WGR/WTR Readings

01/28/2026 20:31:52

3/1/4030/0/0/0

_1st Flr: City Water Pressure

122.1

PSI

40

90

Error-27

01/28/2026 20:38:14

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

8.9

7.5

9

OK

01/28/2026 20:44:10

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

Low Battery

01/28/2026 20:33:35

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.800

InH2O

0

1.5

OK

01/28/2026 20:32:56

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.089

InH2O

0

1

OK

01/28/2026 20:44:37

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.074

InH2O

0

2

OK

01/28/2026 20:32:14

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.255

InH2O

0

2

OK

01/28/2026 20:17:43

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

99.1

0

100

OK

01/28/2026 20:31:00

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

0.0

On/Off

0

2

OK

01/28/2026 20:29:10

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2

0.0

On/Off

0

2

OK

01/28/2026 20:44:26

4/1/5034/0/0/0

_2nd Flr: Rm 237 Haskris Chiller

0.0

On/Off

0

2

OK

01/28/2026 20:32:51

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

01/28/2026 20:35:03

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

1.46

PSI

0.8

1.75

OK

01/28/2026 20:40:14

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

351.1

PSI

275

800

OK

09/21/2025 08:18:31

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

402.3

0

800

Inactive

01/28/2026 20:36:37

3/1/4101/0/0/0

_CDA Pressure

117.6

PSI

90

140

OK

01/28/2026 20:38:01

0/1/1201/0/0/0

_Cleanroom: Equip RH

31% / 70.3

F

38 / 65

42 / 75

Lower Ctl Limit

01/28/2026 20:38:09

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

1.0

On/Off

0

2

OK

01/28/2026 20:38:09

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

01/28/2026 20:34:50

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2591

PSI

200

3000

OK

01/28/2026 19:21:49

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

391

PSI

200

3000

Inactive

01/28/2026 20:37:36

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

01/28/2026 20:39:43

3/1/4032/0/0/0

_DI-RO: Flow

2.14

GPM

0

100

OK

01/28/2026 20:36:10

3/1/4031/0/0/0

_DI-RO: Light Sensor

0.0

On/Off

0

2

OK

01/28/2026 20:40:40

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

17.9

Ohm-cm

14

100

OK

01/28/2026 20:42:37

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

6.20

PSI

4

10

OK

01/28/2026 20:41:51

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

7.87

PSI

4

10

OK

01/28/2026 20:41:19

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

126.2

PSI

0

400

OK

01/28/2026 20:30:45

3/1/4015/0/0/0

_House Vacuum

-25.57

inHg

-30

-23

OK

01/28/2026 20:36:40

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

56.6

DEG F

0

85

OK

01/28/2026 20:21:55

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

188.7

InH2O

0

300

OK

01/28/2026 20:38:20

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

217.6

InH2O

0

300

OK

01/28/2026 20:32:14

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

91.6

InH2O

0

300

OK

01/28/2026 20:39:52

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

130.1

PSI

0

300

OK

01/28/2026 20:41:42

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

58.9

PSI

0

300

OK

01/10/2026 22:46:50

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

152.0

PSI

0

300

Inactive

01/28/2026 20:39:51

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

100.0

PSI

0

110

OK

01/28/2026 20:41:22

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

50.1

DEG F

0

57

OK

01/28/2026 20:40:24

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

87.3

PSI

67

94

OK

01/28/2026 20:30:43

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

57.3

F

0

160

OK

01/28/2026 20:34:47

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

115.5

PSI

0

135

OK

01/28/2026 20:36:15

0/1/1062/0/0/0

_Tank 47 GPN2

125.06

PSI

90

400

OK

01/28/2026 20:36:31

0/1/1064/0/0/0

_Tank 47 UHPN2

117.6

PSI

90

400

OK

01/28/2026 20:37:56

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

112.636

PSI

0

125

OK

01/28/2026 20:40:59

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2683

PSI

200

2800

OK

01/28/2026 20:37:58

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1064

PSI

200

2800

OK

01/28/2026 20:44:24

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

2001

PSI

300

2800

OK

01/28/2026 20:31:02

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

722

PSI

150

1000

OK

01/28/2026 20:31:11

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

629

PSI

200

3000

OK

01/28/2026 20:42:04

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

602

PSI

400

3000

OK

01/28/2026 20:42:26

0/1/1021/0/0/0

C_DDC_133_CO2_105376

823

PSI

350

2800

OK

01/28/2026 20:35:49

0/1/1022/0/0/0

C_DDC_133_O2_105375

2004

PSI

300

2800

OK

01/28/2026 20:45:24

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

271

PSI

300

2800

Lower Ctl Limit

01/28/2026 20:40:34

0/1/1003/0/0/0

C_EX3_121_He_

523

PSI

200

2800

OK

01/28/2026 20:36:44

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

2364

PSI

200

2800

OK

01/28/2026 20:45:13

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

580

PSI

300

2600

OK

01/28/2026 20:32:43

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1659

PSI

300

3000

OK

01/28/2026 20:37:59

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

1989

PSI

200

2800

OK

01/28/2026 20:35:11

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

2344

PSI

200

2800

OK

01/28/2026 20:39:22

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

1003

PSI

200

2800

OK

01/28/2026 20:39:53

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2095

PSI

200

2800

OK

01/28/2026 20:39:08

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

569

PSI

200

2800

OK

01/28/2026 20:31:57

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

2569

PSI

200

2800

OK

01/28/2026 20:36:41

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1664

PSI

200

2800

OK

01/28/2026 20:30:39

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

771

PSI

200

2800

OK

01/28/2026 20:34:19

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

288

PSI

140

350

OK

01/28/2026 20:44:52

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1676

PSI

200

2800

OK

01/28/2026 20:40:46

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

774

PSI

200

3000

OK

01/28/2026 20:34:00

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

18

PSI

5

25

OK

01/28/2026 20:44:23

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

1905

PSI

350

4000

Error-27

01/28/2026 20:37:33

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1600

PSI

200

4000

OK

01/28/2026 20:39:31

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

1821

PSI

500

3000

OK

01/28/2026 20:45:07

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

914

PSI

200

2800

OK

01/28/2026 20:43:30

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1290

PSI

200

4000

OK

01/28/2026 20:44:00

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

9

PSI

5

300

OK

01/28/2026 20:32:47

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

487

PSI

200

4000

OK

01/28/2026 20:43:01

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

338

PSI

200

3000

OK

01/28/2026 20:38:55

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

615

PSI

150

1500

OK

01/28/2026 20:37:28

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

980

PSI

500

3000

OK

01/28/2026 20:44:16

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

1931

PSI

500

3000

OK

01/28/2026 20:39:34

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

OK

01/28/2026 20:43:02

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

19.7

LBS

5

300

OK

01/28/2026 20:43:02

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

12.2

LBS

3

300

OK

01/28/2026 20:41:05

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

34.3

LBS

3

300

OK

01/28/2026 20:41:05

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

40.0

LBS

3

300

OK

01/28/2026 20:44:19

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

01/28/2026 20:44:19

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

14.7

LBS

3

300

OK

01/28/2026 20:33:17

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

01/28/2026 20:44:02

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

21.7

LBS

3

300

OK

01/28/2026 20:44:02

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.2

LBS

0

300

OK

01/28/2026 20:33:17

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

18.8

LBS

3

300

OK

01/28/2026 20:32:23

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

30.4

LBS

3

300

OK

01/28/2026 20:35:45

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

9.0

LBS

5

300

OK

0/1/1045/0/0/0

C_Weigh_Scale_138_HBr

LBS

No Data

01/28/2026 20:35:45

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

01/28/2026 20:32:23

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

21.1

LBS

3

300

OK

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

LBS

No Data

01/28/2026 20:43:20

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

15.5

LBS

3

300

OK

01/28/2026 20:43:20

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

16.3

LBS

3

300

OK

01/28/2026 20:37:13

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

36.6

LBS

3

300

OK

01/28/2026 20:37:20

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

13.8

LBS

3

300

OK

01/28/2026 20:37:20

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

16.0

LBS

3

300

OK

01/28/2026 20:19:38

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

32.3

LBS

3

300

OK

01/28/2026 20:41:23

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

18.8

LBS

3

300

OK

01/28/2026 20:41:23

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

28.1

LBS

3

300

OK

01/28/2026 20:37:13

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

01/28/2026 20:39:02

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

8.1

LBS

3

300

OK

01/28/2026 20:33:27

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

20.6

LBS

5

300

OK

01/28/2026 20:39:34

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

17.9

LBS

3

300

OK

01/28/2026 20:19:38

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

21.2

LBS

3

300

OK

01/28/2026 20:33:27

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

01/28/2026 20:39:02

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

12/05/2025 10:51:34

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

-25.0

mAMPS

0

100

Inactive

12/05/2025 10:51:34

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

72.7

mAMPS

0

200

Inactive

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data