LBS

3

300

OK

07/01/2025 18:21:55

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

22.0

LBS

3

300

OK

07/01/2025 18:16:34

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

36.4

LBS

3

300

OK

07/01/2025 18:25:39

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

17.4

LBS

3

300

OK

07/01/2025 18:25:39

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

16.4

LBS

3

300

OK

07/01/2025 18:25:07

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

20.0

LBS

3

300

OK

07/01/2025 18:24:05

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

19.7

LBS

3

300

OK

07/01/2025 18:24:05

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

28.2

LBS

3

300

OK

07/01/2025 18:16:34

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

07/01/2025 18:23:02

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

7.4

LBS

3

300

OK

07/01/2025 18:31:13

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

9.2

LBS

5

300

OK

07/01/2025 18:19:23

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

18.6

LBS

3

300

OK

07/01/2025 18:25:07

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

34.6

LBS

3

300

OK

07/01/2025 18:23:02

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

07/01/2025 18:31:13

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

07/01/2025 18:30:17

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

41.0

mAMPS

0

100

OK

07/01/2025 18:30:17

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

72.5

mAMPS

0

200

OK

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data