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WGR Readings: 118 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
12/12/2025 22:22:173/1/4030/0/0/0_1st Flr: City Water Pressure132.4PSI4090Upper Ctl Limit
10/10/2025 22:36:034/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.7 7.59Inactive
12/12/2025 22:01:034/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
12/12/2025 15:33:024/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.705InH2O01.5Inactive
12/12/2025 22:17:554/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.078InH2O01OK
12/12/2025 22:21:374/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.074InH2O02OK
12/12/2025 22:17:424/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.255InH2O02OK
12/02/2025 20:30:004/1/5030/0/0/0_2nd Flr: Cool Fogger WDR99.3 0100Inactive
12/12/2025 22:22:264/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
12/12/2025 21:37:434/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 20.0On/Off02OK
12/12/2025 22:17:174/1/5034/0/0/0_2nd Flr: Rm 237 Haskris Chiller0.0On/Off02OK
12/12/2025 22:11:544/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
12/12/2025 22:14:334/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic1.49PSI0.81.75OK
12/12/2025 22:05:204/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow351.0PSI275800OK
09/21/2025 08:18:313/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad402.3 0800Inactive
12/12/2025 22:14:183/1/4101/0/0/0_CDA Pressure121.8PSI90140OK
12/12/2025 22:09:510/1/1201/0/0/0_Cleanroom: Equip RH37% / 70.3F38 / 6542 / 75Lower Ctl Limit
12/12/2025 22:23:580/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
12/12/2025 22:23:580/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
12/12/2025 22:04:044/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112594PSI2003000OK
12/12/2025 22:18:444/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010400PSI2003000OK
12/12/2025 22:14:390/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
12/12/2025 22:20:343/1/4032/0/0/0_DI-RO: Flow1.59GPM0100OK
12/12/2025 22:11:273/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
12/12/2025 22:23:413/1/4017/0/0/0_DI-RO: Resistivity Gauge #1817.9Ohm-cm14100OK
12/12/2025 22:18:313/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)6.20PSI410OK
12/12/2025 22:16:263/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)8.12PSI410OK
12/12/2025 22:19:120/1/1065/0/0/0_GPN2 Pressure Gauge After Filters129.1PSI0400OK
12/12/2025 22:15:013/1/4015/0/0/0_House Vacuum-26.30inHg-30-23OK
12/12/2025 22:15:343/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp62.6DEG F085OK
12/12/2025 22:16:153/1/4002/0/0/0_LN2_Tanks_LI-1-1187.6InH2O0300OK
12/12/2025 22:09:433/1/4004/0/0/0_LN2_Tanks_LI-1-2230.0InH2O0300OK
12/12/2025 22:16:563/1/4006/0/0/0_LN2_Tanks_LI-1-396.3InH2O0300OK
12/12/2025 22:15:153/1/4001/0/0/0_LN2_Tanks_PI-1-1124.4PSI0300OK
12/12/2025 22:09:593/1/4003/0/0/0_LN2_Tanks_PI-1-259.6PSI0300OK
12/12/2025 22:22:353/1/4005/0/0/0_LN2_Tanks_PI-1-3151.6PSI0300OK
12/12/2025 22:19:320/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
12/12/2025 22:16:223/1/4020/0/0/0_PCW: Lower Temp Gauge48.4DEG F057OK
12/12/2025 22:21:373/1/4009/0/0/0_PCW: Middle Pressure Gauge85.5PSI6794OK
12/12/2025 22:12:003/1/4008/0/0/0_PCW: Upper Temp Gauge57.0F0160OK
12/12/2025 22:12:160/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall115.6PSI0135OK
12/12/2025 22:19:550/1/1062/0/0/0_Tank 47 GPN2129.07PSI90400OK
12/12/2025 22:11:140/1/1064/0/0/0_Tank 47 UHPN2120.3PSI90400OK
12/12/2025 22:19:520/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters115.523PSI0125OK
12/12/2025 22:15:370/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882698PSI2002800OK
12/12/2025 22:13:200/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491084PSI2002800OK
12/12/2025 22:20:490/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052502001PSI3002800OK
12/12/2025 22:12:260/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089741PSI1501000OK
12/12/2025 22:14:240/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089629PSI2003000OK
12/12/2025 22:22:130/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090624PSI4003000OK
12/12/2025 22:19:200/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
12/12/2025 22:11:240/1/1022/0/0/0C_DDC_133_O2_1053752004PSI3002800OK
12/12/2025 22:21:580/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_295PSI3002800Lower Ctl Limit
12/12/2025 22:20:040/1/1003/0/0/0C_EX3_121_He_545PSI2002800OK
12/12/2025 22:13:110/1/1002/0/0/0C_EX6_102_He_NoPVS2373PSI2002800OK
12/12/2025 22:21:480/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS633PSI3002600OK
12/12/2025 22:09:200/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541689PSI3003000OK
12/12/2025 22:15:010/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050082011PSI2002800OK
12/12/2025 22:11:450/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050092418PSI2002800OK
12/12/2025 22:12:050/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
12/12/2025 22:16:440/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822090PSI2002800OK
12/12/2025 22:12:390/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284580PSI2002800OK
12/12/2025 22:22:450/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052532575PSI2002800OK
12/12/2025 22:11:050/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691623PSI2002800OK
12/12/2025 22:21:210/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270774PSI2002800OK
12/12/2025 22:10:090/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271300PSI140350OK
12/12/2025 22:19:330/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721676PSI2002800OK
12/12/2025 22:16:100/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O774PSI2003000OK
12/12/2025 22:13:300/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O19PSI525OK
12/12/2025 22:24:160/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601908PSI3504000OK
12/12/2025 22:18:330/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
12/12/2025 22:14:310/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1849PSI5003000OK
12/12/2025 21:58:230/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243925PSI2002800OK
12/12/2025 22:19:100/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661299PSI2004000OK
12/12/2025 22:21:460/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261315PSI5300OK
12/12/2025 22:20:080/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265485PSI2004000OK
12/12/2025 22:18:580/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS335PSI2003000OK
12/12/2025 22:12:440/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3614PSI1501500OK
12/12/2025 22:18:250/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092985PSI5003000OK
12/12/2025 22:15:220/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020931933PSI5003000OK
12/12/2025 22:14:030/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300OK
12/12/2025 22:16:230/1/1041/0/0/1C_Weigh_Scale_125_CCL2F217.9LBS5300OK
12/12/2025 22:16:230/1/1041/0/0/0C_Weigh_Scale_125_CF412.3LBS3300OK
12/12/2025 22:06:550/1/1040/0/0/0C_Weigh_Scale_125_CHF333.3LBS3300OK
12/12/2025 22:06:550/1/1040/0/0/1C_Weigh_Scale_125_SF640.1LBS3300OK
12/12/2025 22:20:510/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300OK
12/12/2025 22:20:510/1/1051/0/0/0C_Weigh_Scale_126_SF615.4LBS3300OK
12/12/2025 22:10:340/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
12/12/2025 22:21:370/1/1050/0/0/0C_Weigh_Scale_130_CF421.8LBS3300OK
12/12/2025 22:21:370/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
12/12/2025 22:10:340/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher22.5LBS3300OK
12/12/2025 22:14:390/1/1046/0/0/0C_Weigh_Scale_138_C4F830.7LBS3300OK
12/12/2025 22:13:140/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane9.3LBS5300OK
 0/1/1045/0/0/0C_Weigh_Scale_138_HBr LBS  No Data
12/12/2025 22:13:140/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
12/12/2025 22:14:390/1/1046/0/0/1C_Weigh_Scale_138_SF621.6LBS3300OK
 0/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected LBS  No Data
12/12/2025 22:15:530/1/1053/0/0/1C_Weigh_Scale_143A_C4F815.6LBS3300OK
12/12/2025 22:15:530/1/1053/0/0/0C_Weigh_Scale_143A_SF617.3LBS3300OK
12/12/2025 22:23:000/1/1052/0/0/0C_Weigh_Scale_152_Far C4F836.4LBS3300OK
12/12/2025 22:11:000/1/1047/0/0/1C_Weigh_Scale_152_Far_CF413.5LBS3300OK
12/12/2025 22:11:000/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF316.1LBS3300OK
12/12/2025 22:21:300/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F835.1LBS3300OK
12/12/2025 22:09:280/1/1043/0/0/1C_Weigh_Scale_152_Near_CF418.8LBS3300OK
12/12/2025 22:09:280/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF328.0LBS3300OK
12/12/2025 22:23:000/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300OK
12/12/2025 22:08:230/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL38.4LBS3300OK
12/12/2025 22:11:070/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine20.2LBS5300OK
12/12/2025 22:14:030/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF418.4LBS3300OK
12/12/2025 22:21:300/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF622.9LBS3300OK
12/12/2025 22:08:230/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
12/12/2025 22:11:070/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
12/05/2025 10:51:340/1/1202/0/0/0High Precision Humidity Sensor_Not Installed-25.0mAMPS0100Inactive
12/05/2025 10:51:340/1/1202/0/0/1High Precision Temperature Sensor_Not Installed72.7mAMPS0200Inactive
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data