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WGR Readings: 118 Items 
Timestamp
NodeID
Description
Reading
Units
LCL
UCL
Status
08/04/2026 14:40:153/1/4030/0/0/0_1st Flr: City Water Pressure69.4PSI4090OK
08/04/2026 14:52:564/1/5037/0/0/0_2nd Flr: AH Scrubber Signet pH8.6 7.59OK
08/04/2026 14:52:224/1/5031/0/0/0_2nd Flr: AH Scrubber Sump Pump Liquid Level1.0On/Off02OK
08/04/2026 14:04:464/1/5038/0/0/0_2nd Flr: AH1 Magnehelic 35% First Filter DP0.605InH2O01.5OK
08/04/2026 14:46:314/1/5039/0/0/0_2nd Flr: AH1 Magnehelic 95% Filter DP0.122InH2O01OK
08/04/2026 14:20:084/1/5042/0/0/0_2nd Flr: AH3 Magnehelic 10.064InH2O02OK
08/04/2026 14:53:004/1/5043/0/0/0_2nd Flr: AH3 Magnehelic 20.320InH2O02OK
08/04/2026 10:55:304/1/5030/0/0/0_2nd Flr: Cool Fogger WDR0.7 0100Inactive
08/04/2026 14:27:184/1/5032/0/0/0_2nd Flr: Rm 237 Fluid Level 10.0On/Off02OK
08/03/2026 12:30:514/1/5033/0/0/0_2nd Flr: Rm 237 Fluid Level 21.0On/Off02Inactive
08/04/2026 14:53:094/1/5034/0/0/0_2nd Flr: Rm 237 Haskris Chiller0.0On/Off02OK
08/04/2026 14:31:274/1/5035/0/0/0_2nd Flr: Rm 237 Light Sensor 20.0On/Off02OK
08/04/2026 14:46:114/1/5001/0/0/0_2nd Flr: Wet Scrubber Magnehelic0.94PSI0.81.75OK
08/04/2026 14:51:574/1/5036/0/0/0_2ND_Flr: AH Scrubber Signet Flow301.0PSI275800OK
08/04/2026 14:50:053/1/4033/0/0/0_CDA Flow (CFM): Equipment Pad781.1 0800OK
08/04/2026 14:42:523/1/4101/0/0/0_CDA Pressure129.5PSI90140OK
08/04/2026 14:46:550/1/1201/0/0/0_Cleanroom: Equip RH43% / 70.5F38 / 6542 / 75Upper Ctl Limit
08/04/2026 14:53:070/1/1054/0/0/0_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator1.0On/Off02OK
08/04/2026 14:53:070/1/1054/0/0/1_Cleanroom: Rm 101C Rasco START Light Indicator1.0On/Off02OK
08/04/2026 13:52:074/1/5041/0/0/0_Cleanroom: Rm 101C_Argon_1050112585PSI2003000Inactive
08/04/2026 14:44:114/1/5040/0/0/0_Cleanroom: Rm 101C_Oxygen_105010374PSI2003000OK
08/04/2026 14:47:100/1/1055/0/0/0_Cleanroom: Rm 101D Haskris Building Water Fault Indicator0.0On/Off02OK
08/04/2026 14:47:053/1/4031/0/0/0_DI-RO: Light Sensor0.0On/Off02OK
08/04/2026 14:44:593/1/4017/0/0/0_DI-RO: Resistivity Gauge #1817.9Ohm-cm14100OK
08/04/2026 14:45:083/1/4019/0/0/0_DI-RO:DI Water Tank Pressure (Tank 2)6.20PSI410OK
08/04/2026 14:44:513/1/4018/0/0/0_DI-RO:RO Water Tank Pressure (Tank 1)7.87PSI410OK
08/04/2026 14:49:290/1/1065/0/0/0_GPN2 Pressure Gauge After Filters123.4PSI0400OK
08/04/2026 14:48:403/1/4015/0/0/0_House Vacuum-26.13inHg-30-23OK
08/04/2026 14:45:393/1/4016/0/0/0_House Vacuum: Water Circ Pump Temp71.0DEG F085OK
08/04/2026 14:41:113/1/4002/0/0/0_LN2_Tanks_LI-1-1188.9InH2O0300OK
08/04/2026 14:41:403/1/4004/0/0/0_LN2_Tanks_LI-1-2212.0InH2O0300OK
08/04/2026 14:46:473/1/4006/0/0/0_LN2_Tanks_LI-1-3103.6InH2O0300OK
08/04/2026 14:42:163/1/4001/0/0/0_LN2_Tanks_PI-1-1129.9PSI0300OK
08/04/2026 14:48:183/1/4003/0/0/0_LN2_Tanks_PI-1-257.8PSI0300OK
08/04/2026 14:45:573/1/4005/0/0/0_LN2_Tanks_PI-1-3151.6PSI0300OK
08/04/2026 14:55:250/1/1060/0/0/0_N2 Pressure Gauge Canon EX3 Stepper_Chase 121100.0PSI0110OK
08/04/2026 14:50:573/1/4020/0/0/0_PCW: Lower Temp Gauge50.6DEG F052OK
08/04/2026 14:53:363/1/4009/0/0/0_PCW: Middle Pressure Gauge83.0PSI6794OK
08/04/2026 14:51:233/1/4008/0/0/0_PCW: Upper Temp Gauge59.2F0160OK
08/04/2026 14:29:360/1/1061/0/0/0_Pressure Gauge At EMN2 Shut Off_East Wall96.1PSI0135OK
08/04/2026 14:45:363/1/4032/0/0/0_RO: Flow to 2360.96GPM0100OK
08/04/2026 14:42:440/1/1062/0/0/0_Tank 47 GPN2122.38PSI90400OK
08/04/2026 14:52:430/1/1064/0/0/0_Tank 47 UHPN2120.3PSI90400OK
08/04/2026 14:52:280/1/1063/0/0/0_UHPN2 Pressure Gauge After Filters114.656PSI0125OK
08/04/2026 14:41:370/1/1006/0/0/0C_AJA UHV Ebeam_122_Ar_1052882689PSI2002800OK
08/04/2026 14:45:360/1/1012/0/0/0C_AJACovaporator_129_Ar_1052491007PSI2002800OK
08/04/2026 14:55:220/1/1016/0/0/0C_Beneq ALD Deposition_132_Ar_1052502004PSI3002800OK
08/04/2026 14:43:400/1/1101/0/0/0C_Cabinet2_Gas Bunker_100% Silane_102089733PSI1501000OK
08/04/2026 14:43:210/1/1102/0/0/0C_Cabinet2_Gas Bunker_2% Silane_102089549PSI2003000OK
08/04/2026 14:45:260/1/1103/0/0/0C_Cabinet3_Gas Bunker_Ethylene_102090642PSI4003000OK
08/04/2026 14:48:590/1/1021/0/0/0C_DDC_133_CO2_105376820PSI3502800OK
08/04/2026 14:43:100/1/1022/0/0/0C_DDC_133_O2_1053752004PSI3002800OK
08/04/2026 14:51:310/1/1004/0/0/0C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_2023PSI3002800Error-28
08/04/2026 14:48:220/1/1003/0/0/0C_EX3_121_He_458PSI2002800OK
08/04/2026 14:52:180/1/1002/0/0/0C_EX6_102_He_NoPVS2100PSI2002800OK
08/04/2026 14:41:020/1/1001/0/0/0C_EX6_102_Kr 1.25%/Ne Balance_NoPVS288PSI3002600Lower Ctl Limit
08/04/2026 14:49:180/1/1014/0/0/0C_FC300 Flip Chip Bonder_132_4% H2/He_1052541748PSI3003000OK
08/04/2026 14:51:380/1/1009/0/0/0C_General Use ICP Etchers_126_Ar_1050081929PSI2002800OK
08/04/2026 14:48:000/1/1008/0/0/0C_General Use ICP Etchers_126_He_1050091834PSI2002800OK
08/04/2026 14:47:100/1/1023/0/0/0C_HummerSputteringSystem_137_Ar_1052551003PSI2002800OK
08/04/2026 14:44:020/1/1011/0/0/0C_IR Group ICP Etcher_126_Ar_1052822088PSI2002800OK
08/04/2026 14:48:060/1/1010/0/0/0C_IR Group ICP Etcher_126_He_105284564PSI2002800OK
08/04/2026 14:41:170/1/1015/0/0/0C_Ontos 7 Oxide Removal_132_He_1052532377PSI2002800OK
08/04/2026 14:48:090/1/1018/0/0/0C_Oxford HD PECVD_133_Ar_1052691685PSI2002800OK
08/04/2026 14:55:230/1/1019/0/0/0C_Oxford HD PECVD_133_He_105270708PSI2002800OK
08/04/2026 14:45:080/1/1020/0/0/0C_Oxford HD PECVD_133_SF6_105271291PSI140350OK
08/04/2026 14:50:020/1/1013/0/0/0C_PlasmaTech Orange RIE_130_Ar_1052721647PSI2002800OK
08/04/2026 14:52:440/1/1106/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O774PSI2003000OK
08/04/2026 14:54:230/1/1026/0/0/0C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O18PSI525OK
08/04/2026 14:41:570/1/1027/0/0/0C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_1052601819PSI3504000OK
08/04/2026 14:54:270/1/1028/0/0/0C_PlasmaTherm PECVD_138_He_1052591600PSI2004000OK
08/04/2026 14:53:090/1/1017/0/0/0C_RTP_121_N2/5% H2_NoPVS1722PSI5003000OK
08/04/2026 14:46:200/1/1007/0/0/0C_STJ Fluorine RIE & Apex ICP_125_Ar_105243886PSI2002800OK
08/04/2026 14:42:540/1/1029/0/0/0C_STS Deep Trench DRIE_138_Ar_1052661290PSI2004000OK
08/04/2026 14:43:250/1/1024/0/0/0C_STS Deep Trench DRIE_138_C4F8_10261311PSI5300OK
08/04/2026 14:42:560/1/1030/0/0/0C_STS Deep Trench DRIE_138_He_105265473PSI2004000OK
08/04/2026 14:42:380/1/1025/0/0/0C_STS Deep Trench DRIE_138_SF6_NoPVS329PSI2003000OK
08/04/2026 14:49:570/1/1035/0/0/0C_Supply_Pressure_152_Near_CHF3637PSI1501500OK
08/04/2026 14:54:090/1/1104/0/0/0C_SystemA_Gas Bunker_H2_102092980PSI5003000OK
08/04/2026 14:53:010/1/1105/0/0/0C_SystemB_Gas Bunker_H2_1020932079PSI5003000OK
02/21/2026 07:36:290/1/1056/0/0/1C_Weigh_Scale_122_Not_Connected_CH20.2LBS0300Inactive
08/04/2026 14:40:210/1/1041/0/0/1C_Weigh_Scale_125_CCL2F218.1LBS5300OK
08/04/2026 14:40:210/1/1041/0/0/0C_Weigh_Scale_125_CF411.3LBS3300OK
08/04/2026 14:49:380/1/1040/0/0/0C_Weigh_Scale_125_CHF331.6LBS3300OK
08/04/2026 14:49:380/1/1040/0/0/1C_Weigh_Scale_125_SF642.7LBS3300OK
08/04/2026 08:50:560/1/1051/0/0/1C_Weigh_Scale_126_Not_Connected0.0LBS0300Inactive
08/04/2026 08:50:560/1/1051/0/0/0C_Weigh_Scale_126_SF611.2LBS3300Inactive
08/04/2026 14:23:520/1/1049/0/0/1C_Weigh_Scale_130_2nd CHANNEL NOT IN USE0.0LBS0300OK
08/04/2026 14:55:230/1/1050/0/0/0C_Weigh_Scale_130_CF40.2LBS3300Lower Ctl Limit
08/04/2026 14:55:230/1/1050/0/0/1C_Weigh_Scale_130_Not_Connected0.1LBS0300OK
08/04/2026 14:23:520/1/1049/0/0/0C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher3.6LBS3300OK
08/04/2026 13:46:330/1/1046/0/0/0C_Weigh_Scale_138_C4F827.1LBS3300Inactive
08/04/2026 13:59:410/1/1042/0/0/0C_Weigh_Scale_138_Dichlorosilane9.8LBS5300OK
 0/1/1045/0/0/0C_Weigh_Scale_138_HBr LBS  No Data
08/04/2026 13:59:410/1/1042/0/0/1C_Weigh_Scale_138_Not_Connected0.3LBS0300OK
08/04/2026 13:46:330/1/1046/0/0/1C_Weigh_Scale_138_SF619.5LBS3300Inactive
 0/1/1045/0/0/1C_Weigh_Scale_138_T30_Not_Connected LBS  No Data
08/04/2026 14:48:350/1/1053/0/0/1C_Weigh_Scale_143A_C4F80.4LBS3300Lower Ctl Limit
08/04/2026 14:48:350/1/1053/0/0/0C_Weigh_Scale_143A_SF631.4LBS3300OK
08/04/2026 08:47:010/1/1052/0/0/0C_Weigh_Scale_152_Far C4F80.1LBS3300Inactive
08/04/2026 08:41:400/1/1047/0/0/1C_Weigh_Scale_152_Far_CF413.7LBS3300Inactive
08/04/2026 08:41:400/1/1047/0/0/0C_Weigh_Scale_152_Far_CHF315.0LBS3300Inactive
08/04/2026 14:55:480/1/1044/0/0/1C_Weigh_Scale_152_Near_C4F828.8LBS3300OK
08/04/2026 14:55:490/1/1043/0/0/1C_Weigh_Scale_152_Near_CF441.0LBS3300OK
08/04/2026 14:55:490/1/1043/0/0/0C_Weigh_Scale_152_Near_CHF346.1LBS3300OK
08/04/2026 08:47:010/1/1052/0/0/1C_Weigh_Scale_152_Not_Connected0.2LBS0300Inactive
08/04/2026 14:19:010/1/1048/0/0/0C_Weigh_Scale_CH 130_BCL34.5LBS3300OK
08/04/2026 14:24:400/1/1039/0/0/0C_Weigh_Scale_CH 130_Chlorine67.8LBS5300OK
02/21/2026 07:36:290/1/1056/0/0/0C_Weigh_Scale_Chase 122_SAMCO RIE_CF417.8LBS3300Inactive
08/04/2026 14:55:480/1/1044/0/0/0C_Weigh_Scale_Versaline DRIE_152_Near_SF651.1LBS3300OK
08/04/2026 14:19:010/1/1048/0/0/1CHANNEL NOT IN USE0.0LBS00OK
08/04/2026 14:24:400/1/1039/0/0/1CHANNEL NOT IN USE0.0LBS00OK
 3/1/4304/0/0/0Flow Meter_Not Installed Ch 1 GPM  No Data
 3/1/4304/0/0/1Flow Meter_Not Installed Ch 2 GPM  No Data
 0/1/1202/0/0/0High Precision Humidity Sensor_Not Installed mAMPS  No Data
 0/1/1202/0/0/1High Precision Temperature Sensor_Not Installed mAMPS  No Data
 0/1/1005/0/0/0Z_(not installed - interference) mAMPS  No Data
 0/1/1031/0/0/0Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed    No Data