WGR/WTR Readings

08/16/2026 18:56:46

3/1/4030/0/0/0

_1st Flr: City Water Pressure

68.6

PSI

40

90

OK

08/14/2026 14:04:19

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

0.1

7.5

9

Inactive

08/16/2026 18:45:58

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

OK

08/16/2026 18:31:50

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.640

InH2O

0

1.5

OK

08/16/2026 19:01:45

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.111

InH2O

0

1

OK

08/16/2026 18:48:59

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.064

InH2O

0

2

OK

08/15/2026 23:03:19

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.315

InH2O

0

2

Inactive

08/14/2026 09:43:29

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

0.1

0

100

Inactive

08/16/2026 18:56:47

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

0.0

On/Off

0

2

OK

08/03/2026 12:30:51

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2

1.0

On/Off

0

2

Inactive

08/16/2026 18:50:48

4/1/5034/0/0/0

_2nd Flr: Rm 237 Haskris Chiller

0.0

On/Off

-0.9

2

OK

08/16/2026 18:55:33

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

08/16/2026 18:51:59

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

0.90

PSI

0.8

1.75

OK

08/16/2026 18:54:18

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

201.8

PSI

275

800

Lower Ctl Limit

08/16/2026 18:58:21

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

131.3

0

800

OK

08/16/2026 18:56:33

3/1/4101/0/0/0

_CDA Pressure

121.8

PSI

90

140

OK

08/16/2026 18:51:11

0/1/1201/0/0/0

_Cleanroom: Equip RH

42% / 70.3

F

38 / 65

42 / 75

OK

08/16/2026 18:56:37

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

1.0

On/Off

0

2

OK

08/16/2026 18:56:37

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

08/16/2026 18:50:10

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2585

PSI

200

3000

OK

08/16/2026 15:33:40

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

365

PSI

200

3000

Inactive

08/16/2026 19:00:00

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

08/16/2026 18:51:30

3/1/4031/0/0/0

_DI-RO: Light Sensor

0.0

On/Off

0

2

OK

08/16/2026 19:01:14

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

17.9

Ohm-cm

14

100

OK

08/16/2026 19:02:49

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

6.41

PSI

4

10

OK

08/16/2026 19:02:43

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

7.87

PSI

4

10

OK

08/16/2026 19:00:43

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

130.5

PSI

0

400

OK

08/16/2026 18:52:01

3/1/4015/0/0/0

_House Vacuum

-26.13

inHg

-30

-23

OK

08/16/2026 18:56:45

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

66.9

DEG F

0

85

OK

08/16/2026 18:57:56

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

212.7

InH2O

0

300

OK

08/16/2026 18:59:59

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

226.7

InH2O

0

300

OK

08/16/2026 18:50:02

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

92.3

InH2O

0

300

OK

08/16/2026 19:00:10

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

130.8

PSI

0

300

OK

08/16/2026 18:53:00

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

57.8

PSI

0

300

OK

08/16/2026 18:49:03

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

151.3

PSI

0

300

OK

08/16/2026 18:53:27

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

100.0

PSI

0

110

OK

08/16/2026 18:53:21

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

50.1

DEG F

0

52

OK

08/16/2026 18:55:57

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

82.0

PSI

67

94

OK

08/16/2026 18:53:54

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

54.1

F

0

160

OK

08/16/2026 18:41:17

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

122.0

PSI

0

135

OK

08/16/2026 18:35:48

3/1/4032/0/0/0

_RO: Flow to 236

0.94

GPM

0

100

OK

08/16/2026 18:54:10

0/1/1062/0/0/0

_Tank 47 GPN2

135.32

PSI

90

400

Error-28

08/16/2026 18:51:06

0/1/1064/0/0/0

_Tank 47 UHPN2

120.3

PSI

90

400

OK

08/16/2026 18:52:12

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

116.390

PSI

0

125

OK

08/16/2026 18:59:52

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2683

PSI

200

2800

OK

08/16/2026 18:49:23

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1010

PSI

200

2800

OK

08/16/2026 19:00:47

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

2004

PSI

300

2800

OK

08/16/2026 19:01:09

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

716

PSI

150

1000

OK

08/16/2026 18:59:51

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

549

PSI

200

3000

OK

08/16/2026 18:44:05

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

602

PSI

400

3000

OK

08/16/2026 18:53:18

0/1/1021/0/0/0

C_DDC_133_CO2_105376

820

PSI

350

2800

OK

08/16/2026 19:01:31

0/1/1022/0/0/0

C_DDC_133_O2_105375

2004

PSI

300

2800

OK

08/16/2026 18:59:32

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

2014

PSI

300

2800

OK

08/16/2026 19:02:22

0/1/1003/0/0/0

C_EX3_121_He_

455

PSI

200

2800

OK

08/16/2026 18:55:32

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

1963

PSI

200

2800

OK

08/16/2026 19:00:43

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

268

PSI

300

2600

Lower Ctl Limit

08/16/2026 18:52:53

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1511

PSI

300

3000

OK

08/16/2026 18:49:55

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

1899

PSI

200

2800

OK

08/16/2026 18:50:36

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

1788

PSI

200

2800

OK

08/16/2026 18:48:38

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

1003

PSI

200

2800

OK

08/16/2026 19:01:02

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2071

PSI

200

2800

OK

08/16/2026 18:46:32

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

558

PSI

200

2800

OK

08/16/2026 18:56:42

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

2149

PSI

200

2800

OK

08/16/2026 18:49:39

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1685

PSI

200

2800

OK

08/16/2026 18:51:09

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

711

PSI

200

2800

OK

08/16/2026 19:01:15

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

288

PSI

140

350

OK

08/16/2026 19:00:23

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1618

PSI

200

2800

OK

08/16/2026 18:54:01

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

779

PSI

200

3000

OK

08/16/2026 18:56:05

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

18

PSI

5

25

OK

08/16/2026 18:59:08

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

1825

PSI

350

4000

OK

08/16/2026 18:52:55

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1600

PSI

200

4000

OK

08/16/2026 18:54:48

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

1724

PSI

500

3000

OK

08/16/2026 18:59:44

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

877

PSI

200

2800

OK

08/16/2026 19:01:41

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1290

PSI

200

4000

OK

08/16/2026 18:52:42

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

20

PSI

5

300

OK

08/16/2026 19:00:51

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

476

PSI

200

4000

OK

08/16/2026 18:53:51

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

338

PSI

200

3000

OK

08/16/2026 18:53:34

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

636

PSI

150

1500

OK

08/16/2026 18:50:38

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

980

PSI

500

3000

OK

08/16/2026 18:50:57

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

1986

PSI

500

3000

OK

08/16/2026 18:59:19

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

OK

08/16/2026 18:59:29

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

17.8

LBS

5

300

OK

08/16/2026 18:59:29

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

11.0

LBS

3

300

OK

08/16/2026 18:54:46

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

32.1

LBS

3

300

OK

08/16/2026 18:54:46

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

40.0

LBS

3

300

OK

08/16/2026 18:57:21

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

08/16/2026 18:57:21

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

102.7

LBS

3

300

OK

08/16/2026 18:58:50

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

08/16/2026 18:51:22

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

20.7

LBS

3

300

OK

08/16/2026 18:51:22

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.1

LBS

0

300

OK

08/16/2026 18:58:50

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

8.8

LBS

3

300

OK

08/16/2026 19:02:12

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

27.0

LBS

3

300

OK

08/16/2026 18:52:31

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

18.4

LBS

5

300

OK

08/16/2026 18:59:31

0/1/1045/0/0/0

C_Weigh_Scale_138_HBr

15.5

LBS

2

20

OK

08/16/2026 18:52:31

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

08/16/2026 19:02:12

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

37.7

LBS

3

300

OK

08/16/2026 18:59:31

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

0.0

LBS

0

300

OK

08/16/2026 18:47:56

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

9.6

LBS

3

300

OK

08/16/2026 18:47:56

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

31.4

LBS

3

300

OK

08/16/2026 18:40:11

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

35.5

LBS

3

300

OK

08/16/2026 18:57:06

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

77.1

LBS

3

300

OK

08/16/2026 18:57:06

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

34.6

LBS

3

300

OK

08/16/2026 18:56:42

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

85.4

LBS

3

300

OK

08/16/2026 18:53:16

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

102.1

LBS

3

300

OK

08/16/2026 18:53:16

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

49.1

LBS

3

300

OK

08/16/2026 18:40:11

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

08/16/2026 18:56:45

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

53.4

LBS

3

300

OK

08/16/2026 18:59:23

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

67.0

LBS

5

300

OK

08/16/2026 18:59:19

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

119.7

LBS

3

300

OK

08/16/2026 18:56:42

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

50.3

LBS

3

300

OK

08/16/2026 18:56:45

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

08/16/2026 18:59:23

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

mAMPS

No Data

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

mAMPS

No Data

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data